DE60121098T2 - Lasersteuervorrichtung, Belichtungsapparat und Verfahren zur Herstellung einer Halbleitervorrichtung - Google Patents
Lasersteuervorrichtung, Belichtungsapparat und Verfahren zur Herstellung einer Halbleitervorrichtung Download PDFInfo
- Publication number
- DE60121098T2 DE60121098T2 DE60121098T DE60121098T DE60121098T2 DE 60121098 T2 DE60121098 T2 DE 60121098T2 DE 60121098 T DE60121098 T DE 60121098T DE 60121098 T DE60121098 T DE 60121098T DE 60121098 T2 DE60121098 T2 DE 60121098T2
- Authority
- DE
- Germany
- Prior art keywords
- wavelength
- laser beam
- oscillation
- exposure
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- 238000003860 storage Methods 0.000 claims description 3
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/104—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
- H01S3/1055—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length one of the reflectors being constituted by a diffraction grating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Lasers (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000126502 | 2000-04-26 | ||
| JP2000126502A JP4497650B2 (ja) | 2000-04-26 | 2000-04-26 | レーザ発振装置、露光装置および半導体デバイス製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60121098D1 DE60121098D1 (de) | 2006-08-10 |
| DE60121098T2 true DE60121098T2 (de) | 2007-05-31 |
Family
ID=18636274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60121098T Expired - Lifetime DE60121098T2 (de) | 2000-04-26 | 2001-04-24 | Lasersteuervorrichtung, Belichtungsapparat und Verfahren zur Herstellung einer Halbleitervorrichtung |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US6870865B2 (enExample) |
| EP (1) | EP1158629B1 (enExample) |
| JP (1) | JP4497650B2 (enExample) |
| DE (1) | DE60121098T2 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4497650B2 (ja) * | 2000-04-26 | 2010-07-07 | キヤノン株式会社 | レーザ発振装置、露光装置および半導体デバイス製造方法 |
| KR100624081B1 (ko) | 2002-01-31 | 2006-09-19 | 캐논 가부시끼가이샤 | 레이저장치, 노광장치 및 노광방법 |
| JP2005191503A (ja) * | 2003-12-26 | 2005-07-14 | Canon Inc | レーザ装置、露光方法及び装置 |
| JP5457873B2 (ja) * | 2010-02-18 | 2014-04-02 | 住友電工デバイス・イノベーション株式会社 | 波長可変レーザの制御方法 |
| WO2014038584A1 (ja) * | 2012-09-07 | 2014-03-13 | ギガフォトン株式会社 | レーザ装置及びレーザ装置の制御方法 |
| JP6223014B2 (ja) * | 2013-06-26 | 2017-11-01 | キヤノン株式会社 | 被検体情報取得装置 |
| JP6585174B2 (ja) | 2015-08-07 | 2019-10-02 | ギガフォトン株式会社 | 狭帯域化レーザ装置 |
| JP6595012B2 (ja) * | 2016-02-02 | 2019-10-23 | ギガフォトン株式会社 | 狭帯域化レーザ装置 |
| US10234220B2 (en) | 2017-04-14 | 2019-03-19 | Kent J. Myers | Detachable box magazine with follower retraction member |
| US10480878B2 (en) | 2017-04-14 | 2019-11-19 | Kent J Myers | Detachable box magazine with follower retraction member |
| US10480877B1 (en) | 2017-04-14 | 2019-11-19 | Kent J. Myers | Detachable box magazine with follower retraction member |
| WO2020157839A1 (ja) | 2019-01-29 | 2020-08-06 | ギガフォトン株式会社 | レーザ装置の波長制御方法及び電子デバイスの製造方法 |
| US11581692B2 (en) | 2019-06-18 | 2023-02-14 | KLA Corp. | Controlling pressure in a cavity of a light source |
| JP7573429B2 (ja) | 2020-12-10 | 2024-10-25 | 株式会社ミツトヨ | レーザ装置、及び波長異常検出方法 |
| CN113904213B (zh) * | 2021-12-08 | 2022-04-01 | 杭州拓致光电科技有限公司 | 一种基于光热折变玻璃的多波长锁波器及其制备方法 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0183827B1 (en) | 1984-06-21 | 1991-08-28 | AT&T Corp. | Deep-uv lithography |
| WO1989000779A1 (fr) * | 1987-07-17 | 1989-01-26 | Kabushiki Kaisha Komatsu Seisakusho | Dispositif de regulation de la longueur d'onde d'un rayon laser |
| JPH01106426A (ja) * | 1987-10-19 | 1989-04-24 | Canon Inc | 露光装置 |
| JP2711667B2 (ja) * | 1988-01-27 | 1998-02-10 | 株式会社小松製作所 | 狭帯域エキシマレーザの起動方法及び装置 |
| WO1989007353A1 (fr) * | 1988-01-27 | 1989-08-10 | Kabushiki Kaisha Komatsu Seisakusho | Procede et dispositif de commande d'un laser excimeur a oscillation a bande etroite |
| JP2557691B2 (ja) * | 1988-07-29 | 1996-11-27 | 株式会社小松製作所 | 狭帯域発振エキシマレーザ |
| JPH04223386A (ja) * | 1990-12-25 | 1992-08-13 | Mitsubishi Electric Corp | 狭帯域エキシマレーザ発振器 |
| JPH0513862A (ja) * | 1991-07-02 | 1993-01-22 | Mitsubishi Electric Corp | レーザー装置 |
| JPH05312646A (ja) | 1992-05-15 | 1993-11-22 | Mitsubishi Electric Corp | 波長測定装置およびこれを搭載したレーザ装置 |
| US5420877A (en) * | 1993-07-16 | 1995-05-30 | Cymer Laser Technologies | Temperature compensation method and apparatus for wave meters and tunable lasers controlled thereby |
| JP2631080B2 (ja) * | 1993-10-05 | 1997-07-16 | 株式会社小松製作所 | レーザ装置の出力制御装置 |
| JPH07120326A (ja) * | 1993-10-22 | 1995-05-12 | Komatsu Ltd | 波長検出装置 |
| JPH08274399A (ja) * | 1995-04-03 | 1996-10-18 | Komatsu Ltd | パルスレーザ装置のパルスエネルギ制御装置と方法 |
| JP3402850B2 (ja) * | 1995-05-09 | 2003-05-06 | キヤノン株式会社 | 投影露光装置及びそれを用いたデバイスの製造方法 |
| JP3782486B2 (ja) * | 1995-06-21 | 2006-06-07 | キヤノン株式会社 | レーザ出力制御装置、露光装置およびデバイス製造方法 |
| JPH097927A (ja) * | 1995-06-26 | 1997-01-10 | Canon Inc | 照明装置及び露光装置 |
| JPH10173274A (ja) * | 1996-12-12 | 1998-06-26 | Komatsu Ltd | エキシマレーザ装置 |
| US6078599A (en) * | 1997-07-22 | 2000-06-20 | Cymer, Inc. | Wavelength shift correction technique for a laser |
| JP3697036B2 (ja) * | 1997-10-03 | 2005-09-21 | キヤノン株式会社 | 露光装置及びそれを用いた半導体製造方法 |
| JP2002525856A (ja) * | 1998-09-11 | 2002-08-13 | ニュー・フォーカス・インコーポレイテッド | 波長可変レーザ |
| JP2001148344A (ja) * | 1999-09-09 | 2001-05-29 | Nikon Corp | 露光装置、エネルギ源の出力制御方法、該方法を用いるレーザ装置、及びデバイス製造方法 |
| JP2001196679A (ja) * | 2000-01-12 | 2001-07-19 | Komatsu Ltd | 狭帯域化レーザ装置及びその波長制御装置 |
| JP4497650B2 (ja) * | 2000-04-26 | 2010-07-07 | キヤノン株式会社 | レーザ発振装置、露光装置および半導体デバイス製造方法 |
| US6813287B2 (en) * | 2001-03-29 | 2004-11-02 | Gigaphoton Inc. | Wavelength control device for laser device |
| KR100624081B1 (ko) * | 2002-01-31 | 2006-09-19 | 캐논 가부시끼가이샤 | 레이저장치, 노광장치 및 노광방법 |
-
2000
- 2000-04-26 JP JP2000126502A patent/JP4497650B2/ja not_active Expired - Fee Related
-
2001
- 2001-04-23 US US09/839,139 patent/US6870865B2/en not_active Expired - Fee Related
- 2001-04-24 DE DE60121098T patent/DE60121098T2/de not_active Expired - Lifetime
- 2001-04-24 EP EP01303730A patent/EP1158629B1/en not_active Expired - Lifetime
-
2004
- 2004-09-01 US US10/930,745 patent/US7145925B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US7145925B2 (en) | 2006-12-05 |
| US6870865B2 (en) | 2005-03-22 |
| US20010036207A1 (en) | 2001-11-01 |
| EP1158629A2 (en) | 2001-11-28 |
| DE60121098D1 (de) | 2006-08-10 |
| EP1158629B1 (en) | 2006-06-28 |
| EP1158629A3 (en) | 2004-01-02 |
| US20050030987A1 (en) | 2005-02-10 |
| JP4497650B2 (ja) | 2010-07-07 |
| JP2001307997A (ja) | 2001-11-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |