DE60102775D1 - Verfahren zur Entfernung von Metallen und Siliziumoxid während des Gasphasenätzens vom Opferoxid - Google Patents
Verfahren zur Entfernung von Metallen und Siliziumoxid während des Gasphasenätzens vom OpferoxidInfo
- Publication number
- DE60102775D1 DE60102775D1 DE60102775T DE60102775T DE60102775D1 DE 60102775 D1 DE60102775 D1 DE 60102775D1 DE 60102775 T DE60102775 T DE 60102775T DE 60102775 T DE60102775 T DE 60102775T DE 60102775 D1 DE60102775 D1 DE 60102775D1
- Authority
- DE
- Germany
- Prior art keywords
- reactive mixture
- chamber
- gas phase
- during gas
- diketone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02046—Dry cleaning only
- H01L21/02049—Dry cleaning only with gaseous HF
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
- B81C1/0092—For avoiding stiction during the manufacturing process of the device, e.g. during wet etching
- B81C1/00936—Releasing the movable structure without liquid etchant
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/698,467 US6534413B1 (en) | 2000-10-27 | 2000-10-27 | Method to remove metal and silicon oxide during gas-phase sacrificial oxide etch |
US698467 | 2000-10-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60102775D1 true DE60102775D1 (de) | 2004-05-19 |
DE60102775T2 DE60102775T2 (de) | 2005-05-12 |
Family
ID=24805374
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60102775T Expired - Fee Related DE60102775T2 (de) | 2000-10-27 | 2001-10-24 | Verfahren zur Entfernung von Metallen und Siliziumoxid während des Gasphasenätzens vom Opferoxid |
Country Status (7)
Country | Link |
---|---|
US (1) | US6534413B1 (de) |
EP (1) | EP1201603B1 (de) |
JP (1) | JP2002219699A (de) |
KR (1) | KR20020033067A (de) |
AT (1) | ATE264266T1 (de) |
DE (1) | DE60102775T2 (de) |
TW (1) | TW504762B (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2002353039A1 (en) * | 2001-12-04 | 2003-06-17 | Primaxx, Inc. | System and method for micro electro mechanical etching |
US7045459B2 (en) * | 2002-02-19 | 2006-05-16 | Northrop Grumman Corporation | Thin film encapsulation of MEMS devices |
US20050229947A1 (en) | 2002-06-14 | 2005-10-20 | Mykrolis Corporation | Methods of inserting or removing a species from a substrate |
US20050142885A1 (en) * | 2002-08-30 | 2005-06-30 | Tokyo Electron Limited | Method of etching and etching apparatus |
WO2004030049A2 (en) * | 2002-09-27 | 2004-04-08 | Tokyo Electron Limited | A method and system for etching high-k dielectric materials |
US7104130B2 (en) * | 2003-04-11 | 2006-09-12 | The Board Of Trustees Of The Leland Stanford Junior University | Ultra-miniature accelerometers |
US6805433B1 (en) * | 2003-05-19 | 2004-10-19 | Xerox Corporation | Integrated side shooter inkjet architecture with round nozzles |
JP2005212032A (ja) * | 2004-01-29 | 2005-08-11 | M Fsi Kk | Memsデバイス向け基板表面の処理方法 |
CN1950338B (zh) * | 2004-03-05 | 2012-05-16 | 霍尼韦尔国际公司 | 杂环胺的离子液体 |
JP4489541B2 (ja) * | 2004-09-07 | 2010-06-23 | セントラル硝子株式会社 | ハフニウム含有酸化物のクリーニング方法 |
US7337671B2 (en) | 2005-06-03 | 2008-03-04 | Georgia Tech Research Corp. | Capacitive microaccelerometers and fabrication methods |
DE102006019836B4 (de) | 2006-04-28 | 2016-09-01 | Globalfoundries Inc. | Verfahren zum Reduzieren von Siliziddefekten durch Entfernen von Kontaminationsstoffen vor der Drain/Source-Aktivierung |
US7578189B1 (en) | 2006-05-10 | 2009-08-25 | Qualtre, Inc. | Three-axis accelerometers |
US7767484B2 (en) | 2006-05-31 | 2010-08-03 | Georgia Tech Research Corporation | Method for sealing and backside releasing of microelectromechanical systems |
US20080054759A1 (en) * | 2006-08-11 | 2008-03-06 | Farrokh Ayazi | Wafer-level encapsulation and sealing of electrostatic transducers |
JP4924245B2 (ja) * | 2007-07-02 | 2012-04-25 | 東京エレクトロン株式会社 | 半導体製造装置、半導体装置の製造方法及び記憶媒体 |
CN102305256B (zh) * | 2011-09-06 | 2013-06-12 | 复旦大学 | 一种金属微米/纳米弹簧及其制备方法和应用 |
CN103165407B (zh) * | 2011-12-14 | 2016-04-06 | 有研半导体材料有限公司 | 一种用于硅片表面制样的表面处理及腐蚀的工艺和装置 |
JP6024272B2 (ja) * | 2011-12-22 | 2016-11-16 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
JP5929386B2 (ja) * | 2012-03-22 | 2016-06-08 | セントラル硝子株式会社 | 成膜装置内の金属膜のドライクリーニング方法 |
JP6766184B2 (ja) * | 2016-06-03 | 2020-10-07 | インテグリス・インコーポレーテッド | ハフニア及びジルコニアの蒸気相エッチング |
JP6906205B2 (ja) * | 2017-08-01 | 2021-07-21 | 株式会社サイオクス | 半導体積層物の製造方法および窒化物結晶基板の製造方法 |
WO2024019025A1 (ja) * | 2022-07-19 | 2024-01-25 | セントラル硝子株式会社 | ドライエッチング方法、クリーニング方法及び半導体デバイスの製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5094701A (en) * | 1990-03-30 | 1992-03-10 | Air Products And Chemicals, Inc. | Cleaning agents comprising beta-diketone and beta-ketoimine ligands and a process for using the same |
DE4317274A1 (de) | 1993-05-25 | 1994-12-01 | Bosch Gmbh Robert | Verfahren zur Herstellung oberflächen-mikromechanischer Strukturen |
TW371775B (en) * | 1995-04-28 | 1999-10-11 | Siemens Ag | Method for the selective removal of silicon dioxide |
US5798283A (en) * | 1995-09-06 | 1998-08-25 | Sandia Corporation | Method for integrating microelectromechanical devices with electronic circuitry |
US5963788A (en) * | 1995-09-06 | 1999-10-05 | Sandia Corporation | Method for integrating microelectromechanical devices with electronic circuitry |
US5954884A (en) * | 1997-03-17 | 1999-09-21 | Fsi International Inc. | UV/halogen metals removal process |
JP4049423B2 (ja) * | 1997-11-06 | 2008-02-20 | キヤノンアネルバ株式会社 | 成膜処理装置内の付着金属膜のクリーニング方法 |
US6159859A (en) * | 1998-06-09 | 2000-12-12 | Air Products And Chemicals, Inc. | Gas phase removal of SiO2 /metals from silicon |
US6242165B1 (en) * | 1998-08-28 | 2001-06-05 | Micron Technology, Inc. | Supercritical compositions for removal of organic material and methods of using same |
-
2000
- 2000-10-27 US US09/698,467 patent/US6534413B1/en not_active Expired - Fee Related
-
2001
- 2001-10-22 TW TW090126083A patent/TW504762B/zh not_active IP Right Cessation
- 2001-10-24 DE DE60102775T patent/DE60102775T2/de not_active Expired - Fee Related
- 2001-10-24 EP EP01124377A patent/EP1201603B1/de not_active Expired - Lifetime
- 2001-10-24 AT AT01124377T patent/ATE264266T1/de not_active IP Right Cessation
- 2001-10-26 KR KR1020010066157A patent/KR20020033067A/ko not_active Application Discontinuation
- 2001-10-29 JP JP2001330335A patent/JP2002219699A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP1201603A3 (de) | 2002-12-18 |
US6534413B1 (en) | 2003-03-18 |
TW504762B (en) | 2002-10-01 |
EP1201603B1 (de) | 2004-04-14 |
DE60102775T2 (de) | 2005-05-12 |
ATE264266T1 (de) | 2004-04-15 |
JP2002219699A (ja) | 2002-08-06 |
KR20020033067A (ko) | 2002-05-04 |
EP1201603A2 (de) | 2002-05-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de | ||
8370 | Indication related to discontinuation of the patent is to be deleted | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |