DE602006019967D1 - Halbleitervorrichtung und herstellungsverfahren dafür - Google Patents

Halbleitervorrichtung und herstellungsverfahren dafür

Info

Publication number
DE602006019967D1
DE602006019967D1 DE602006019967T DE602006019967T DE602006019967D1 DE 602006019967 D1 DE602006019967 D1 DE 602006019967D1 DE 602006019967 T DE602006019967 T DE 602006019967T DE 602006019967 T DE602006019967 T DE 602006019967T DE 602006019967 D1 DE602006019967 D1 DE 602006019967D1
Authority
DE
Germany
Prior art keywords
layer
junction
semiconductor device
conductivity type
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006019967T
Other languages
English (en)
Inventor
Christopher Harris
Cem Basceri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cree Sweden AB
Original Assignee
Cree Sweden AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cree Sweden AB filed Critical Cree Sweden AB
Publication of DE602006019967D1 publication Critical patent/DE602006019967D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/861—Diodes
    • H01L29/872—Schottky diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
    • H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
    • H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
    • H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
    • H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
    • H01L29/6609—Diodes
    • H01L29/66143—Schottky diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
    • H01L29/1608—Silicon carbide

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Thyristors (AREA)
  • Bipolar Transistors (AREA)
  • Light Receiving Elements (AREA)
  • Led Devices (AREA)
DE602006019967T 2005-07-20 2006-07-20 Halbleitervorrichtung und herstellungsverfahren dafür Active DE602006019967D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/185,106 US7768092B2 (en) 2005-07-20 2005-07-20 Semiconductor device comprising a junction having a plurality of rings
PCT/SE2006/000902 WO2007011294A1 (en) 2005-07-20 2006-07-20 Semiconductor device and a method for production thereof

Publications (1)

Publication Number Publication Date
DE602006019967D1 true DE602006019967D1 (de) 2011-03-17

Family

ID=37669087

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006019967T Active DE602006019967D1 (de) 2005-07-20 2006-07-20 Halbleitervorrichtung und herstellungsverfahren dafür

Country Status (6)

Country Link
US (1) US7768092B2 (de)
EP (1) EP1905089B1 (de)
JP (1) JP4972090B2 (de)
AT (1) ATE497636T1 (de)
DE (1) DE602006019967D1 (de)
WO (1) WO2007011294A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112006002377B4 (de) * 2005-09-08 2014-04-24 Mitsubishi Denki K.K. Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung
JP2008177369A (ja) * 2007-01-18 2008-07-31 Sumitomo Electric Ind Ltd ショットキバリアダイオード
JP2009054640A (ja) * 2007-08-23 2009-03-12 National Institute Of Advanced Industrial & Technology 高出力ダイヤモンド半導体素子
KR101027138B1 (ko) 2009-12-24 2011-04-05 페어차일드코리아반도체 주식회사 다이아몬드상 카본 박막 패시배이션을 적용한 질화물계 반도체 소자 및 그 제조 방법
JP2013232564A (ja) * 2012-04-27 2013-11-14 National Institute Of Advanced Industrial & Technology 半導体装置および半導体装置の製造方法
JPWO2014054319A1 (ja) * 2012-10-02 2016-08-25 三菱電機株式会社 半導体装置およびその製造方法
JP2014146748A (ja) * 2013-01-30 2014-08-14 Toshiba Corp 半導体装置及びその製造方法並びに半導体基板
JP6241572B2 (ja) 2015-04-14 2017-12-06 三菱電機株式会社 半導体装置
JP2017152732A (ja) * 2017-05-01 2017-08-31 富士電機株式会社 半導体装置および半導体装置の製造方法
CN110729349A (zh) * 2019-11-29 2020-01-24 中芯集成电路制造(绍兴)有限公司 功率器件终端结构及其形成方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4989483A (de) * 1972-12-27 1974-08-27
US4648174A (en) * 1985-02-05 1987-03-10 General Electric Company Method of making high breakdown voltage semiconductor device
JPH0618280B2 (ja) * 1988-04-19 1994-03-09 サンケン電気株式会社 ショットキバリア半導体装置
KR100243961B1 (ko) 1991-07-02 2000-02-01 요트.게.아. 롤페즈 반도체장치
JP2850694B2 (ja) 1993-03-10 1999-01-27 株式会社日立製作所 高耐圧プレーナ型半導体装置
US6011298A (en) 1996-12-31 2000-01-04 Stmicroelectronics, Inc. High voltage termination with buried field-shaping region
SE9700141D0 (sv) 1997-01-20 1997-01-20 Abb Research Ltd A schottky diode of SiC and a method for production thereof
SE9700156D0 (sv) * 1997-01-21 1997-01-21 Abb Research Ltd Junction termination for Si C Schottky diode
US5932894A (en) * 1997-06-26 1999-08-03 Abb Research Ltd. SiC semiconductor device comprising a pn junction
JP3785794B2 (ja) * 1998-03-18 2006-06-14 株式会社デンソー 炭化珪素半導体装置及びその製造方法
JP2002535839A (ja) * 1999-01-15 2002-10-22 インフィネオン テクノロジース アクチエンゲゼルシャフト 半導体素子に対するエッジ終端部、エッジ終端部を有するショットキー・ダイオードおよびショットキー・ダイオードの製造方法
JP4458588B2 (ja) 1999-10-18 2010-04-28 日本碍子株式会社 静電誘導型半導体デバイスおよびその製造方法
US6524900B2 (en) * 2001-07-25 2003-02-25 Abb Research, Ltd Method concerning a junction barrier Schottky diode, such a diode and use thereof
JP2003069045A (ja) * 2001-08-22 2003-03-07 Mitsubishi Electric Corp 半導体装置
JP2007535162A (ja) * 2004-04-27 2007-11-29 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 半導体デバイスおよびかかるデバイスを製造する方法
US7318349B2 (en) * 2005-06-04 2008-01-15 Vladimir Vaganov Three-axis integrated MEMS accelerometer

Also Published As

Publication number Publication date
ATE497636T1 (de) 2011-02-15
EP1905089A1 (de) 2008-04-02
JP4972090B2 (ja) 2012-07-11
WO2007011294A1 (en) 2007-01-25
US7768092B2 (en) 2010-08-03
EP1905089B1 (de) 2011-02-02
US20070018171A1 (en) 2007-01-25
JP2009502040A (ja) 2009-01-22

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