DE60037287D1 - Piezoelektrisches/elektrostriktives Bauelement und Verfahren zu seiner Herstellung - Google Patents

Piezoelektrisches/elektrostriktives Bauelement und Verfahren zu seiner Herstellung

Info

Publication number
DE60037287D1
DE60037287D1 DE60037287T DE60037287T DE60037287D1 DE 60037287 D1 DE60037287 D1 DE 60037287D1 DE 60037287 T DE60037287 T DE 60037287T DE 60037287 T DE60037287 T DE 60037287T DE 60037287 D1 DE60037287 D1 DE 60037287D1
Authority
DE
Germany
Prior art keywords
piezoelectric
production
electrostrictive device
electrostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60037287T
Other languages
English (en)
Inventor
Yukihisa Takeuchi
Tsutomu Nanataki
Koji Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE60037287D1 publication Critical patent/DE60037287D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/4957—Sound device making
    • Y10T29/49574—Musical instrument or tuning fork making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49789—Obtaining plural product pieces from unitary workpiece

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE60037287T 1999-10-01 2000-09-29 Piezoelektrisches/elektrostriktives Bauelement und Verfahren zu seiner Herstellung Expired - Lifetime DE60037287D1 (de)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP28152299 1999-10-01
JP30784499 1999-10-28
JP32619599 1999-11-16
JP37196799 1999-12-27
JP2000013576 2000-01-21
JP2000015123 2000-01-24
JP2000056434 2000-03-01
JP2000133004A JP3436727B2 (ja) 1999-10-01 2000-05-01 圧電／電歪デバイス及びその製造方法

Publications (1)

Publication Number Publication Date
DE60037287D1 true DE60037287D1 (de) 2008-01-10

Family

ID=27573596

Family Applications (2)

Application Number Title Priority Date Filing Date
DE60037287T Expired - Lifetime DE60037287D1 (de) 1999-10-01 2000-09-29 Piezoelektrisches/elektrostriktives Bauelement und Verfahren zu seiner Herstellung
DE60035244T Expired - Lifetime DE60035244D1 (de) 1999-10-01 2000-09-29 Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE60035244T Expired - Lifetime DE60035244D1 (de) 1999-10-01 2000-09-29 Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren

Country Status (4)

Country Link
US (2) US6538362B1 (de)
EP (2) EP1089358B1 (de)
JP (1) JP3436727B2 (de)
DE (2) DE60037287D1 (de)

Families Citing this family (22)

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Publication number Priority date Publication date Assignee Title
WO2001026168A1 (fr) 1999-10-01 2001-04-12 Ngk Insulators, Ltd. Dispositif piezo-electrique / electrostrictif
JP3845544B2 (ja) 1999-10-01 2006-11-15 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP4058223B2 (ja) * 1999-10-01 2008-03-05 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP3845543B2 (ja) * 1999-10-01 2006-11-15 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
US6525448B1 (en) 1999-10-01 2003-02-25 Ngk Insulators Ltd Piezoelectric/electrostrictive device
US7164221B1 (en) 1999-10-01 2007-01-16 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of manufacturing same
US6534899B1 (en) 1999-10-01 2003-03-18 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of manufacturing same
US6915547B2 (en) 1999-10-01 2005-07-12 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of manufacturing same
JP3436727B2 (ja) * 1999-10-01 2003-08-18 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
US6404109B1 (en) 1999-10-01 2002-06-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device having increased strength
JP3436735B2 (ja) 1999-10-01 2003-08-18 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP4015820B2 (ja) 2001-04-11 2007-11-28 日本碍子株式会社 配線基板及びその製造方法
WO2005104257A1 (en) 2004-04-23 2005-11-03 Agency For Science, Technology And Research Micro-electromechanical device
US8085508B2 (en) * 2008-03-28 2011-12-27 Hitachi Global Storage Technologies Netherlands B.V. System, method and apparatus for flexure-integrated microactuator
WO2011148969A1 (ja) * 2010-05-26 2011-12-01 日本碍子株式会社 圧電素子の製造方法
US9117468B1 (en) 2013-03-18 2015-08-25 Magnecomp Corporation Hard drive suspension microactuator with restraining layer for control of bending
US9330698B1 (en) 2013-03-18 2016-05-03 Magnecomp Corporation DSA suspension having multi-layer PZT microactuator with active PZT constraining layers
US11205449B2 (en) 2013-03-18 2021-12-21 Magnecomp Corporation Multi-layer PZT microacuator with active PZT constraining layers for a DSA suspension
US9741376B1 (en) 2013-03-18 2017-08-22 Magnecomp Corporation Multi-layer PZT microactuator having a poled but inactive PZT constraining layer
US10607642B2 (en) 2013-03-18 2020-03-31 Magnecomp Corporation Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension
JPWO2015093356A1 (ja) * 2013-12-17 2017-03-16 株式会社村田製作所 圧電センサの製造方法
US10128431B1 (en) 2015-06-20 2018-11-13 Magnecomp Corporation Method of manufacturing a multi-layer PZT microactuator using wafer-level processing

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US4523120A (en) 1984-06-04 1985-06-11 The United States Of America As Represented By The Secretary Of The Navy Precise bearing support ditherer with piezoelectric drive means
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JPH02119278A (ja) 1988-10-28 1990-05-07 Ricoh Co Ltd バイモルフ型圧電アクチユエータ
JPH0725411B2 (ja) * 1988-12-22 1995-03-22 リオン株式会社 振動式部品供給装置
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US5302880A (en) * 1992-05-20 1994-04-12 Murata Manufacturing Co., Ltd. Piezoelectric tuning fork resonator and method of manufacturing the same
US5525853A (en) * 1993-01-21 1996-06-11 Trw Inc. Smart structures for vibration suppression
US6049158A (en) 1994-02-14 2000-04-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same
JP3162584B2 (ja) * 1994-02-14 2001-05-08 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
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JPH1151959A (ja) * 1997-08-06 1999-02-26 Murata Mfg Co Ltd 圧電振動子
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JPH11344341A (ja) 1998-05-29 1999-12-14 Tokai Rika Co Ltd 平行平板型振動ジャイロ及び平行平板型振動ジャイロ装置
JP2000002539A (ja) 1998-06-15 2000-01-07 Tokai Rika Co Ltd 平行平板型振動ジャイロ及び平行平板型振動ジャイロ装置
US6335586B1 (en) * 1998-12-28 2002-01-01 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and production method thereof
JP2001169572A (ja) * 1998-12-28 2001-06-22 Ngk Insulators Ltd 圧電／電歪デバイスおよびその製造方法
JP4058223B2 (ja) * 1999-10-01 2008-03-05 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP3845543B2 (ja) * 1999-10-01 2006-11-15 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP3436735B2 (ja) * 1999-10-01 2003-08-18 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP3436727B2 (ja) * 1999-10-01 2003-08-18 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP3466550B2 (ja) * 1999-10-01 2003-11-10 日本碍子株式会社 圧電／電歪デバイス
JP3851485B2 (ja) * 1999-10-01 2006-11-29 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP3845544B2 (ja) * 1999-10-01 2006-11-15 日本碍子株式会社 圧電／電歪デバイス及びその製造方法

Also Published As

Publication number Publication date
EP1089358B1 (de) 2007-06-20
EP1638153A3 (de) 2006-04-19
EP1638153A2 (de) 2006-03-22
JP2001320101A (ja) 2001-11-16
DE60035244D1 (de) 2007-08-02
EP1089358A3 (de) 2004-10-20
US6538362B1 (en) 2003-03-25
EP1638153B1 (de) 2007-11-28
JP3436727B2 (ja) 2003-08-18
US6643902B2 (en) 2003-11-11
US20020057041A1 (en) 2002-05-16
EP1089358A2 (de) 2001-04-04

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Legal Events

Date Code Title Description
8332 No legal effect for de