DE60104965D1 - Optischer Deflektor - Google Patents

Optischer Deflektor

Info

Publication number
DE60104965D1
DE60104965D1 DE60104965T DE60104965T DE60104965D1 DE 60104965 D1 DE60104965 D1 DE 60104965D1 DE 60104965 T DE60104965 T DE 60104965T DE 60104965 T DE60104965 T DE 60104965T DE 60104965 D1 DE60104965 D1 DE 60104965D1
Authority
DE
Germany
Prior art keywords
optical deflector
deflector
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60104965T
Other languages
English (en)
Other versions
DE60104965T2 (de
Inventor
Hiroshi Miyajima
Masanori Ogata
Yukihiro Aoki
Yoshiro Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Publication of DE60104965D1 publication Critical patent/DE60104965D1/de
Application granted granted Critical
Publication of DE60104965T2 publication Critical patent/DE60104965T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
DE60104965T 2000-11-20 2001-11-16 Optischer Deflektor Expired - Lifetime DE60104965T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000353145 2000-11-20
JP2000353145 2000-11-20
JP2001292165 2001-09-25
JP2001292165A JP4674017B2 (ja) 2000-11-20 2001-09-25 光偏向器

Publications (2)

Publication Number Publication Date
DE60104965D1 true DE60104965D1 (de) 2004-09-23
DE60104965T2 DE60104965T2 (de) 2005-08-18

Family

ID=26604297

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60104965T Expired - Lifetime DE60104965T2 (de) 2000-11-20 2001-11-16 Optischer Deflektor

Country Status (4)

Country Link
US (1) US6888656B2 (de)
EP (1) EP1207416B1 (de)
JP (1) JP4674017B2 (de)
DE (1) DE60104965T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002321195A (ja) * 2001-04-20 2002-11-05 Olympus Optical Co Ltd 振動体およびその製造方法
JP2003066362A (ja) * 2001-08-23 2003-03-05 Olympus Optical Co Ltd 光偏向器
EP1394582A3 (de) * 2002-08-28 2004-11-17 Nec Tokin Corporation Optischer Schalter mit einem schwingenden Magnetanker
JP3677604B2 (ja) * 2002-12-17 2005-08-03 日本航空電子工業株式会社 磁気アクチュエータ
US7423794B2 (en) * 2003-02-20 2008-09-09 Technion Research & Development Foundation Ltd. Device and method for stacked multi-level uncoupled electrostatic actuators
JP4492252B2 (ja) * 2003-09-05 2010-06-30 セイコーエプソン株式会社 アクチュエータ
JP4262583B2 (ja) * 2003-11-26 2009-05-13 オリンパス株式会社 二次元光偏向器
US6972913B2 (en) 2004-01-29 2005-12-06 Hewlett-Packard Development Company, L.P. Two axis tip-tilt platform
KR100738114B1 (ko) * 2006-05-18 2007-07-12 삼성전자주식회사 액츄에이터 및 이차원 스캐너
JP4665868B2 (ja) * 2006-08-18 2011-04-06 セイコーエプソン株式会社 光スキャナおよび画像形成装置
EP2294472B1 (de) * 2008-06-02 2013-08-21 Lemoptix SA Mikrospiegel mit elektromagnetischer betätigung
JP2011107675A (ja) * 2009-10-20 2011-06-02 Seiko Epson Corp 光偏向素子、光偏向器、及び画像形成装置
JP6119090B2 (ja) 2011-09-27 2017-04-26 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器
JP5834718B2 (ja) 2011-09-29 2015-12-24 セイコーエプソン株式会社 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
EP2823695B1 (de) 2012-03-08 2018-10-24 Intel Corporation Mems-mikrospiegelanordnung
US10401865B1 (en) 2013-03-06 2019-09-03 Waymo Llc Light steering device with an array of oscillating reflective slats
US9128190B1 (en) 2013-03-06 2015-09-08 Google Inc. Light steering device with an array of oscillating reflective slats
US11726488B1 (en) 2013-03-06 2023-08-15 Waymo Llc Light steering device with a plurality of beam-steering optics
CN111200909B (zh) * 2020-01-17 2022-07-12 重庆川仪自动化股份有限公司 扫描微镜的封装结构

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62210418A (ja) * 1986-03-12 1987-09-16 Hitachi Ltd 光ビ−ム偏向ミラ−
JPH01195414A (ja) * 1988-01-30 1989-08-07 Konica Corp ミラー振動子
JP2722314B2 (ja) 1993-12-20 1998-03-04 日本信号株式会社 プレーナー型ガルバノミラー及びその製造方法
KR100343219B1 (ko) * 1995-02-25 2002-11-23 삼성전기주식회사 거울구동장치
JP2987750B2 (ja) * 1995-05-26 1999-12-06 日本信号株式会社 プレーナ型電磁アクチュエータ
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
JP4414498B2 (ja) * 1997-12-09 2010-02-10 オリンパス株式会社 光偏向器
JP4111619B2 (ja) 1999-02-26 2008-07-02 日本信号株式会社 プレーナ型光走査装置の実装構造
JP2001125036A (ja) 1999-10-29 2001-05-11 Miyota Kk プレーナ型ガルバノミラー
US6388789B1 (en) * 2000-09-19 2002-05-14 The Charles Stark Draper Laboratory, Inc. Multi-axis magnetically actuated device

Also Published As

Publication number Publication date
US20020060830A1 (en) 2002-05-23
EP1207416A1 (de) 2002-05-22
JP2002214561A (ja) 2002-07-31
DE60104965T2 (de) 2005-08-18
EP1207416B1 (de) 2004-08-18
US6888656B2 (en) 2005-05-03
JP4674017B2 (ja) 2011-04-20

Similar Documents

Publication Publication Date Title
DE60138935D1 (de) Optischer Verstärker
DE60143049D1 (de) Optischer hülsenloser verbinder
DE60125018D1 (de) Optischer druckaufnehmer
FI20010778A (fi) Optinen kytkentäjärjestely
DE60031579D1 (de) Optisches element
DE60143386D1 (de) Optischer abnehmer
DE50114386D1 (de) Ng
DE60144550D1 (de) Lichtabtastvorrichtung
DE60137499D1 (de) Lichtwellenleiterfaser
ATA206799A (de) Leuchtdioden-signalgeberoptik
DE60104965D1 (de) Optischer Deflektor
ITTO20000505A0 (it) Complesso ottico.
DE10194061T1 (de) Optisches Laufwerk
NO20032741D0 (no) Deflektoranordninger
DE60036662D1 (de) Langgestreckte Leuchte
DE60118475D1 (de) Optisches Element
NO20025366D0 (no) Optisk avstandsmÕler
DE60101246D1 (de) Optischer Router
DK1285291T3 (da) Optisk fiber
NO20032740L (no) Deflektoranordninger
DE60113617D1 (de) Optisches steuerbares optisches Dämpfungsglied
DE60120068D1 (de) Optischer wellenleiter
DE60132724D1 (de) Lichtleitfaser
DE60119236D1 (de) Optischer Steckverbinder
DE60129006D1 (de) Faserformteil

Legal Events

Date Code Title Description
8364 No opposition during term of opposition