DE60044892D1 - Ionenquelle, Massenspektrometer, Massenspektrometrie und Überwachungssystem - Google Patents

Ionenquelle, Massenspektrometer, Massenspektrometrie und Überwachungssystem

Info

Publication number
DE60044892D1
DE60044892D1 DE60044892T DE60044892T DE60044892D1 DE 60044892 D1 DE60044892 D1 DE 60044892D1 DE 60044892 T DE60044892 T DE 60044892T DE 60044892 T DE60044892 T DE 60044892T DE 60044892 D1 DE60044892 D1 DE 60044892D1
Authority
DE
Germany
Prior art keywords
monitoring system
ion source
mass
mass spectrometry
mass spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60044892T
Other languages
English (en)
Inventor
Minoru Sakairi
Yuichiro Hashimoto
Masuyoshi Yamada
Masao Suga
Kyoko Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP26604499A external-priority patent/JP4054493B2/ja
Priority claimed from JP2000247937A external-priority patent/JP4126150B2/ja
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE60044892D1 publication Critical patent/DE60044892D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/168—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission field ionisation, e.g. corona discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/62—Detectors specially adapted therefor
    • G01N30/72—Mass spectrometers
    • G01N30/7233—Mass spectrometers interfaced to liquid or supercritical fluid chromatograph
    • G01N30/724—Nebulising, aerosol formation or ionisation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
DE60044892T 1999-09-20 2000-09-15 Ionenquelle, Massenspektrometer, Massenspektrometrie und Überwachungssystem Expired - Lifetime DE60044892D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP26604499A JP4054493B2 (ja) 1999-09-20 1999-09-20 イオン源
JP2000247937A JP4126150B2 (ja) 2000-08-10 2000-08-10 質量分析装置

Publications (1)

Publication Number Publication Date
DE60044892D1 true DE60044892D1 (de) 2010-10-14

Family

ID=26547283

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60044892T Expired - Lifetime DE60044892D1 (de) 1999-09-20 2000-09-15 Ionenquelle, Massenspektrometer, Massenspektrometrie und Überwachungssystem

Country Status (4)

Country Link
US (2) US6686592B1 (de)
EP (2) EP1093151B1 (de)
DE (1) DE60044892D1 (de)
IL (1) IL138540A0 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1093151B1 (de) * 1999-09-20 2010-09-01 Hitachi, Ltd. Ionenquelle, Massenspektrometer, Massenspektrometrie und Überwachungssystem
JP3701182B2 (ja) * 2000-08-24 2005-09-28 株式会社日立製作所 出入管理方法及び出入管理システム
JP3855153B2 (ja) * 2001-07-05 2006-12-06 株式会社日立製作所 セキュリティシステム
JP2004028675A (ja) * 2002-06-24 2004-01-29 Hitachi Ltd 危険物検知システム
CN100517554C (zh) * 2002-12-02 2009-07-22 格里菲分析技术公司 质量分离器
JP4337584B2 (ja) * 2004-03-10 2009-09-30 株式会社日立製作所 質量分析装置及びイオン源
WO2006002027A2 (en) * 2004-06-15 2006-01-05 Griffin Analytical Technologies, Inc. Portable mass spectrometer configured to perform multidimensional mass analysis
JP4492267B2 (ja) * 2004-09-16 2010-06-30 株式会社日立製作所 質量分析装置
DE112006001030T5 (de) 2005-04-25 2008-03-20 Griffin Analytical Technologies L.L.C., West Lafayette Analyseinstrumente, -Vorrichtungen und -Verfahren
US8469700B2 (en) * 2005-09-29 2013-06-25 Rosemount Inc. Fouling and corrosion detector for burner tips in fired equipment
JP4507281B2 (ja) 2006-03-30 2010-07-21 富士フイルム株式会社 画像表示装置、撮像装置および画像表示方法
US7804076B2 (en) * 2006-05-10 2010-09-28 Taiwan Semiconductor Manufacturing Co., Ltd Insulator for high current ion implanters
US7992424B1 (en) 2006-09-14 2011-08-09 Griffin Analytical Technologies, L.L.C. Analytical instrumentation and sample analysis methods
US8017919B2 (en) * 2007-12-28 2011-09-13 Newaire, Inc. Multi-electrode negative ion generator
US8217342B2 (en) * 2009-01-14 2012-07-10 Sociedad Europea de Analisis Diferencial de Movilidad Ionizer for vapor analysis decoupling the ionization region from the analyzer
GB2472638B (en) * 2009-08-14 2014-03-19 Edwards Ltd Vacuum system
JP5041495B2 (ja) * 2010-11-01 2012-10-03 シャープ株式会社 イオン発生装置
US20130284915A1 (en) * 2010-12-27 2013-10-31 Bio Chromato, Inc. Mass spectrometry method, mass spectrometer, and mass spectrometry system
US9443709B2 (en) * 2011-11-16 2016-09-13 Owlstone Limited Corona ionization device and method
US10026600B2 (en) 2011-11-16 2018-07-17 Owlstone Medical Limited Corona ionization apparatus and method
JP5992715B2 (ja) * 2012-04-05 2016-09-14 シャープ株式会社 イオン発生装置
WO2014084015A1 (ja) 2012-11-29 2014-06-05 株式会社日立ハイテクノロジーズ ハイブリッドイオン源、質量分析計及びイオンモビリティ装置
EP3047507B1 (de) * 2013-09-20 2019-06-26 Micromass UK Limited Schnittstelle für ionenquelle und vakuumgehäuse
GB201317774D0 (en) * 2013-10-08 2013-11-20 Micromass Ltd An ion inlet assembly
US10446378B2 (en) 2013-09-20 2019-10-15 Micromass Uk Limited Ion inlet assembly
US9632066B2 (en) 2015-04-09 2017-04-25 Ut-Battelle, Llc Open port sampling interface
US10060838B2 (en) 2015-04-09 2018-08-28 Ut-Battelle, Llc Capture probe
CN106480436B (zh) * 2015-08-31 2021-02-19 中国科学院大连化学物理研究所 一种镀层电喷针的制备方法
US11125657B2 (en) * 2018-01-30 2021-09-21 Ut-Battelle, Llc Sampling probe

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Publication number Priority date Publication date Assignee Title
US4023398A (en) 1975-03-03 1977-05-17 John Barry French Apparatus for analyzing trace components
JPS5725944B2 (de) 1975-05-12 1982-06-01
US4531056A (en) * 1983-04-20 1985-07-23 Yale University Method and apparatus for the mass spectrometric analysis of solutions
JPS59230244A (ja) 1984-05-17 1984-12-24 ザ・ガバ−ニング・カウンセル・オブ・ザ・ユニバ−シテイ・オブ・トロント 痕跡成分を真空室内で分析する方法
JPH07118295B2 (ja) * 1985-10-30 1995-12-18 株式会社日立製作所 質量分析計
JPH02135655A (ja) * 1988-11-16 1990-05-24 Hitachi Ltd 大気圧イオン化質量分析計
JP2756581B2 (ja) 1989-05-15 1998-05-25 日本真空技術株式会社 液体クロマトグラフィ質量分析計用イオン源
JP2872746B2 (ja) 1990-05-02 1999-03-24 賢三 平岡 エレクトロスプレー式質量分析装置
US5218203A (en) * 1991-03-22 1993-06-08 Georgia Tech Research Corporation Ion source and sample introduction method and apparatus using two stage ionization for producing sample gas ions
US5331218A (en) 1992-07-13 1994-07-19 Allegro Microsystems, Inc. Switched-capacitor notch filter with programmable notch width and depth
JP3324810B2 (ja) 1993-01-19 2002-09-17 ブラザー工業株式会社 ミシン
JPH06310091A (ja) * 1993-04-26 1994-11-04 Hitachi Ltd 大気圧イオン化質量分析計
JP3367719B2 (ja) 1993-09-20 2003-01-20 株式会社日立製作所 質量分析計および静電レンズ
JP2774774B2 (ja) * 1994-06-14 1998-07-09 東京都 高速液体クロマトグラフィーと質量分析計を組み合わせた定量分析装置、およびその試料イオン化用コロナ放電電極針
JPH08261989A (ja) 1995-03-24 1996-10-11 Osaka Oxygen Ind Ltd シラン系ガス中のシロキサンの計測方法
EP0882933A4 (de) * 1996-12-06 2000-01-26 Nippon Kokan Kk Verbrennungsvorrichtung und verfahren zur begrenzung der dioxinbildung
US6032513A (en) * 1997-06-30 2000-03-07 Texas Instruments Incorporated Apparatus and method for measuring contaminants in semiconductor processing chemicals
JP2941763B2 (ja) * 1998-02-02 1999-08-30 三菱重工業株式会社 ダイオキシン分析装置及びダイオキシン計測システム
JP3904322B2 (ja) * 1998-04-20 2007-04-11 株式会社日立製作所 分析装置
JP3819146B2 (ja) 1998-04-20 2006-09-06 株式会社日立製作所 モニタ装置
JP2000028579A (ja) 1998-07-08 2000-01-28 Hitachi Ltd 試料ガス採取装置及び危険物探知装置
EP1093151B1 (de) * 1999-09-20 2010-09-01 Hitachi, Ltd. Ionenquelle, Massenspektrometer, Massenspektrometrie und Überwachungssystem

Also Published As

Publication number Publication date
US6686592B1 (en) 2004-02-03
EP1093151B1 (de) 2010-09-01
US20040036020A1 (en) 2004-02-26
IL138540A0 (en) 2001-10-31
EP2296167A1 (de) 2011-03-16
EP1093151A2 (de) 2001-04-18
EP2296167B1 (de) 2012-11-07
US6838664B2 (en) 2005-01-04
EP1093151A3 (de) 2006-05-03

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