JP4674017B2 - 光偏向器 - Google Patents

光偏向器 Download PDF

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Publication number
JP4674017B2
JP4674017B2 JP2001292165A JP2001292165A JP4674017B2 JP 4674017 B2 JP4674017 B2 JP 4674017B2 JP 2001292165 A JP2001292165 A JP 2001292165A JP 2001292165 A JP2001292165 A JP 2001292165A JP 4674017 B2 JP4674017 B2 JP 4674017B2
Authority
JP
Japan
Prior art keywords
mirror
movable plate
base
yoke
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2001292165A
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English (en)
Japanese (ja)
Other versions
JP2002214561A (ja
JP2002214561A5 (enExample
Inventor
博志 宮島
雅紀 緒方
幸広 青木
芳郎 西村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2001292165A priority Critical patent/JP4674017B2/ja
Priority to US09/990,658 priority patent/US6888656B2/en
Priority to DE60104965T priority patent/DE60104965T2/de
Priority to EP01127261A priority patent/EP1207416B1/en
Publication of JP2002214561A publication Critical patent/JP2002214561A/ja
Publication of JP2002214561A5 publication Critical patent/JP2002214561A5/ja
Application granted granted Critical
Publication of JP4674017B2 publication Critical patent/JP4674017B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2001292165A 2000-11-20 2001-09-25 光偏向器 Expired - Lifetime JP4674017B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2001292165A JP4674017B2 (ja) 2000-11-20 2001-09-25 光偏向器
US09/990,658 US6888656B2 (en) 2000-11-20 2001-11-16 Optical deflector
DE60104965T DE60104965T2 (de) 2000-11-20 2001-11-16 Optischer Deflektor
EP01127261A EP1207416B1 (en) 2000-11-20 2001-11-16 Optical deflector

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000353145 2000-11-20
JP2000-353145 2000-11-20
JP2001292165A JP4674017B2 (ja) 2000-11-20 2001-09-25 光偏向器

Publications (3)

Publication Number Publication Date
JP2002214561A JP2002214561A (ja) 2002-07-31
JP2002214561A5 JP2002214561A5 (enExample) 2008-10-16
JP4674017B2 true JP4674017B2 (ja) 2011-04-20

Family

ID=26604297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001292165A Expired - Lifetime JP4674017B2 (ja) 2000-11-20 2001-09-25 光偏向器

Country Status (4)

Country Link
US (1) US6888656B2 (enExample)
EP (1) EP1207416B1 (enExample)
JP (1) JP4674017B2 (enExample)
DE (1) DE60104965T2 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002321195A (ja) * 2001-04-20 2002-11-05 Olympus Optical Co Ltd 振動体およびその製造方法
JP2003066362A (ja) * 2001-08-23 2003-03-05 Olympus Optical Co Ltd 光偏向器
CN1501108A (zh) 2002-08-28 2004-06-02 Nec������ʽ���� 光开关
JP3677604B2 (ja) * 2002-12-17 2005-08-03 日本航空電子工業株式会社 磁気アクチュエータ
US7489024B2 (en) * 2003-02-20 2009-02-10 Technion Research & Development Foundation Ltd. TMOS-infrared uncooled sensor and focal plane array
JP4492252B2 (ja) * 2003-09-05 2010-06-30 セイコーエプソン株式会社 アクチュエータ
JP4262583B2 (ja) * 2003-11-26 2009-05-13 オリンパス株式会社 二次元光偏向器
US6972913B2 (en) * 2004-01-29 2005-12-06 Hewlett-Packard Development Company, L.P. Two axis tip-tilt platform
KR100738114B1 (ko) * 2006-05-18 2007-07-12 삼성전자주식회사 액츄에이터 및 이차원 스캐너
JP4665868B2 (ja) * 2006-08-18 2011-04-06 セイコーエプソン株式会社 光スキャナおよび画像形成装置
WO2009147304A1 (fr) * 2008-06-02 2009-12-10 Lemoptix Sa Micromiroir a actionnement electromagnetique
JP2011107675A (ja) * 2009-10-20 2011-06-02 Seiko Epson Corp 光偏向素子、光偏向器、及び画像形成装置
JP6119090B2 (ja) 2011-09-27 2017-04-26 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器
JP5834718B2 (ja) 2011-09-29 2015-12-24 セイコーエプソン株式会社 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
EP2823695B1 (en) 2012-03-08 2018-10-24 Intel Corporation A mems micro-mirror assembly
US11726488B1 (en) 2013-03-06 2023-08-15 Waymo Llc Light steering device with a plurality of beam-steering optics
US9128190B1 (en) * 2013-03-06 2015-09-08 Google Inc. Light steering device with an array of oscillating reflective slats
US10401865B1 (en) 2013-03-06 2019-09-03 Waymo Llc Light steering device with an array of oscillating reflective slats
CN110673333A (zh) * 2019-08-31 2020-01-10 广东联大光电有限公司 一种能实时修正振幅的投影振镜及其修正振幅的方法
CN111200909B (zh) * 2020-01-17 2022-07-12 重庆川仪自动化股份有限公司 扫描微镜的封装结构
CN117031736B (zh) * 2023-03-30 2025-11-04 爱美特(深圳)科技有限公司 一种新型双轴光线偏转器

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62210418A (ja) * 1986-03-12 1987-09-16 Hitachi Ltd 光ビ−ム偏向ミラ−
JPH01195414A (ja) * 1988-01-30 1989-08-07 Konica Corp ミラー振動子
JP2722314B2 (ja) 1993-12-20 1998-03-04 日本信号株式会社 プレーナー型ガルバノミラー及びその製造方法
KR100343219B1 (ko) * 1995-02-25 2002-11-23 삼성전기주식회사 거울구동장치
JP2987750B2 (ja) * 1995-05-26 1999-12-06 日本信号株式会社 プレーナ型電磁アクチュエータ
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
JP4414498B2 (ja) * 1997-12-09 2010-02-10 オリンパス株式会社 光偏向器
JP4111619B2 (ja) * 1999-02-26 2008-07-02 日本信号株式会社 プレーナ型光走査装置の実装構造
JP2001125036A (ja) 1999-10-29 2001-05-11 Miyota Kk プレーナ型ガルバノミラー
US6388789B1 (en) * 2000-09-19 2002-05-14 The Charles Stark Draper Laboratory, Inc. Multi-axis magnetically actuated device

Also Published As

Publication number Publication date
DE60104965D1 (de) 2004-09-23
EP1207416A1 (en) 2002-05-22
US20020060830A1 (en) 2002-05-23
EP1207416B1 (en) 2004-08-18
US6888656B2 (en) 2005-05-03
DE60104965T2 (de) 2005-08-18
JP2002214561A (ja) 2002-07-31

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