DE60037753D1 - Sputtertarget, vorbereitungsverfahren dafür und filmherstellendes verfahren - Google Patents
Sputtertarget, vorbereitungsverfahren dafür und filmherstellendes verfahrenInfo
- Publication number
- DE60037753D1 DE60037753D1 DE60037753T DE60037753T DE60037753D1 DE 60037753 D1 DE60037753 D1 DE 60037753D1 DE 60037753 T DE60037753 T DE 60037753T DE 60037753 T DE60037753 T DE 60037753T DE 60037753 D1 DE60037753 D1 DE 60037753D1
- Authority
- DE
- Germany
- Prior art keywords
- film
- sputtertarget
- preparation
- sputtering target
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5093—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with elements other than metals or carbon
- C04B41/5096—Silicon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/213—SiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/155—Deposition methods from the vapour phase by sputtering by reactive sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Structural Engineering (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Metallurgy (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Physical Vapour Deposition (AREA)
- Ceramic Products (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29148099 | 1999-10-13 | ||
JP29148099 | 1999-10-13 | ||
PCT/JP2000/007088 WO2001027345A1 (fr) | 1999-10-13 | 2000-10-12 | Cible de pulverisation et son procede de preparation, et procede de formation de film |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60037753D1 true DE60037753D1 (de) | 2008-02-21 |
DE60037753T2 DE60037753T2 (de) | 2009-01-15 |
Family
ID=17769434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60037753T Expired - Lifetime DE60037753T2 (de) | 1999-10-13 | 2000-10-12 | Sputtertarget, verfahren für dessen herstellung und verfahren zum bilden eines films |
Country Status (6)
Country | Link |
---|---|
US (1) | US6800182B2 (de) |
EP (1) | EP1251188B1 (de) |
JP (1) | JP4733890B2 (de) |
AT (1) | ATE383456T1 (de) |
DE (1) | DE60037753T2 (de) |
WO (1) | WO2001027345A1 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3960933B2 (ja) * | 2003-03-18 | 2007-08-15 | 日本碍子株式会社 | 高熱伝導性放熱材及びその製造方法 |
JP4486838B2 (ja) | 2003-04-25 | 2010-06-23 | 旭硝子株式会社 | 酸化ケイ素膜の製造方法および光学多層膜の製造方法 |
JP4763962B2 (ja) * | 2003-08-18 | 2011-08-31 | 株式会社東芝 | 酸化膜形成用スパッタリングターゲットとそれを用いた酸化膜の製造方法 |
KR100734460B1 (ko) * | 2003-09-26 | 2007-07-03 | 가부시끼가이샤 도시바 | 스퍼터링 타깃과 그것을 이용한 Si 산화막의 제조 방법 |
WO2006017349A1 (en) | 2004-07-12 | 2006-02-16 | Cardinal Cg Company | Low-maintenance coatings |
US7537677B2 (en) * | 2005-01-19 | 2009-05-26 | Guardian Industries Corp. | Method of making low-E coating using ceramic zinc inclusive target, and target used in same |
US7597962B2 (en) * | 2005-06-07 | 2009-10-06 | Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) | Coated article with IR reflecting layer and method of making same |
JP4533815B2 (ja) * | 2005-07-08 | 2010-09-01 | 株式会社東芝 | スパッタリングターゲットとそれを用いた光学薄膜の製造方法 |
KR20080085842A (ko) | 2006-01-20 | 2008-09-24 | 스미토모 긴조쿠 고잔 가부시키가이샤 | 흡수형 다층막 nd 필터 및 그 제조 방법 |
KR101431230B1 (ko) | 2006-04-11 | 2014-08-18 | 카디날 씨지 컴퍼니 | 개선된 낮은 유지 특성이 있는 광촉매성 코팅 |
US20070251819A1 (en) * | 2006-05-01 | 2007-11-01 | Kardokus Janine K | Hollow cathode magnetron sputtering targets and methods of forming hollow cathode magnetron sputtering targets |
US20080011599A1 (en) | 2006-07-12 | 2008-01-17 | Brabender Dennis M | Sputtering apparatus including novel target mounting and/or control |
US8702919B2 (en) | 2007-08-13 | 2014-04-22 | Honeywell International Inc. | Target designs and related methods for coupled target assemblies, methods of production and uses thereof |
US7820309B2 (en) | 2007-09-14 | 2010-10-26 | Cardinal Cg Company | Low-maintenance coatings, and methods for producing low-maintenance coatings |
US8409717B2 (en) | 2008-04-21 | 2013-04-02 | Guardian Industries Corp. | Coated article with IR reflecting layer and method of making same |
JP2011129631A (ja) | 2009-12-16 | 2011-06-30 | Showa Shell Sekiyu Kk | Cis系薄膜太陽電池の製造方法 |
CN102181837A (zh) * | 2011-04-20 | 2011-09-14 | 韶关市欧莱高新材料有限公司 | 一种Si-SiC靶材 |
EP3541762B1 (de) | 2016-11-17 | 2022-03-02 | Cardinal CG Company | Statisch-dissipative beschichtungstechnologie |
CN111320478B (zh) * | 2020-03-27 | 2022-02-11 | 有研资源环境技术研究院(北京)有限公司 | 一种碳硅陶瓷靶材的制备方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3951587A (en) * | 1974-12-06 | 1976-04-20 | Norton Company | Silicon carbide diffusion furnace components |
JPS5658967A (en) * | 1979-10-19 | 1981-05-22 | Matsushita Electric Ind Co Ltd | Manufacture of thermal head |
GB2087147B (en) * | 1980-11-06 | 1985-03-13 | Nat Res Dev | Methods of manufacturing semiconductor devices |
JPS60221562A (ja) * | 1984-04-17 | 1985-11-06 | Matsushita Electric Ind Co Ltd | 耐摩耗膜 |
JPS63113507A (ja) | 1986-10-31 | 1988-05-18 | Hitachi Ltd | 光導波路およびその製造法 |
JPH064309B2 (ja) | 1988-01-28 | 1994-01-19 | 日本板硝子株式会社 | 熱線反射透明板及びその製造方法 |
US5047131A (en) | 1989-11-08 | 1991-09-10 | The Boc Group, Inc. | Method for coating substrates with silicon based compounds |
JP2817287B2 (ja) * | 1989-11-30 | 1998-10-30 | 日本板硝子株式会社 | 透明物品 |
JP3028576B2 (ja) | 1990-09-21 | 2000-04-04 | 日本板硝子株式会社 | 熱線遮蔽ガラス |
JPH04260637A (ja) | 1991-02-12 | 1992-09-16 | Central Glass Co Ltd | SiCNO系薄膜被覆ガラスおよびその製法 |
JP2973762B2 (ja) * | 1993-01-18 | 1999-11-08 | 住友金属工業株式会社 | 半導体製造用炭化珪素焼結体の製造方法 |
US5364571A (en) * | 1993-02-17 | 1994-11-15 | Avco Corporation | Method of making a composite material |
SE502227C2 (sv) | 1993-12-30 | 1995-09-18 | Sintercast Ab | Förfarande för kontinuerligt tillhandahållande av förbehandlat smält järn för gjutning av föremål av kompaktgrafitjärn |
JPH07211700A (ja) * | 1994-01-24 | 1995-08-11 | Sumitomo Metal Ind Ltd | プラズマ発生装置用電極及びその製造方法 |
JPH08208336A (ja) * | 1995-02-03 | 1996-08-13 | Ngk Insulators Ltd | 耐酸化性及び耐クリープ性を備えたSi−SiC質焼結体 |
DE69633823T2 (de) * | 1995-05-18 | 2005-10-27 | Asahi Glass Co., Ltd. | Verfahren zur herstellung eines sputtertargets |
JP4012287B2 (ja) | 1997-08-27 | 2007-11-21 | 株式会社ブリヂストン | スパッタリングターゲット盤 |
JP4178339B2 (ja) | 1998-09-28 | 2008-11-12 | 株式会社ブリヂストン | スパッタ積層膜の作製方法 |
JP2000264762A (ja) * | 1999-03-12 | 2000-09-26 | Tokai Konetsu Kogyo Co Ltd | 耐酸化性SiC−Si複合材の製造方法 |
US6129742A (en) * | 1999-03-31 | 2000-10-10 | Medtronic, Inc. | Thin film resistor for use in medical devices and method of making same |
-
2000
- 2000-10-12 JP JP2001529474A patent/JP4733890B2/ja not_active Expired - Lifetime
- 2000-10-12 AT AT00966446T patent/ATE383456T1/de not_active IP Right Cessation
- 2000-10-12 WO PCT/JP2000/007088 patent/WO2001027345A1/ja active IP Right Grant
- 2000-10-12 EP EP00966446A patent/EP1251188B1/de not_active Expired - Lifetime
- 2000-10-12 DE DE60037753T patent/DE60037753T2/de not_active Expired - Lifetime
-
2002
- 2002-04-15 US US10/121,695 patent/US6800182B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE60037753T2 (de) | 2009-01-15 |
JP4733890B2 (ja) | 2011-07-27 |
EP1251188A4 (de) | 2005-05-04 |
WO2001027345A1 (fr) | 2001-04-19 |
US6800182B2 (en) | 2004-10-05 |
US20020117785A1 (en) | 2002-08-29 |
ATE383456T1 (de) | 2008-01-15 |
EP1251188A1 (de) | 2002-10-23 |
EP1251188B1 (de) | 2008-01-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8381 | Inventor (new situation) |
Inventor name: MITSUI, AKIRA, YOKOHAMA-SHI, KANAGAWA, JP Inventor name: UEDA, HIROSHI, TAKASAGO-SHI, HYOGO, JP Inventor name: KANDA, KOUICHI, TAKASAGO-SHI, HYOGO, JP Inventor name: NAKAGAMA, SUSUMU, TSU-SHI, MIE, JP |
|
8364 | No opposition during term of opposition |