DE4137060C2 - Mikroküvette für die Infrarotspektroskopie - Google Patents

Mikroküvette für die Infrarotspektroskopie

Info

Publication number
DE4137060C2
DE4137060C2 DE4137060A DE4137060A DE4137060C2 DE 4137060 C2 DE4137060 C2 DE 4137060C2 DE 4137060 A DE4137060 A DE 4137060A DE 4137060 A DE4137060 A DE 4137060A DE 4137060 C2 DE4137060 C2 DE 4137060C2
Authority
DE
Germany
Prior art keywords
cuvette
silicon
silicon dioxide
silicon wafer
dioxide layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE4137060A
Other languages
German (de)
English (en)
Other versions
DE4137060A1 (de
Inventor
Armin Dipl Phys Klumpp
Erwin Dipl Ing Hacker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority to DE4137060A priority Critical patent/DE4137060C2/de
Priority to NL9201933A priority patent/NL9201933A/nl
Priority to FR9213474A priority patent/FR2683631A1/fr
Priority to GB9223607A priority patent/GB2261285B/en
Publication of DE4137060A1 publication Critical patent/DE4137060A1/de
Application granted granted Critical
Publication of DE4137060C2 publication Critical patent/DE4137060C2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/0303—Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3577—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing liquids, e.g. polluted water
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N2021/0346—Capillary cells; Microcells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Measuring Cells (AREA)
DE4137060A 1991-11-11 1991-11-11 Mikroküvette für die Infrarotspektroskopie Expired - Fee Related DE4137060C2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE4137060A DE4137060C2 (de) 1991-11-11 1991-11-11 Mikroküvette für die Infrarotspektroskopie
NL9201933A NL9201933A (nl) 1991-11-11 1992-11-05 Microcuvet voor infraroodspectroscopie.
FR9213474A FR2683631A1 (fr) 1991-11-11 1992-11-09 Microcuvette pour spectroscopie a infrarouges.
GB9223607A GB2261285B (en) 1991-11-11 1992-11-11 Microcuvette for infrared spectroscopy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4137060A DE4137060C2 (de) 1991-11-11 1991-11-11 Mikroküvette für die Infrarotspektroskopie

Publications (2)

Publication Number Publication Date
DE4137060A1 DE4137060A1 (de) 1993-05-13
DE4137060C2 true DE4137060C2 (de) 1993-10-14

Family

ID=6444540

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4137060A Expired - Fee Related DE4137060C2 (de) 1991-11-11 1991-11-11 Mikroküvette für die Infrarotspektroskopie

Country Status (4)

Country Link
DE (1) DE4137060C2 (enExample)
FR (1) FR2683631A1 (enExample)
GB (1) GB2261285B (enExample)
NL (1) NL9201933A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004008685A1 (de) * 2004-02-21 2005-09-29 Roche Diagnostics Gmbh Transmissionsspektrometer zur Untersuchung einer flüssigen Probe
WO2011054412A1 (de) 2009-10-27 2011-05-12 Hydac Electronic Gmbh Messzelle zur infrarot-analyse von fluiden, messsystem mit einer solchen messzelle und verfahren zur herstellung einer solchen messzelle

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9315508U1 (de) * 1993-10-13 1994-03-31 Palocz-Andresen, Michael, Dr.-Ing., 20459 Hamburg Infrarot-Absorptions-Gasanalysator mit getrennter optischer Küvette
WO1998022803A1 (de) 1996-11-18 1998-05-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische transmissionsmesszelle
DE19647644C2 (de) * 1996-11-18 1999-04-15 Fraunhofer Ges Forschung Mikromechanische Transmissionsmeßzelle
DE19738626C2 (de) * 1997-09-04 2001-02-08 Erhard Wendlandt Mikrodurchfluss- und Kulturküvette
DE19739126C1 (de) * 1997-09-06 1999-04-29 Karlsruhe Forschzent Dünnschichtzelle
GB9820776D0 (en) * 1998-09-25 1998-11-18 Ford Michael A Imrovements to infrarec cells
RU2177667C2 (ru) * 1998-12-03 2001-12-27 Российский Федеральный Ядерный Центр - Всероссийский Научно-Исследовательский Институт Экспериментальной Физики Кювета фототропного затвора для лазеров
DE10247020A1 (de) * 2002-10-09 2004-04-22 Micro-Biolytics Gmbh Dünnschichtzelle
DE10316723A1 (de) * 2003-04-09 2004-11-18 Siemens Ag Probenplatte zum Einbau in eine Gehäusestruktur
DE10321472B4 (de) * 2003-05-13 2005-05-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Fluidik-Modul, Verfahren zu seiner Herstellung und Verfahren zum Betreiben eines Fluidik-Moduls
DE10351160B3 (de) * 2003-11-03 2005-03-31 Roche Diagnostics Gmbh Durchfluß-Meßküvette und Transmissionsspektrometer zur Untersuchung biologischer Flüssigkeiten
US7355697B2 (en) 2004-08-26 2008-04-08 The United States Of America As Represented By The Department Of Health And Human Services Flow-through, thermal-expansion-compensated cell for light spectroscopy
US7894055B2 (en) 2004-08-26 2011-02-22 The United States Of America As Represented By The Department Of Health And Human Services Flow-through, inlet-gas-temperature-controlled, solvent-resistant, thermal-expansion compensated cell for light spectroscopy
DE102007019695B4 (de) * 2007-04-24 2009-08-13 Analytik Jena Ag Küvette für die optische Analyse kleiner Volumina
EP2457078A4 (en) * 2009-07-23 2014-07-30 Insight Nanofluidics Inc NANOFLUIDIC CELL
US9804086B2 (en) * 2014-11-13 2017-10-31 Emcee Electronics, Inc. Biodiesel detector
US9797830B2 (en) * 2014-11-13 2017-10-24 Emcee Electronics, Inc. Biodiesel detector
US10782225B2 (en) * 2017-06-22 2020-09-22 Horiba, Ltd. Optical measurement cell and particle properties measuring instrument using the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4037974A (en) * 1974-10-17 1977-07-26 Fletcher Taylor C Sample cell for spectrophotometers
JPS5638008A (en) * 1979-09-06 1981-04-13 Canon Inc Display cell
DE3024874A1 (de) * 1980-07-01 1982-02-04 Gernot Klaus Brück Verfahren zum bestrahlen einer messprobe unter dem brewsterwinkel
EP0347579B1 (de) * 1988-06-01 1994-03-30 Daimler-Benz Aerospace Aktiengesellschaft Vorrichtung mit Träger besonderer Struktur zur Aufnahme, Untersuchung und Behandlung von Proben
DE4004990C2 (de) * 1990-02-19 1998-04-09 Fisher Rosemount Gmbh & Co Ges Analysenküvette

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004008685A1 (de) * 2004-02-21 2005-09-29 Roche Diagnostics Gmbh Transmissionsspektrometer zur Untersuchung einer flüssigen Probe
WO2011054412A1 (de) 2009-10-27 2011-05-12 Hydac Electronic Gmbh Messzelle zur infrarot-analyse von fluiden, messsystem mit einer solchen messzelle und verfahren zur herstellung einer solchen messzelle
DE102009051853A1 (de) * 2009-10-27 2011-06-09 Hydac Electronic Gmbh Messzelle zur Infrarot-Analyse von Fluiden, Messsystem mit einer solchen Messzelle und Verfahren zur Herstellung einer solchen Messzelle
US8890075B2 (en) 2009-10-27 2014-11-18 Hydac Electronic Gmbh Measuring cell for the infrared analysis of fluids, measuring system having such a measuring cell, and method for producing such a measuring cell

Also Published As

Publication number Publication date
NL9201933A (nl) 1993-06-01
FR2683631A1 (fr) 1993-05-14
DE4137060A1 (de) 1993-05-13
GB9223607D0 (en) 1992-12-23
FR2683631B1 (enExample) 1995-03-10
GB2261285B (en) 1995-06-14
GB2261285A (en) 1993-05-12

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee