DE60113491D1 - Nassbehanlungsvorrichtung - Google Patents
NassbehanlungsvorrichtungInfo
- Publication number
- DE60113491D1 DE60113491D1 DE60113491T DE60113491T DE60113491D1 DE 60113491 D1 DE60113491 D1 DE 60113491D1 DE 60113491 T DE60113491 T DE 60113491T DE 60113491 T DE60113491 T DE 60113491T DE 60113491 D1 DE60113491 D1 DE 60113491D1
- Authority
- DE
- Germany
- Prior art keywords
- nassbehanlungsvorrichtung
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/041—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
- B08B3/123—Cleaning travelling work, e.g. webs, articles on a conveyor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000261949 | 2000-08-30 | ||
JP2000261949A JP2002075947A (ja) | 2000-08-30 | 2000-08-30 | ウェット処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60113491D1 true DE60113491D1 (de) | 2006-02-02 |
DE60113491T2 DE60113491T2 (de) | 2006-06-29 |
Family
ID=18749705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60113491T Expired - Fee Related DE60113491T2 (de) | 2000-08-30 | 2001-07-09 | Nassbehanlungsvorrichtung |
Country Status (7)
Country | Link |
---|---|
US (1) | US6629540B2 (de) |
EP (1) | EP1184091B1 (de) |
JP (1) | JP2002075947A (de) |
KR (1) | KR100445041B1 (de) |
CN (1) | CN1162895C (de) |
DE (1) | DE60113491T2 (de) |
TW (1) | TW506009B (de) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19960591A1 (de) * | 1999-12-16 | 2001-06-21 | Laser & Med Tech Gmbh | Wand- und Boden-Kavitationsreiniger |
US7584761B1 (en) * | 2000-06-30 | 2009-09-08 | Lam Research Corporation | Wafer edge surface treatment with liquid meniscus |
US7234477B2 (en) * | 2000-06-30 | 2007-06-26 | Lam Research Corporation | Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces |
KR20030083779A (ko) * | 2002-04-22 | 2003-11-01 | 주식회사 디엠에스 | 액정표시소자용 처리장치 및 처리방법 |
US8236382B2 (en) * | 2002-09-30 | 2012-08-07 | Lam Research Corporation | Proximity substrate preparation sequence, and method, apparatus, and system for implementing the same |
US7997288B2 (en) * | 2002-09-30 | 2011-08-16 | Lam Research Corporation | Single phase proximity head having a controlled meniscus for treating a substrate |
US7389783B2 (en) * | 2002-09-30 | 2008-06-24 | Lam Research Corporation | Proximity meniscus manifold |
US7252097B2 (en) * | 2002-09-30 | 2007-08-07 | Lam Research Corporation | System and method for integrating in-situ metrology within a wafer process |
US7367345B1 (en) | 2002-09-30 | 2008-05-06 | Lam Research Corporation | Apparatus and method for providing a confined liquid for immersion lithography |
US7240679B2 (en) * | 2002-09-30 | 2007-07-10 | Lam Research Corporation | System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold |
US7632376B1 (en) | 2002-09-30 | 2009-12-15 | Lam Research Corporation | Method and apparatus for atomic layer deposition (ALD) in a proximity system |
US7293571B2 (en) * | 2002-09-30 | 2007-11-13 | Lam Research Corporation | Substrate proximity processing housing and insert for generating a fluid meniscus |
US7614411B2 (en) * | 2002-09-30 | 2009-11-10 | Lam Research Corporation | Controls of ambient environment during wafer drying using proximity head |
US7597765B2 (en) * | 2002-09-30 | 2009-10-06 | Lam Research Corporation | Post etch wafer surface cleaning with liquid meniscus |
US7513262B2 (en) * | 2002-09-30 | 2009-04-07 | Lam Research Corporation | Substrate meniscus interface and methods for operation |
US7520285B2 (en) * | 2002-09-30 | 2009-04-21 | Lam Research Corporation | Apparatus and method for processing a substrate |
US7383843B2 (en) * | 2002-09-30 | 2008-06-10 | Lam Research Corporation | Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer |
US7069937B2 (en) * | 2002-09-30 | 2006-07-04 | Lam Research Corporation | Vertical proximity processor |
TWI245739B (en) * | 2002-12-05 | 2005-12-21 | Ibm | Method and device for flowing a liquid on a surface |
US7675000B2 (en) * | 2003-06-24 | 2010-03-09 | Lam Research Corporation | System method and apparatus for dry-in, dry-out, low defect laser dicing using proximity technology |
CN101015037B (zh) | 2004-03-22 | 2010-04-21 | 里纳特种机械有限责任公司 | 处理衬底表面的方法 |
CN1933759B (zh) * | 2004-03-31 | 2010-12-15 | 兰姆研究有限公司 | 利用相容化学品的基板刷子擦洗和接近清洗干燥程序、接近基板制备程序和实施前述程序的方法、设备和系统 |
US8062471B2 (en) * | 2004-03-31 | 2011-11-22 | Lam Research Corporation | Proximity head heating method and apparatus |
US20050247673A1 (en) * | 2004-05-07 | 2005-11-10 | International Business Machines Corporation | Confinement of fluids on surfaces |
JP2006088033A (ja) * | 2004-09-24 | 2006-04-06 | Future Vision:Kk | ウェット処理装置 |
US8032979B2 (en) * | 2005-09-17 | 2011-10-11 | Hydramaster North America, Inc. | Heat exchanger |
JP4840020B2 (ja) * | 2005-10-14 | 2011-12-21 | ソニー株式会社 | 基板の処理方法 |
US7969548B2 (en) * | 2006-05-22 | 2011-06-28 | Asml Netherlands B.V. | Lithographic apparatus and lithographic apparatus cleaning method |
US7928366B2 (en) * | 2006-10-06 | 2011-04-19 | Lam Research Corporation | Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access |
US8813764B2 (en) | 2009-05-29 | 2014-08-26 | Lam Research Corporation | Method and apparatus for physical confinement of a liquid meniscus over a semiconductor wafer |
KR100834827B1 (ko) * | 2006-11-16 | 2008-06-04 | 삼성전자주식회사 | 포토 마스크 세정장치 및 그의 세정방법 |
JP4810411B2 (ja) * | 2006-11-30 | 2011-11-09 | 東京応化工業株式会社 | 処理装置 |
US8146902B2 (en) * | 2006-12-21 | 2012-04-03 | Lam Research Corporation | Hybrid composite wafer carrier for wet clean equipment |
US7975708B2 (en) * | 2007-03-30 | 2011-07-12 | Lam Research Corporation | Proximity head with angled vacuum conduit system, apparatus and method |
US8464736B1 (en) | 2007-03-30 | 2013-06-18 | Lam Research Corporation | Reclaim chemistry |
US8141566B2 (en) * | 2007-06-19 | 2012-03-27 | Lam Research Corporation | System, method and apparatus for maintaining separation of liquids in a controlled meniscus |
CN101971299B (zh) * | 2008-02-08 | 2013-03-20 | 朗姆研究公司 | 用于晶片表面处理中相对临近头的均匀的流体流率的设备 |
CN101610641B (zh) * | 2008-06-19 | 2011-06-29 | 富葵精密组件(深圳)有限公司 | 湿处理系统及湿处理方法 |
US9659796B2 (en) * | 2008-07-24 | 2017-05-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Rinsing wafers using composition-tunable rinse water in chemical mechanical polish |
JP2011243769A (ja) * | 2010-05-19 | 2011-12-01 | Tokyo Electron Ltd | 基板のエッチング方法、プログラム及びコンピュータ記憶媒体 |
JP6903441B2 (ja) * | 2016-03-31 | 2021-07-14 | 芝浦メカトロニクス株式会社 | 基板処理装置 |
JP7260322B2 (ja) * | 2019-02-18 | 2023-04-18 | 株式会社荏原製作所 | 研磨装置および研磨方法 |
JP2022068575A (ja) * | 2020-10-22 | 2022-05-10 | 株式会社ディスコ | 洗浄装置 |
CN112474586B (zh) * | 2020-11-23 | 2021-08-10 | 宁波格劳博智能工业有限公司 | 一种叠片数码电芯储运装置智能清洗检测生产线 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3461843A (en) * | 1967-11-21 | 1969-08-19 | Stanford Research Inst | Toner application apparatus |
US3574261A (en) * | 1968-09-24 | 1971-04-13 | Grace W R & Co | Apparatus and method for drying permeable webs |
US3801387A (en) * | 1971-10-18 | 1974-04-02 | Chemcut Corp | Etchant remover apparatus and method |
DE3404125A1 (de) * | 1984-02-07 | 1985-08-08 | Krupp Stahl Ag, 4630 Bochum | Vorrichtung zum absaugen von fluessigkeiten von warenbahnen |
US4842000A (en) * | 1987-05-21 | 1989-06-27 | Valmet-Dominion Inc. | Fabric cleaning |
US4949424A (en) * | 1989-01-23 | 1990-08-21 | William Shero | Carpet cleaning system |
AT393468B (de) * | 1990-03-01 | 1991-10-25 | Prodinger Karl Dipl Ing Dr | Vorrichtung zur behandlung, insbesondere zur reinigung, von oberflaechen |
DE4018074C2 (de) * | 1990-06-06 | 1995-09-14 | Voith Gmbh J M | Vorrichtung zum Reinigen eines umlaufenden Papiermaschinensiebes |
DE4121032A1 (de) * | 1991-06-26 | 1993-01-07 | Schmid Gmbh & Co Geb | Vorrichtung zum behandeln von plattenfoermigen gegenstaenden, insbesondere leiterplatten |
US5293663A (en) * | 1991-10-15 | 1994-03-15 | Food Industry Equipment International, Inc. | Fluid cleaning system |
US5339842A (en) * | 1992-12-18 | 1994-08-23 | Specialty Coating Systems, Inc. | Methods and apparatus for cleaning objects |
KR100361407B1 (ko) * | 1994-07-07 | 2003-02-19 | 가부시끼가이샤 오노모리 뎃꾜쇼 | 직물처리장치 |
JP3414018B2 (ja) * | 1994-12-28 | 2003-06-09 | 日産自動車株式会社 | 基板表面処理装置 |
US5614264A (en) * | 1995-08-11 | 1997-03-25 | Atotech Usa, Inc. | Fluid delivery apparatus and method |
DE19530989C1 (de) * | 1995-08-23 | 1997-03-13 | Atotech Deutschland Gmbh | Verfahren zum Filmstrippen |
JP3369418B2 (ja) | 1996-11-25 | 2003-01-20 | 大日本スクリーン製造株式会社 | 超音波振動子、超音波洗浄ノズル、超音波洗浄装置、基板洗浄装置、基板洗浄処理システムおよび超音波洗浄ノズル製造方法 |
JP3511441B2 (ja) * | 1996-11-29 | 2004-03-29 | 忠弘 大見 | 洗浄やエッチング、現像、剥離等を含むウエット処理に用いる省液型の液体供給ノズル、ウエット処理装置及びウエット処理方法 |
JP3511442B2 (ja) * | 1996-12-18 | 2004-03-29 | 忠弘 大見 | 洗浄やエッチング、現像、剥離等を含むウエット処理に用いる省液型の液体供給ノズル、省液型の液体供給ノズル装置及びウエット処理装置 |
JP3773145B2 (ja) * | 1997-09-04 | 2006-05-10 | 富士写真フイルム株式会社 | ウェブ洗浄及び除電装置 |
JP3655994B2 (ja) * | 1998-03-11 | 2005-06-02 | アルプス電気株式会社 | 除塵装置 |
DE19923591A1 (de) * | 1999-05-21 | 2000-11-23 | Fleissner Maschf Gmbh Co | Vorrichtung mit einem Düsenbalken zur Erzeugung von Flüssigkeitsstrahlen zur Strahlbeaufschlagung der Fasern einer Warenbahn |
-
2000
- 2000-08-30 JP JP2000261949A patent/JP2002075947A/ja active Pending
-
2001
- 2001-07-09 DE DE60113491T patent/DE60113491T2/de not_active Expired - Fee Related
- 2001-07-09 EP EP01305918A patent/EP1184091B1/de not_active Expired - Lifetime
- 2001-08-07 TW TW090119261A patent/TW506009B/zh not_active IP Right Cessation
- 2001-08-20 CN CNB011306807A patent/CN1162895C/zh not_active Expired - Fee Related
- 2001-08-22 KR KR10-2001-0050654A patent/KR100445041B1/ko not_active IP Right Cessation
- 2001-08-30 US US09/945,531 patent/US6629540B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
TW506009B (en) | 2002-10-11 |
EP1184091B1 (de) | 2005-09-21 |
EP1184091A1 (de) | 2002-03-06 |
DE60113491T2 (de) | 2006-06-29 |
KR20020017982A (ko) | 2002-03-07 |
KR100445041B1 (ko) | 2004-08-18 |
US6629540B2 (en) | 2003-10-07 |
CN1340848A (zh) | 2002-03-20 |
CN1162895C (zh) | 2004-08-18 |
US20020023671A1 (en) | 2002-02-28 |
JP2002075947A (ja) | 2002-03-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |