DE60200992D1 - "Timing"-Kalibrierung und -Verifikation von Testern für elektronische Schaltungen - Google Patents

"Timing"-Kalibrierung und -Verifikation von Testern für elektronische Schaltungen

Info

Publication number
DE60200992D1
DE60200992D1 DE60200992T DE60200992T DE60200992D1 DE 60200992 D1 DE60200992 D1 DE 60200992D1 DE 60200992 T DE60200992 T DE 60200992T DE 60200992 T DE60200992 T DE 60200992T DE 60200992 D1 DE60200992 D1 DE 60200992D1
Authority
DE
Germany
Prior art keywords
testers
verification
electronic circuits
timing calibration
calibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60200992T
Other languages
English (en)
Other versions
DE60200992T2 (de
Inventor
Romi Mayder
Noriyuki Sugihara
Andrew Tse
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Verigy Singapore Pte Ltd
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE60200992D1 publication Critical patent/DE60200992D1/de
Application granted granted Critical
Publication of DE60200992T2 publication Critical patent/DE60200992T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31908—Tester set-up, e.g. configuring the tester to the device under test [DUT], down loading test patterns
    • G01R31/3191—Calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/3193—Tester hardware, i.e. output processing circuits with comparison between actual response and known fault free response
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/3193—Tester hardware, i.e. output processing circuits with comparison between actual response and known fault free response
    • G01R31/31937—Timing aspects, e.g. measuring propagation delay
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Tests Of Electronic Circuits (AREA)
DE60200992T 2001-08-07 2002-02-26 "Timing"-Kalibrierung und -Verifikation von Testern für elektronische Schaltungen Expired - Lifetime DE60200992T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/923,548 US6570397B2 (en) 2001-08-07 2001-08-07 Timing calibration and timing calibration verification of electronic circuit testers
US923548 2001-08-07

Publications (2)

Publication Number Publication Date
DE60200992D1 true DE60200992D1 (de) 2004-09-23
DE60200992T2 DE60200992T2 (de) 2005-08-11

Family

ID=25448865

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60200992T Expired - Lifetime DE60200992T2 (de) 2001-08-07 2002-02-26 "Timing"-Kalibrierung und -Verifikation von Testern für elektronische Schaltungen

Country Status (5)

Country Link
US (1) US6570397B2 (de)
EP (1) EP1283423B1 (de)
JP (1) JP2003130938A (de)
DE (1) DE60200992T2 (de)
TW (1) TW591238B (de)

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US6829553B2 (en) * 2001-03-30 2004-12-07 Intel Corporation Method of and apparatus for measuring the correctness of and correcting an automatic test arrangement
CN100573176C (zh) * 2001-06-07 2009-12-23 株式会社艾德温特斯特 半导体试验装置的校准方法
DE10155467B4 (de) * 2001-11-09 2004-11-25 Infineon Technologies Ag Verfahren und Vorrichtung zum Auffinden eines Fehlers in einem Signalpfad auf einer Leiterplatte
DE10159165B4 (de) * 2001-12-03 2007-02-08 Agilent Technologies, Inc. (n.d.Ges.d.Staates Delaware), Palo Alto Vorrichtung zum Messen und/oder Kalibrieren eines Testkopfes
US7180314B1 (en) * 2001-12-14 2007-02-20 Lecroy Corporation Self-calibrating electrical test probe calibratable while connected to an electrical component under test
KR100518546B1 (ko) * 2002-12-13 2005-10-04 삼성전자주식회사 집적회로 패키지를 테스트하기 위한 테스트 보드 및 이를이용한 테스터 보정방법
US6891392B2 (en) 2003-02-21 2005-05-10 Lsi Logic Corporation Substrate impedance measurement
US6946866B2 (en) * 2003-05-30 2005-09-20 Lsi Logic Corporation Measurement of package interconnect impedance using tester and supporting tester
JP4354235B2 (ja) * 2003-09-12 2009-10-28 株式会社アドバンテスト 試験装置及び調整方法
US6979996B2 (en) * 2003-09-15 2005-12-27 International Business Machines Corporation Apparatus and method for automatic elimination of round-trip delay errors induced by automatic test equipment calibration
US7154259B2 (en) * 2003-10-23 2006-12-26 Formfactor, Inc. Isolation buffers with controlled equal time delays
TWI272394B (en) * 2004-02-24 2007-02-01 Mjc Probe Inc Multi-function probe card
US7106081B2 (en) * 2004-07-08 2006-09-12 Verigy Ipco Parallel calibration system for a test device
US7595629B2 (en) * 2004-07-09 2009-09-29 Formfactor, Inc. Method and apparatus for calibrating and/or deskewing communications channels
DE102004047308A1 (de) * 2004-09-29 2006-03-30 Rohde & Schwarz Gmbh & Co. Kg Verfahren zur Verifikation der Kalibrierung eines Mehrtor-Netzwerkanalysators und Kalibriereinheit hierfür
US7323897B2 (en) * 2004-12-16 2008-01-29 Verigy (Singapore) Pte. Ltd. Mock wafer, system calibrated using mock wafer, and method for calibrating automated test equipment
US7394275B1 (en) * 2005-03-29 2008-07-01 Unisys Corporation Systems and methods for generating and evaluating high frequency, low voltage swing signals at in-circuit testing
US7957461B2 (en) * 2005-03-31 2011-06-07 Teradyne, Inc. Calibrating automatic test equipment
JP2006319273A (ja) * 2005-05-16 2006-11-24 Agilent Technol Inc インターフェースアッセンブリ、及びそれを用いた乾燥ガス封入装置
JP5021924B2 (ja) * 2005-09-27 2012-09-12 株式会社アドバンテスト パフォーマンスボード、試験装置及び試験方法
US7502974B2 (en) * 2006-02-22 2009-03-10 Verigy (Singapore) Pte. Ltd. Method and apparatus for determining which timing sets to pre-load into the pin electronics of a circuit test system, and for pre-loading or storing said timing sets
JP4929797B2 (ja) * 2006-04-05 2012-05-09 株式会社デンソー 半導体評価装置
US7532014B2 (en) * 2006-08-08 2009-05-12 Credence Systems Corporation LRL vector calibration to the end of the probe needles for non-standard probe cards for ATE RF testers
KR100736680B1 (ko) * 2006-08-10 2007-07-06 주식회사 유니테스트 반도체 소자 테스트 장치의 캘리브레이션 방법
US7852094B2 (en) * 2006-12-06 2010-12-14 Formfactor, Inc. Sharing resources in a system for testing semiconductor devices
US8405290B2 (en) * 2008-11-14 2013-03-26 Ceravision Limited Light source for microwave powered lamp
BRPI0823248A2 (pt) * 2008-11-14 2015-06-16 Cera Vision Ltd Fonte de luz de microondas com guia de onda de dielétrico sólido .
TWI449923B (zh) * 2009-12-02 2014-08-21 Hon Hai Prec Ind Co Ltd 低壓差分訊號時序測試系統及方法
CN102340427B (zh) * 2010-07-28 2016-04-27 中山市云创知识产权服务有限公司 网络接口测试电路
US8692538B2 (en) * 2011-06-09 2014-04-08 Teradyne, Inc. Test equipment calibration
CN102338856A (zh) * 2011-06-17 2012-02-01 杭州炬华科技股份有限公司 用于自动化针床的工装电路
US10296433B2 (en) * 2012-06-01 2019-05-21 Litepoint Corporation Method for transferring and confirming transfer of predefined data to a device under test (DUT) during a test sequence
TWI554772B (zh) * 2013-12-13 2016-10-21 Mpi Corp Detection and debugging of the system
DE102013227138B4 (de) * 2013-12-23 2020-06-18 Rohde & Schwarz GmbH & Co. Kommanditgesellschaft Kalibriermodul mit integriertem Leistungsdetektor
CN103869272A (zh) * 2014-03-24 2014-06-18 哈尔滨理工大学 高压开关动特性测试仪校验装置
KR102196996B1 (ko) * 2014-11-10 2020-12-31 에스케이하이닉스 주식회사 반도체 장치 테스트 시스템 및 그 테스트 방법
TWI591362B (zh) * 2015-02-13 2017-07-11 何恆春 自動調校半導體元件測試機台之方法
US10048348B2 (en) 2015-08-05 2018-08-14 Teradyne, Inc. MEM relay assembly for calibrating automated test equipment
US9903932B2 (en) * 2015-12-07 2018-02-27 Rohde & Schwarz Gmbh & Co. Kg Measuring system, calibration device and measuring method with uncertainty analysis
WO2017144087A1 (en) * 2016-02-23 2017-08-31 Advantest Corporation Method and device for calibrating an automated test equipment
CN111123076A (zh) * 2020-01-09 2020-05-08 苏州华兴源创科技股份有限公司 校准装置及自动测试设备
CN113447791B (zh) * 2020-03-25 2023-04-07 北京确安科技股份有限公司 资源共享结构测试负载板的检测方法、装置及电子设备
CN114200370A (zh) * 2020-09-18 2022-03-18 中国科学院微电子研究所 一种测试设备及集成电路测试方法
CN113064060B (zh) * 2021-03-17 2024-03-01 胜达克半导体科技(上海)股份有限公司 一种芯片自动测试机内测试通道信号传输时间的校准方法
CN114325542B (zh) * 2021-11-23 2023-08-22 中国船舶重工集团公司第七0九研究所 集成电路测试系统直流信号校准板、校准装置及校准方法
CN116859894B (zh) * 2023-08-08 2024-04-02 南京航空航天大学 基于多代理技术的直升机内部电子调节器的自动测试方法

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JP3616247B2 (ja) * 1998-04-03 2005-02-02 株式会社アドバンテスト Ｉｃ試験装置におけるスキュー調整方法及びこれに用いる疑似デバイス
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Also Published As

Publication number Publication date
EP1283423B1 (de) 2004-08-18
TW591238B (en) 2004-06-11
US6570397B2 (en) 2003-05-27
US20030030453A1 (en) 2003-02-13
EP1283423A1 (de) 2003-02-12
DE60200992T2 (de) 2005-08-11
JP2003130938A (ja) 2003-05-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: VERIGY (SINGAPORE) PTE. LTD., SINGAPORE, SG