DE602004031844D1 - Beleuchtungssystem für die mikrolithographie - Google Patents
Beleuchtungssystem für die mikrolithographieInfo
- Publication number
- DE602004031844D1 DE602004031844D1 DE602004031844T DE602004031844T DE602004031844D1 DE 602004031844 D1 DE602004031844 D1 DE 602004031844D1 DE 602004031844 T DE602004031844 T DE 602004031844T DE 602004031844 T DE602004031844 T DE 602004031844T DE 602004031844 D1 DE602004031844 D1 DE 602004031844D1
- Authority
- DE
- Germany
- Prior art keywords
- light
- filter
- microlithography
- lighting system
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001393 microlithography Methods 0.000 title abstract 2
- 238000001900 extreme ultraviolet lithography Methods 0.000 abstract 1
- 238000005286 illumination Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10334722 | 2003-07-30 | ||
PCT/EP2004/003854 WO2005015314A2 (en) | 2003-07-30 | 2004-04-13 | An illumination system for microlithography |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602004031844D1 true DE602004031844D1 (de) | 2011-04-28 |
Family
ID=34129472
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004031844T Expired - Lifetime DE602004031844D1 (de) | 2003-07-30 | 2004-04-13 | Beleuchtungssystem für die mikrolithographie |
Country Status (7)
Country | Link |
---|---|
US (1) | US7911584B2 (de) |
EP (1) | EP1649324B1 (de) |
JP (1) | JP5026788B2 (de) |
KR (1) | KR101144458B1 (de) |
AT (1) | ATE502323T1 (de) |
DE (1) | DE602004031844D1 (de) |
WO (1) | WO2005015314A2 (de) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005036266A1 (de) | 2003-09-17 | 2005-04-21 | Carl Zeiss Smt Ag | Masken, lithographievorrichtung und halbleiterbauelement |
DE102005042005A1 (de) | 2004-12-23 | 2006-07-06 | Carl Zeiss Smt Ag | Hochaperturiges Objektiv mit obskurierter Pupille |
EP1894063A1 (de) * | 2005-06-21 | 2008-03-05 | Carl Zeiss SMT AG | Doppelt facettiertes beleuchtungssystem mit abschwächungselementen am pupillenfacettenspiegel |
JP2007150295A (ja) | 2005-11-10 | 2007-06-14 | Carl Zeiss Smt Ag | ラスタ要素を有する光学装置、及びこの光学装置を有する照射システム |
JP5068271B2 (ja) | 2006-02-17 | 2012-11-07 | カール・ツァイス・エスエムティー・ゲーエムベーハー | マイクロリソグラフィ照明システム、及びこの種の照明システムを含む投影露光装置 |
DE102006020734A1 (de) * | 2006-05-04 | 2007-11-15 | Carl Zeiss Smt Ag | Beleuchtungssystem für die EUV-Lithographie sowie erstes und zweites optisches Element zum Einsatz in einem derartigen Beleuchtungssystem |
DE102006059024A1 (de) | 2006-12-14 | 2008-06-19 | Carl Zeiss Smt Ag | Projektionsbelichtungsanlage für die Mikrolithographie, Beleuchtungsoptik für eine derartige Projektionsbelichtungsanlage, Verfahren zum Betrieb einer derartigen Projektionsbelichtungsanlage, Verfahren zur Herstellung eines mikrostrukturierten Bauteils sowie durch das Verfahren hergestelltes mikrostrukturiertes Bauteil |
DE102007023411A1 (de) | 2006-12-28 | 2008-07-03 | Carl Zeiss Smt Ag | Optisches Element, Beleuchtungsoptik für die Mikrolithographie mit mindestens einem derartigen optischen Element sowie Beleuchtungssystem mit einer derartigen Beleuchtungsoptik |
KR20090115712A (ko) * | 2007-02-20 | 2009-11-05 | 칼 짜이스 에스엠테 아게 | 다수의 일차 광원을 갖는 광학 소자 |
US7843549B2 (en) * | 2007-05-23 | 2010-11-30 | Asml Holding N.V. | Light attenuating filter for correcting field dependent ellipticity and uniformity |
WO2008145364A2 (de) * | 2007-05-31 | 2008-12-04 | Carl Zeiss Smt Ag | Verfahren zur herstellung eines optischen elementes mit hilfe von abformung, optisches element hergestellt nach diesem verfahren, kollektor und beleuchtungssystem |
DE102007041004A1 (de) | 2007-08-29 | 2009-03-05 | Carl Zeiss Smt Ag | Beleuchtungsoptik für die EUV-Mikrolithografie |
US8908151B2 (en) * | 2008-02-14 | 2014-12-09 | Nikon Corporation | Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system |
DE102008001511A1 (de) * | 2008-04-30 | 2009-11-05 | Carl Zeiss Smt Ag | Beleuchtungsoptik für die EUV-Mikrolithografie sowie Beleuchtungssystem und Projektionsbelichtungsanlage mit einer derartigen Beleuchtungsoptik |
DE102008002749A1 (de) * | 2008-06-27 | 2009-12-31 | Carl Zeiss Smt Ag | Beleuchtungsoptik für die Mikrolithografie |
NL2003449A (en) * | 2008-10-28 | 2010-04-29 | Asml Netherlands Bv | Fly's eye integrator, illuminator, lithographic apparatus and method. |
DE102009014701A1 (de) | 2009-03-27 | 2010-09-30 | Carl Zeiss Smt Ag | Optische Baugruppe |
JP6041304B2 (ja) * | 2009-03-27 | 2016-12-07 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Euvマイクロリソグラフィ用の照明光学系、この種の照明光学系用のeuv減衰器、及びこの種の照明光学系を有する照明系及び投影露光装置 |
JP5070242B2 (ja) * | 2009-05-27 | 2012-11-07 | カール・ツァイス・エスエムティー・ゲーエムベーハー | リソグラフィ装置 |
DE102009045491A1 (de) | 2009-10-08 | 2010-11-25 | Carl Zeiss Smt Ag | Beleuchtungsoptik |
KR101505256B1 (ko) * | 2010-04-23 | 2015-03-30 | 칼 짜이스 에스엠티 게엠베하 | 리소그래픽 시스템의 광학 소자의 조작을 포함하는 리소그래픽 시스템의 작동 방법 |
WO2012041697A1 (en) | 2010-09-27 | 2012-04-05 | Carl Zeiss Smt Gmbh | Mirror, projection objective comprising such a mirror, and projection exposure apparatus for microlithography comprising such a projection objective |
DE102011085132A1 (de) | 2010-11-24 | 2012-05-24 | Carl Zeiss Smt Gmbh | Optische Baugruppe für die Projektionslithografie |
DE102010062720B4 (de) | 2010-12-09 | 2012-07-12 | Carl Zeiss Smt Gmbh | EUV-Lithographiesystem |
NL2008009A (en) | 2011-02-02 | 2012-08-06 | Asml Netherlands Bv | Illumination system, lithographic apparatus and method. |
DE102011004326A1 (de) | 2011-02-17 | 2012-08-23 | Carl Zeiss Smt Gmbh | Optische Baugruppe für eine Beleuchtungsoptik für die Projektionslithographie |
JP2013072845A (ja) * | 2011-09-29 | 2013-04-22 | Nuflare Technology Inc | パターン検査装置及びパターン検査方法 |
WO2013143594A1 (en) | 2012-03-29 | 2013-10-03 | Carl Zeiss Smt Gmbh | Apparatus and method for compensating a defect of a channel of a microlithographic projection exposure system |
DE102012210174A1 (de) * | 2012-06-18 | 2013-06-06 | Carl Zeiss Smt Gmbh | Optisches Bauelement |
DE102012218221A1 (de) * | 2012-10-05 | 2014-04-10 | Carl Zeiss Smt Gmbh | Monitorsystem zum Bestimmen von Orientierungen von Spiegelelementen und EUV-Lithographiesystem |
DE102014203187A1 (de) | 2014-02-21 | 2015-08-27 | Carl Zeiss Smt Gmbh | Beleuchtungsoptik für die Projektionslithografie |
DE102014217612A1 (de) | 2014-09-03 | 2016-03-03 | Carl Zeiss Smt Gmbh | Beleuchtungoptik für die Projektonslithograpfie |
US11175487B2 (en) * | 2017-06-19 | 2021-11-16 | Suss Microtec Photonic Systems Inc. | Optical distortion reduction in projection systems |
JP2019028392A (ja) * | 2017-08-03 | 2019-02-21 | セイコーエプソン株式会社 | 光源装置、照明装置及びプロジェクター |
DE102021120952B3 (de) * | 2021-08-11 | 2022-11-10 | Carl Zeiss Smt Gmbh | Verfahren zur Korrektur eines Telezentriefehlers einer Abbildungsvorrichtung und Maskeninspektionsmikroskop |
Family Cites Families (55)
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DE561573C (de) | 1928-04-05 | 1932-10-15 | Aeg | Beleuchtungseinrichtung fuer Bildwerfer |
US1880414A (en) * | 1930-01-03 | 1932-10-04 | Eastman Kodak Co | Illuminating system for photographic apparatus |
US2186123A (en) * | 1937-01-27 | 1940-01-09 | Zeiss Ikon Ag | Illuminating system |
US2183249A (en) * | 1937-11-06 | 1939-12-12 | Zeiss Ikon Ag | Illuminating device for projectors |
US3541323A (en) * | 1968-05-16 | 1970-11-17 | Eg & G Inc | Laser beam projector |
US3988066A (en) * | 1974-01-12 | 1976-10-26 | Canon Kabushiki Kaisha | Light exposure apparatus for printing |
US3941475A (en) * | 1974-07-01 | 1976-03-02 | Tamarack Scientific Co., Inc. | Optical microcircuit printing system |
US4109304A (en) * | 1976-02-23 | 1978-08-22 | Khvalovsky Vladimir Vasilievic | Device for coherent lighting of objects |
US4155630A (en) * | 1977-11-17 | 1979-05-22 | University Of Delaware | Speckle elimination by random spatial phase modulation |
DE2803277A1 (de) | 1978-01-26 | 1979-08-02 | Bosch Gmbh Robert | Vorrichtung zur belichtung einer auf eine oberflaeche eines substrats aufgebrachten fotolackschicht |
US4241389A (en) * | 1979-04-25 | 1980-12-23 | Kasper Instruments, Inc. | Multiple apparent source optical imaging system |
US4444456A (en) * | 1982-06-23 | 1984-04-24 | International Business Machines Corporation | Holographic method and apparatus for transformation of a light beam into a line source of required curvature and finite numerical aperture |
JPS597359A (ja) * | 1982-07-02 | 1984-01-14 | Canon Inc | 照明装置 |
US4521087A (en) * | 1983-05-23 | 1985-06-04 | International Business Machines Corporation | Optical system with diffuser for transformation of a collimated beam into a self-luminous arc with required curvature and numerical aperture |
JPS60218635A (ja) * | 1984-04-13 | 1985-11-01 | Canon Inc | 照明装置 |
US4936665A (en) * | 1987-10-25 | 1990-06-26 | Whitney Theodore R | High resolution imagery systems and methods |
US4918583A (en) * | 1988-04-25 | 1990-04-17 | Nikon Corporation | Illuminating optical device |
NL8901077A (nl) * | 1989-04-28 | 1990-11-16 | Koninkl Philips Electronics Nv | Optische belichtingsstelsel en projectie-apparaat voorzien van een dergelijk stelsel. |
JP3360686B2 (ja) * | 1990-12-27 | 2002-12-24 | 株式会社ニコン | 照明光学装置および投影露光装置並びに露光方法および素子製造方法 |
US5335044A (en) * | 1992-02-26 | 1994-08-02 | Nikon Corporation | Projection type exposure apparatus and method of exposure |
US5333166A (en) * | 1992-08-28 | 1994-07-26 | Intel Corporation | Self-apodizing collimator for x-ray lithography |
US5677939A (en) * | 1994-02-23 | 1997-10-14 | Nikon Corporation | Illuminating apparatus |
JP3633002B2 (ja) * | 1994-05-09 | 2005-03-30 | 株式会社ニコン | 照明光学装置、露光装置及び露光方法 |
JP3458549B2 (ja) * | 1994-08-26 | 2003-10-20 | ソニー株式会社 | パターン形成方法および該方法を用いた半導体デバイス製造方法と装置 |
KR100377206B1 (ko) | 1994-08-26 | 2003-06-09 | 소니 가부시끼 가이샤 | 패턴형성방법및이방법을이용한반도체디바이스제조방법 |
JP3521506B2 (ja) | 1994-11-24 | 2004-04-19 | 株式会社ニコン | 照明装置及び露光装置 |
JP3608580B2 (ja) * | 1995-03-22 | 2005-01-12 | 株式会社ニコン | 照明光学装置、露光装置、露光方法、及びフライアイレンズ |
JP4310816B2 (ja) * | 1997-03-14 | 2009-08-12 | 株式会社ニコン | 照明装置、投影露光装置、デバイスの製造方法、及び投影露光装置の調整方法 |
EP1028456A4 (de) * | 1997-09-19 | 2003-03-05 | Nikon Corp | Trägervorrichtung, abtast-ausrichter und abtastbelichtungsverfahren, und ein dadurch hergestelltes bauteil |
JP3101613B2 (ja) | 1998-01-30 | 2000-10-23 | キヤノン株式会社 | 照明光学装置及び投影露光装置 |
JP4238390B2 (ja) * | 1998-02-27 | 2009-03-18 | 株式会社ニコン | 照明装置、該照明装置を備えた露光装置および該露光装置を用いて半導体デバイスを製造する方法 |
JP3817365B2 (ja) * | 1998-04-30 | 2006-09-06 | キヤノン株式会社 | 投影露光装置及びそれを用いたデバイスの製造方法 |
US6438199B1 (en) * | 1998-05-05 | 2002-08-20 | Carl-Zeiss-Stiftung | Illumination system particularly for microlithography |
DE10138313A1 (de) | 2001-01-23 | 2002-07-25 | Zeiss Carl | Kollektor für Beleuchtugnssysteme mit einer Wellenlänge < 193 nm |
DE10053587A1 (de) | 2000-10-27 | 2002-05-02 | Zeiss Carl | Beleuchtungssystem mit variabler Einstellung der Ausleuchtung |
EP0955641B1 (de) * | 1998-05-05 | 2004-04-28 | Carl Zeiss | Beleuchtungssystem insbesondere für die EUV-Lithographie |
DE10100265A1 (de) * | 2001-01-08 | 2002-07-11 | Zeiss Carl | Beleuchtungssystem mit Rasterelementen unterschiedlicher Größe |
JP2000162414A (ja) | 1998-09-22 | 2000-06-16 | Nikon Corp | 反射鏡の製造方法又は反射型照明装置又は半導体露光装置 |
JP2000162415A (ja) | 1998-09-22 | 2000-06-16 | Nikon Corp | 反射鏡の製造方法又は反射型照明装置又は半導体露光装置 |
US6573978B1 (en) * | 1999-01-26 | 2003-06-03 | Mcguire, Jr. James P. | EUV condenser with non-imaging optics |
US6195201B1 (en) * | 1999-01-27 | 2001-02-27 | Svg Lithography Systems, Inc. | Reflective fly's eye condenser for EUV lithography |
JP2000269114A (ja) | 1999-03-16 | 2000-09-29 | Nikon Corp | 照明装置、露光装置及び露光方法 |
US6281967B1 (en) * | 2000-03-15 | 2001-08-28 | Nikon Corporation | Illumination apparatus, exposure apparatus and exposure method |
AU2940600A (en) | 1999-03-24 | 2000-10-09 | Nikon Corporation | Exposure method and apparatus |
US20040032576A1 (en) * | 1999-03-26 | 2004-02-19 | Nikon Corporation | Exposure method and apparatus |
DE19935568A1 (de) | 1999-07-30 | 2001-02-15 | Zeiss Carl Fa | Steuerung der Beleuchtungsverteilung in der Austrittspupille eines EUV-Beleuchtungssystems |
EP1200879B1 (de) | 1999-07-30 | 2007-06-20 | Carl Zeiss SMT AG | Steuerung der Beleuchtungsverteilung in der Austrittspupille eines EUV-Beleuchtungssystems |
KR100662756B1 (ko) * | 2000-01-07 | 2007-01-02 | 주식회사 엘지이아이 | 디지털 티브이의 채널 등화기 |
TW594847B (en) * | 2001-07-27 | 2004-06-21 | Canon Kk | Illumination system, projection exposure apparatus and method for manufacturing a device provided with a pattern to be exposed |
TW554411B (en) * | 2001-08-23 | 2003-09-21 | Nikon Corp | Exposure apparatus |
JP2003185798A (ja) * | 2001-12-13 | 2003-07-03 | Nikon Corp | 軟x線光源装置およびeuv露光装置ならびに照明方法 |
DE60326063D1 (de) * | 2002-03-18 | 2009-03-19 | Asml Netherlands Bv | Lithographischer Apparat und Verfahren zur Herstellung eines Artikels |
EP1870772B1 (de) | 2002-03-18 | 2013-10-23 | ASML Netherlands B.V. | Lithografische Vorrichtung |
JP2004343082A (ja) * | 2003-04-17 | 2004-12-02 | Asml Netherlands Bv | 凹面および凸面を含む集光器を備えたリトグラフ投影装置 |
JP4356695B2 (ja) | 2003-05-09 | 2009-11-04 | 株式会社ニコン | 照明光学系、投影露光装置、マイクロデバイスの製造方法 |
-
2004
- 2004-04-13 DE DE602004031844T patent/DE602004031844D1/de not_active Expired - Lifetime
- 2004-04-13 WO PCT/EP2004/003854 patent/WO2005015314A2/en active Application Filing
- 2004-04-13 US US10/563,175 patent/US7911584B2/en not_active Expired - Fee Related
- 2004-04-13 KR KR1020057025338A patent/KR101144458B1/ko not_active IP Right Cessation
- 2004-04-13 EP EP04726980A patent/EP1649324B1/de not_active Expired - Lifetime
- 2004-04-13 JP JP2006521398A patent/JP5026788B2/ja not_active Expired - Fee Related
- 2004-04-13 AT AT04726980T patent/ATE502323T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR101144458B1 (ko) | 2012-05-14 |
ATE502323T1 (de) | 2011-04-15 |
EP1649324B1 (de) | 2011-03-16 |
JP5026788B2 (ja) | 2012-09-19 |
EP1649324A2 (de) | 2006-04-26 |
JP2007500432A (ja) | 2007-01-11 |
US20070058274A1 (en) | 2007-03-15 |
WO2005015314A2 (en) | 2005-02-17 |
US7911584B2 (en) | 2011-03-22 |
KR20060039876A (ko) | 2006-05-09 |
WO2005015314A3 (en) | 2005-11-24 |
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