DE602005021958D1 - Indiumoxid/ceroxid-sputtertarget, transparenter leransparentem leitfähigem film - Google Patents

Indiumoxid/ceroxid-sputtertarget, transparenter leransparentem leitfähigem film

Info

Publication number
DE602005021958D1
DE602005021958D1 DE602005021958T DE602005021958T DE602005021958D1 DE 602005021958 D1 DE602005021958 D1 DE 602005021958D1 DE 602005021958 T DE602005021958 T DE 602005021958T DE 602005021958 T DE602005021958 T DE 602005021958T DE 602005021958 D1 DE602005021958 D1 DE 602005021958D1
Authority
DE
Germany
Prior art keywords
ceroxide
ler
transparent
conductive film
indium oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005021958T
Other languages
English (en)
Inventor
Kazuyoshi Inoue
Masato Matsubara
Shigekazu Tomai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Idemitsu Kosan Co Ltd
Original Assignee
Idemitsu Kosan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idemitsu Kosan Co Ltd filed Critical Idemitsu Kosan Co Ltd
Publication of DE602005021958D1 publication Critical patent/DE602005021958D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3229—Cerium oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3286—Gallium oxides, gallates, indium oxides, indates, thallium oxides, thallates or oxide forming salts thereof, e.g. zinc gallate
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54—Particle size related information
    • C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5445—Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6583—Oxygen containing atmosphere, e.g. with changing oxygen pressures
    • C04B2235/6585—Oxygen containing atmosphere, e.g. with changing oxygen pressures at an oxygen percentage above that of air
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6586—Processes characterised by the flow of gas
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/77—Density
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
    • C04B2235/786—Micrometer sized grains, i.e. from 1 to 100 micron
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
DE602005021958T 2004-03-31 2005-02-21 Indiumoxid/ceroxid-sputtertarget, transparenter leransparentem leitfähigem film Active DE602005021958D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004105581A JP4428698B2 (ja) 2004-03-31 2004-03-31 酸化インジウム−酸化セリウム系スパッタリングターゲット及び透明導電膜及び透明導電膜の製造方法
PCT/JP2005/002705 WO2005098080A1 (ja) 2004-03-31 2005-02-21 酸化インジウム−酸化セリウム系スパッタリングターゲット及び透明導電膜及び透明導電膜の製造方法

Publications (1)

Publication Number Publication Date
DE602005021958D1 true DE602005021958D1 (de) 2010-08-05

Family

ID=35125105

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005021958T Active DE602005021958D1 (de) 2004-03-31 2005-02-21 Indiumoxid/ceroxid-sputtertarget, transparenter leransparentem leitfähigem film

Country Status (8)

Country Link
US (1) US8529739B2 (de)
EP (1) EP1731629B1 (de)
JP (1) JP4428698B2 (de)
KR (1) KR101168450B1 (de)
CN (1) CN1930318B (de)
DE (1) DE602005021958D1 (de)
TW (1) TWI405004B (de)
WO (1) WO2005098080A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4805648B2 (ja) 2005-10-19 2011-11-02 出光興産株式会社 半導体薄膜及びその製造方法
JP5395994B2 (ja) 2005-11-18 2014-01-22 出光興産株式会社 半導体薄膜、及びその製造方法、並びに薄膜トランジスタ
JP4762062B2 (ja) * 2006-06-22 2011-08-31 出光興産株式会社 焼結体、膜及び有機エレクトロルミネッセンス素子
DE102008028140B3 (de) 2008-06-13 2009-12-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung einer transparenten und leitfähigen Metalloxidschicht durch gepulstes, hochionisierendes Magnetronsputtern
JP5159558B2 (ja) * 2008-10-28 2013-03-06 株式会社神戸製鋼所 表示装置の製造方法
EP2463255B1 (de) 2009-08-05 2016-09-07 Sumitomo Metal Mining Co., Ltd. Tablette zur ionenplattierung, verfahren zu ihrer herstellung und transparenter leitfähiger film
KR101568219B1 (ko) * 2009-08-07 2015-11-11 스미토모 긴조쿠 고잔 가부시키가이샤 증착용 타블렛
EP2479763A4 (de) * 2009-09-17 2013-11-13 Sanyo Electric Co Transparente leitende folie und vorrichtung damit
JP5257372B2 (ja) * 2009-11-30 2013-08-07 住友金属鉱山株式会社 酸化物蒸着材と透明導電膜および太陽電池
JP4968318B2 (ja) 2009-12-22 2012-07-04 住友金属鉱山株式会社 酸化物蒸着材
JP5381744B2 (ja) 2010-01-25 2014-01-08 住友金属鉱山株式会社 酸化物蒸着材と蒸着薄膜並びに太陽電池
US9493869B2 (en) 2010-03-19 2016-11-15 Sumitomo Metal Mining Co., Ltd. Transparent conductive film
CN102971447A (zh) * 2010-07-06 2013-03-13 日东电工株式会社 透明导电性薄膜的制造方法
KR20150059798A (ko) * 2010-07-06 2015-06-02 닛토덴코 가부시키가이샤 투명 도전성 필름 및 그 제조 방법
CN102723373A (zh) * 2012-06-29 2012-10-10 苏州嘉言能源设备有限公司 薄膜太阳能电池光吸收透明薄膜
JP5971201B2 (ja) 2013-06-17 2016-08-17 住友金属鉱山株式会社 Ｉｎ−Ｃｅ−Ｏ系スパッタリングターゲットとその製造方法
US10103282B2 (en) * 2016-09-16 2018-10-16 Nano And Advanced Materials Institute Limited Direct texture transparent conductive oxide served as electrode or intermediate layer for photovoltaic and display applications

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0754133A (ja) 1993-08-12 1995-02-28 Sumitomo Metal Mining Co Ltd スパッタリング用ｉｔｏターゲット
JP3158948B2 (ja) 1995-03-22 2001-04-23 凸版印刷株式会社 スパッタリングターゲット
JP3445891B2 (ja) * 1995-12-21 2003-09-08 凸版印刷株式会社 スパッタリングターゲット
CN2280717Y (zh) * 1996-08-27 1998-05-06 深圳市创益科技发展有限公司 透明导电膜平面磁控溅射靶板
JP4577924B2 (ja) 1999-06-29 2010-11-10 三井金属鉱業株式会社 酸化亜鉛を含有するスパッタリングターゲットの製造方法
DE19948839A1 (de) 1999-10-11 2001-04-12 Bps Alzenau Gmbh Leitende transparente Schichten und Verfahren zu ihrer Herstellung
JP2001305529A (ja) 2000-04-19 2001-10-31 Sharp Corp 液晶表示装置および半透過反射膜
JP3384398B2 (ja) 2000-05-25 2003-03-10 セイコーエプソン株式会社 液晶装置、その製造方法および電子機器
JP2002049034A (ja) 2000-05-25 2002-02-15 Seiko Epson Corp 液晶装置、その製造方法および電子機器
JP4424889B2 (ja) * 2001-06-26 2010-03-03 三井金属鉱業株式会社 高抵抗透明導電膜用スパッタリングターゲット及び高抵抗透明導電膜の製造方法
EP2278041B1 (de) 2001-08-02 2012-05-23 Idemitsu Kosan Co., Ltd. Sputtertarget und durch das Target erhältlicher, transparenter, leitfähiger Film
KR20050028044A (ko) * 2002-07-22 2005-03-21 이데미쓰 고산 가부시키가이샤 유기 전기 발광 소자
CN102522509B (zh) 2002-08-02 2016-01-20 出光兴产株式会社 溅射靶、烧结体及利用它们制造的导电膜、有机el元件及其所用的衬底
JP4448648B2 (ja) * 2002-08-02 2010-04-14 出光興産株式会社 スパッタリングターゲット及び焼結体それらを利用して製造した導電膜。

Also Published As

Publication number Publication date
EP1731629B1 (de) 2010-06-23
EP1731629A4 (de) 2008-02-20
TW200540519A (en) 2005-12-16
KR20060134142A (ko) 2006-12-27
JP4428698B2 (ja) 2010-03-10
WO2005098080A1 (ja) 2005-10-20
KR101168450B1 (ko) 2012-07-25
US20070209928A1 (en) 2007-09-13
JP2005290458A (ja) 2005-10-20
CN1930318B (zh) 2010-09-01
CN1930318A (zh) 2007-03-14
EP1731629A1 (de) 2006-12-13
TWI405004B (zh) 2013-08-11
US8529739B2 (en) 2013-09-10

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