DE60104965T2 - Optischer Deflektor - Google Patents

Optischer Deflektor Download PDF

Info

Publication number
DE60104965T2
DE60104965T2 DE60104965T DE60104965T DE60104965T2 DE 60104965 T2 DE60104965 T2 DE 60104965T2 DE 60104965 T DE60104965 T DE 60104965T DE 60104965 T DE60104965 T DE 60104965T DE 60104965 T2 DE60104965 T2 DE 60104965T2
Authority
DE
Germany
Prior art keywords
optical deflector
mirror
base
movable plate
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60104965T
Other languages
German (de)
English (en)
Other versions
DE60104965D1 (de
Inventor
Hiroshi Hachioji-shi Miyajima
Masanori Hachioji-shi Ogata
Yukihiro Hachioji-shi Aoki
Yoshiro Hachioji-shi Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Publication of DE60104965D1 publication Critical patent/DE60104965D1/de
Application granted granted Critical
Publication of DE60104965T2 publication Critical patent/DE60104965T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE60104965T 2000-11-20 2001-11-16 Optischer Deflektor Expired - Lifetime DE60104965T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000353145 2000-11-20
JP2000353145 2000-11-20
JP2001292165A JP4674017B2 (ja) 2000-11-20 2001-09-25 光偏向器
JP2001292165 2001-09-25

Publications (2)

Publication Number Publication Date
DE60104965D1 DE60104965D1 (de) 2004-09-23
DE60104965T2 true DE60104965T2 (de) 2005-08-18

Family

ID=26604297

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60104965T Expired - Lifetime DE60104965T2 (de) 2000-11-20 2001-11-16 Optischer Deflektor

Country Status (4)

Country Link
US (1) US6888656B2 (enExample)
EP (1) EP1207416B1 (enExample)
JP (1) JP4674017B2 (enExample)
DE (1) DE60104965T2 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002321195A (ja) * 2001-04-20 2002-11-05 Olympus Optical Co Ltd 振動体およびその製造方法
JP2003066362A (ja) * 2001-08-23 2003-03-05 Olympus Optical Co Ltd 光偏向器
CN1501108A (zh) 2002-08-28 2004-06-02 Nec������ʽ���� 光开关
JP3677604B2 (ja) * 2002-12-17 2005-08-03 日本航空電子工業株式会社 磁気アクチュエータ
US7489024B2 (en) * 2003-02-20 2009-02-10 Technion Research & Development Foundation Ltd. TMOS-infrared uncooled sensor and focal plane array
JP4492252B2 (ja) * 2003-09-05 2010-06-30 セイコーエプソン株式会社 アクチュエータ
JP4262583B2 (ja) * 2003-11-26 2009-05-13 オリンパス株式会社 二次元光偏向器
US6972913B2 (en) * 2004-01-29 2005-12-06 Hewlett-Packard Development Company, L.P. Two axis tip-tilt platform
KR100738114B1 (ko) * 2006-05-18 2007-07-12 삼성전자주식회사 액츄에이터 및 이차원 스캐너
JP4665868B2 (ja) * 2006-08-18 2011-04-06 セイコーエプソン株式会社 光スキャナおよび画像形成装置
WO2009147304A1 (fr) * 2008-06-02 2009-12-10 Lemoptix Sa Micromiroir a actionnement electromagnetique
JP2011107675A (ja) * 2009-10-20 2011-06-02 Seiko Epson Corp 光偏向素子、光偏向器、及び画像形成装置
JP6119090B2 (ja) 2011-09-27 2017-04-26 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器
JP5834718B2 (ja) 2011-09-29 2015-12-24 セイコーエプソン株式会社 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
EP2823695B1 (en) 2012-03-08 2018-10-24 Intel Corporation A mems micro-mirror assembly
US11726488B1 (en) 2013-03-06 2023-08-15 Waymo Llc Light steering device with a plurality of beam-steering optics
US9128190B1 (en) * 2013-03-06 2015-09-08 Google Inc. Light steering device with an array of oscillating reflective slats
US10401865B1 (en) 2013-03-06 2019-09-03 Waymo Llc Light steering device with an array of oscillating reflective slats
CN110673333A (zh) * 2019-08-31 2020-01-10 广东联大光电有限公司 一种能实时修正振幅的投影振镜及其修正振幅的方法
CN111200909B (zh) * 2020-01-17 2022-07-12 重庆川仪自动化股份有限公司 扫描微镜的封装结构
CN117031736B (zh) * 2023-03-30 2025-11-04 爱美特(深圳)科技有限公司 一种新型双轴光线偏转器

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62210418A (ja) * 1986-03-12 1987-09-16 Hitachi Ltd 光ビ−ム偏向ミラ−
JPH01195414A (ja) * 1988-01-30 1989-08-07 Konica Corp ミラー振動子
JP2722314B2 (ja) 1993-12-20 1998-03-04 日本信号株式会社 プレーナー型ガルバノミラー及びその製造方法
KR100343219B1 (ko) * 1995-02-25 2002-11-23 삼성전기주식회사 거울구동장치
JP2987750B2 (ja) * 1995-05-26 1999-12-06 日本信号株式会社 プレーナ型電磁アクチュエータ
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
JP4414498B2 (ja) * 1997-12-09 2010-02-10 オリンパス株式会社 光偏向器
JP4111619B2 (ja) * 1999-02-26 2008-07-02 日本信号株式会社 プレーナ型光走査装置の実装構造
JP2001125036A (ja) 1999-10-29 2001-05-11 Miyota Kk プレーナ型ガルバノミラー
US6388789B1 (en) * 2000-09-19 2002-05-14 The Charles Stark Draper Laboratory, Inc. Multi-axis magnetically actuated device

Also Published As

Publication number Publication date
DE60104965D1 (de) 2004-09-23
EP1207416A1 (en) 2002-05-22
US20020060830A1 (en) 2002-05-23
EP1207416B1 (en) 2004-08-18
US6888656B2 (en) 2005-05-03
JP2002214561A (ja) 2002-07-31
JP4674017B2 (ja) 2011-04-20

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