DE60125200D1 - Schleifscheibe mit ultra-abrasiver körnung für spiegel-politur - Google Patents

Schleifscheibe mit ultra-abrasiver körnung für spiegel-politur

Info

Publication number
DE60125200D1
DE60125200D1 DE60125200T DE60125200T DE60125200D1 DE 60125200 D1 DE60125200 D1 DE 60125200D1 DE 60125200 T DE60125200 T DE 60125200T DE 60125200 T DE60125200 T DE 60125200T DE 60125200 D1 DE60125200 D1 DE 60125200D1
Authority
DE
Germany
Prior art keywords
ultra
grinding wheel
abrasive grain
mirror polish
polish
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60125200T
Other languages
English (en)
Other versions
DE60125200T2 (de
Inventor
Takahiro Hirata
Yukio Okanishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALMT Corp
Original Assignee
ALMT Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ALMT Corp filed Critical ALMT Corp
Application granted granted Critical
Publication of DE60125200D1 publication Critical patent/DE60125200D1/de
Publication of DE60125200T2 publication Critical patent/DE60125200T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/06Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
DE60125200T 2000-09-13 2001-08-09 Fräser mit Ultra-Abrasiver Körnung für Spiegel-Politur Expired - Lifetime DE60125200T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000277845 2000-09-13
JP2000277845 2000-09-13
PCT/JP2001/006887 WO2002022310A1 (fr) 2000-09-13 2001-08-09 Meule a grains tres abrasifs pour poli miroir

Publications (2)

Publication Number Publication Date
DE60125200D1 true DE60125200D1 (de) 2007-01-25
DE60125200T2 DE60125200T2 (de) 2007-03-29

Family

ID=18763100

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60125200T Expired - Lifetime DE60125200T2 (de) 2000-09-13 2001-08-09 Fräser mit Ultra-Abrasiver Körnung für Spiegel-Politur

Country Status (9)

Country Link
US (1) US6692343B2 (de)
EP (1) EP1319470B1 (de)
JP (1) JP3791610B2 (de)
KR (1) KR100486429B1 (de)
CN (1) CN1177676C (de)
DE (1) DE60125200T2 (de)
MY (1) MY124918A (de)
TW (1) TW508287B (de)
WO (1) WO2002022310A1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI238753B (en) * 2002-12-19 2005-09-01 Miyanaga Kk Diamond disk for grinding
PL1827758T3 (pl) * 2004-12-21 2011-03-31 Essilor Int Tarcza polerska
JP4348360B2 (ja) * 2006-12-12 2009-10-21 Okiセミコンダクタ株式会社 研削ヘッド、研削装置、研削方法、及び、半導体装置の製造方法
IES20080376A2 (en) * 2008-05-13 2010-05-12 Michael O'ceallaigh An abrasive material, wheel and tool for grinding semiconductor substrates, and method of manufacture of same
WO2011072298A2 (en) * 2009-12-11 2011-06-16 Saint-Gobain Abrasives, Inc. Abrasive article for use with a grinding wheel
KR101395947B1 (ko) * 2010-01-13 2014-05-16 가부시끼가이샤 아라이도 마테리아루 초지립 휠 및 그것을 사용한 웨이퍼의 제조 방법 및 웨이퍼
CN102294659A (zh) * 2010-06-25 2011-12-28 中国砂轮企业股份有限公司 可调动态平衡及排屑的研磨砂轮
EP2425925A1 (de) * 2010-09-06 2012-03-07 WENDT GmbH Schleifwerkzeug zur abtragenden Materialbearbeitung
US8512098B1 (en) * 2010-09-28 2013-08-20 Jeffrey Bonner Machining technique using a plated superabrasive grinding wheel on a swiss style screw machine
ITVI20110123A1 (it) * 2011-05-17 2011-08-16 Premier S R L Utensile diamantato per la rettifica e/o la squadratura dei bordi di piastrelle
CN103998183A (zh) * 2011-12-30 2014-08-20 圣戈班磨料磨具有限公司 具有双功能研磨段的研磨环
CN104142259A (zh) * 2013-05-10 2014-11-12 河南协鑫光伏科技有限公司 一种太阳能单晶硅测试样片的制作方法
TWI690391B (zh) * 2015-03-04 2020-04-11 美商聖高拜磨料有限公司 磨料製品及使用方法
CN105014557B (zh) * 2015-05-25 2017-12-26 江苏锋泰工具有限公司 轻质高效金刚石磨轮
CN105108665B (zh) * 2015-09-17 2017-10-10 苏州赛力精密工具有限公司 一种陶瓷结合剂磨盘及其制备方法
CN106217278A (zh) * 2016-08-24 2016-12-14 武进区南夏墅金汇建材厂 耐摩擦的建筑材料用砂轮
WO2018093656A1 (en) * 2016-11-18 2018-05-24 3M Innovative Properties Company Metal hybrid grinding wheel with coated filler particles
WO2018226912A1 (en) * 2017-06-09 2018-12-13 Saint-Gobain Abrasives, Inc. Grinding ring with concave abrasive segments
CN109048696A (zh) * 2018-08-23 2018-12-21 沈阳中科超硬磨具磨削研究所 一种陶瓷结合剂金刚石砂轮
CN109534845A (zh) * 2018-12-26 2019-03-29 华侨大学 一种多孔陶瓷砂轮及其制备方法
EP3698921B1 (de) * 2019-02-25 2024-04-03 Rot GmbH, Reiner Oehlmann Tools Werkzeug mit grundkörper und einem daran angeordneten hartstoffbelag sowie ein verfahren zum herstellen eines werkzeugs
WO2020189368A1 (ja) * 2019-03-15 2020-09-24 株式会社ナノテム 砥石
CN110722463A (zh) * 2019-09-09 2020-01-24 珠海粤清特环保科技有限公司 一种镜面加工工具
EP4171879A4 (de) * 2020-06-30 2024-07-24 Saint Gobain Abrasives Inc Mahlring mit verbesserter späneextraktion

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2307632A (en) * 1942-02-27 1943-01-05 Cortland Grinding Wheels Corp Segmental grinding wheel
JPS54137789A (en) * 1978-04-18 1979-10-25 Noritake Dia Kk Segment type grindstone for surface grinding
JPS63134174A (ja) * 1986-11-19 1988-06-06 Nec Corp 研削ホイ−ル
JP2976806B2 (ja) * 1994-05-10 1999-11-10 三菱マテリアル株式会社 セグメント式研削砥石
JPH07328930A (ja) * 1994-06-09 1995-12-19 Takashi Aizawa ロータリー平面研削盤用砥石
US6217433B1 (en) * 1995-05-16 2001-04-17 Unova Ip Corp. Grinding device and method
DE19707445A1 (de) * 1997-02-25 1998-08-27 Hilti Ag Topfförmige Schleifscheibe
JPH11179667A (ja) * 1997-12-18 1999-07-06 Asahi Diamond Ind Co Ltd カップ型ホイール
JPH11207635A (ja) * 1998-01-26 1999-08-03 Mitsubishi Materials Corp カップ型砥石およびウェーハの平面研削方法
KR100247439B1 (ko) * 1998-03-07 2000-04-01 강남조 다이아몬드팁 절삭휠
JPH11300626A (ja) * 1998-04-24 1999-11-02 Nippei Toyama Corp 研削装置
US6120350A (en) * 1999-03-31 2000-09-19 Memc Electronic Materials, Inc. Process for reconditioning polishing pads
JP2000301468A (ja) * 1999-04-22 2000-10-31 Mitsubishi Materials Corp 研削用砥石及び縦軸研削用砥石
KR100314287B1 (ko) * 1999-07-29 2001-11-23 김세광 연마 휠
JP3527448B2 (ja) * 1999-12-20 2004-05-17 株式会社リード Cmp研磨布用ドレッサー及びその製造方法

Also Published As

Publication number Publication date
JPWO2002022310A1 (ja) 2004-01-22
US6692343B2 (en) 2004-02-17
KR100486429B1 (ko) 2005-04-29
CN1392823A (zh) 2003-01-22
DE60125200T2 (de) 2007-03-29
KR20020060735A (ko) 2002-07-18
EP1319470B1 (de) 2006-12-13
TW508287B (en) 2002-11-01
MY124918A (en) 2006-07-31
US20030003858A1 (en) 2003-01-02
CN1177676C (zh) 2004-12-01
EP1319470A4 (de) 2004-12-22
EP1319470A1 (de) 2003-06-18
JP3791610B2 (ja) 2006-06-28
WO2002022310A1 (fr) 2002-03-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: BOCKHORNI & KOLLEGEN, 80687 MUENCHEN