DE60035648D1 - Verfahren zur Säuberung einer Vorrichtung zum Herstellen von Dünnfilm-Silizium - Google Patents
Verfahren zur Säuberung einer Vorrichtung zum Herstellen von Dünnfilm-SiliziumInfo
- Publication number
- DE60035648D1 DE60035648D1 DE60035648T DE60035648T DE60035648D1 DE 60035648 D1 DE60035648 D1 DE 60035648D1 DE 60035648 T DE60035648 T DE 60035648T DE 60035648 T DE60035648 T DE 60035648T DE 60035648 D1 DE60035648 D1 DE 60035648D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor layer
- forming
- film
- cleaning
- conductivity type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000004140 cleaning Methods 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
- 239000004065 semiconductor Substances 0.000 abstract 8
- 239000000758 substrate Substances 0.000 abstract 3
- 238000004519 manufacturing process Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
- H01L21/02576—N-type
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
- H01L21/02579—P-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/202—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/206—Particular processes or apparatus for continuous treatment of the devices, e.g. roll-to roll processes, multi-chamber deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S134/00—Cleaning and liquid contact with solids
- Y10S134/902—Semiconductor wafer
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electromagnetism (AREA)
- Photovoltaic Devices (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23400999 | 1999-08-20 | ||
JP11234010A JP2001060554A (ja) | 1999-08-20 | 1999-08-20 | 半導体装置の製造方法及び製造装置 |
JP11234009A JP2001060705A (ja) | 1999-08-20 | 1999-08-20 | 半導体装置の製造方法及び製造装置 |
JP23401099 | 1999-08-20 | ||
JP28533499A JP4615649B2 (ja) | 1999-10-06 | 1999-10-06 | 半導体成膜装置の洗浄方法及び洗浄装置 |
JP28533499 | 1999-10-06 | ||
JP29397599 | 1999-10-15 | ||
JP29397599A JP2001119049A (ja) | 1999-10-15 | 1999-10-15 | 光電変換装置の製造方法および製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60035648D1 true DE60035648D1 (de) | 2007-09-06 |
DE60035648T2 DE60035648T2 (de) | 2008-05-21 |
Family
ID=27477562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60035648T Expired - Lifetime DE60035648T2 (de) | 1999-08-20 | 2000-03-22 | Verfahren zur Säuberung einer Vorrichtung zum Herstellen von Dünnfilm-Silizium |
Country Status (6)
Country | Link |
---|---|
US (1) | US6461444B1 (de) |
EP (1) | EP1079422B1 (de) |
AT (1) | ATE368297T1 (de) |
AU (1) | AU767161B2 (de) |
DE (1) | DE60035648T2 (de) |
ES (1) | ES2289980T3 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE60044762D1 (de) * | 1999-05-20 | 2010-09-16 | Kaneka Corp | Verfahren und Vorrichtung zur Herstellung eines Halbleiterbauelements |
US6616512B2 (en) * | 2000-07-28 | 2003-09-09 | Ebara Corporation | Substrate cleaning apparatus and substrate polishing apparatus with substrate cleaning apparatus |
JP4100466B2 (ja) * | 2000-12-25 | 2008-06-11 | 東京エレクトロン株式会社 | 液処理装置 |
JP3970815B2 (ja) * | 2002-11-12 | 2007-09-05 | シャープ株式会社 | 半導体素子製造装置 |
JP2006169576A (ja) * | 2004-12-15 | 2006-06-29 | Cyg Gijutsu Kenkyusho Kk | 真空装置 |
CN101336467B (zh) * | 2005-11-25 | 2010-05-26 | 夏普株式会社 | 等离子体加工装置和等离子体加工方法 |
US20090077804A1 (en) * | 2007-08-31 | 2009-03-26 | Applied Materials, Inc. | Production line module for forming multiple sized photovoltaic devices |
US20100047954A1 (en) * | 2007-08-31 | 2010-02-25 | Su Tzay-Fa Jeff | Photovoltaic production line |
US7905963B2 (en) * | 2008-11-28 | 2011-03-15 | Mitsubishi Materials Corporation | Apparatus and method for washing polycrystalline silicon |
US20110033638A1 (en) * | 2009-08-10 | 2011-02-10 | Applied Materials, Inc. | Method and apparatus for deposition on large area substrates having reduced gas usage |
KR101127428B1 (ko) | 2010-02-01 | 2012-03-22 | 주식회사 인라인메카닉스 | 태양광 모듈 생산 설비용 트랜스퍼링 시스템 |
CN103443326B (zh) * | 2011-03-25 | 2016-05-04 | Lg电子株式会社 | 等离子体增强式化学气相沉积设备及其控制方法 |
WO2012134084A2 (en) * | 2011-03-25 | 2012-10-04 | Lg Electronics Inc. | Plasma enhanced chemical vapor deposition apparatus and method for controlling the same |
CN110998869B (zh) * | 2017-08-09 | 2022-12-27 | 株式会社钟化 | 光电转换元件的制造方法 |
KR20200086582A (ko) * | 2019-01-09 | 2020-07-17 | 삼성전자주식회사 | 원자층 증착 장치 및 이를 이용한 박막 형성 방법 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6043819A (ja) | 1983-08-19 | 1985-03-08 | Semiconductor Energy Lab Co Ltd | 気相反応方法 |
AU570309B2 (en) * | 1984-03-26 | 1988-03-10 | Unisearch Limited | Buried contact solar cell |
JPH0719906B2 (ja) | 1984-07-23 | 1995-03-06 | 新技術開発事業団 | 半導体装置の製造方法 |
US5258077A (en) * | 1991-09-13 | 1993-11-02 | Solec International, Inc. | High efficiency silicon solar cells and method of fabrication |
US5429685A (en) * | 1992-11-16 | 1995-07-04 | Canon Kabushiki Kaisha | Photoelectric conversion element and power generation system using the same |
JP3070309B2 (ja) | 1992-12-07 | 2000-07-31 | 富士電機株式会社 | 薄膜太陽電池の製造方法 |
JP2695585B2 (ja) * | 1992-12-28 | 1997-12-24 | キヤノン株式会社 | 光起電力素子及びその製造方法、並びにそれを用いた発電装置 |
US5616208A (en) * | 1993-09-17 | 1997-04-01 | Tokyo Electron Limited | Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus |
US5824566A (en) * | 1995-09-26 | 1998-10-20 | Canon Kabushiki Kaisha | Method of producing a photovoltaic device |
US5817534A (en) * | 1995-12-04 | 1998-10-06 | Applied Materials, Inc. | RF plasma reactor with cleaning electrode for cleaning during processing of semiconductor wafers |
US5756400A (en) * | 1995-12-08 | 1998-05-26 | Applied Materials, Inc. | Method and apparatus for cleaning by-products from plasma chamber surfaces |
US6159763A (en) * | 1996-09-12 | 2000-12-12 | Canon Kabushiki Kaisha | Method and device for forming semiconductor thin film, and method and device for forming photovoltaic element |
JP3772456B2 (ja) * | 1997-04-23 | 2006-05-10 | 三菱電機株式会社 | 太陽電池及びその製造方法、半導体製造装置 |
US6238808B1 (en) * | 1998-01-23 | 2001-05-29 | Canon Kabushiki Kaisha | Substrate with zinc oxide layer, method for producing zinc oxide layer, photovoltaic device, and method for producing photovoltaic device |
JPH11274282A (ja) * | 1998-03-23 | 1999-10-08 | Toshiba Corp | 基板収納容器、基板収納容器清浄化装置、基板収納容器清浄化方法および基板処理装置 |
EP0977246A3 (de) * | 1998-07-31 | 2005-11-09 | Canon Kabushiki Kaisha | Herstellungsverfahren einer Halbleiterschicht und einer photovoltaischen Zelle und Vorrichtung zur Herstellung einer Halbleiterschicht |
-
2000
- 2000-03-21 US US09/531,933 patent/US6461444B1/en not_active Expired - Lifetime
- 2000-03-21 AU AU22441/00A patent/AU767161B2/en not_active Ceased
- 2000-03-22 ES ES00106258T patent/ES2289980T3/es not_active Expired - Lifetime
- 2000-03-22 EP EP00106258A patent/EP1079422B1/de not_active Expired - Lifetime
- 2000-03-22 DE DE60035648T patent/DE60035648T2/de not_active Expired - Lifetime
- 2000-03-22 AT AT00106258T patent/ATE368297T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
ES2289980T3 (es) | 2008-02-16 |
ATE368297T1 (de) | 2007-08-15 |
EP1079422A2 (de) | 2001-02-28 |
AU767161B2 (en) | 2003-10-30 |
EP1079422A3 (de) | 2004-01-02 |
US6461444B1 (en) | 2002-10-08 |
AU2244100A (en) | 2001-02-22 |
DE60035648T2 (de) | 2008-05-21 |
EP1079422B1 (de) | 2007-07-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |