FR2683631A1 - Microcuvette pour spectroscopie a infrarouges. - Google Patents

Microcuvette pour spectroscopie a infrarouges. Download PDF

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Publication number
FR2683631A1
FR2683631A1 FR9213474A FR9213474A FR2683631A1 FR 2683631 A1 FR2683631 A1 FR 2683631A1 FR 9213474 A FR9213474 A FR 9213474A FR 9213474 A FR9213474 A FR 9213474A FR 2683631 A1 FR2683631 A1 FR 2683631A1
Authority
FR
France
Prior art keywords
layer
silicon
silicon dioxide
recess
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR9213474A
Other languages
English (en)
French (fr)
Other versions
FR2683631B1 (enExample
Inventor
Klumpp Arnim
Hacker Erwin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Publication of FR2683631A1 publication Critical patent/FR2683631A1/fr
Application granted granted Critical
Publication of FR2683631B1 publication Critical patent/FR2683631B1/fr
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N21/0303Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3577Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing liquids, e.g. polluted water
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N2021/0346Capillary cells; Microcells
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Measuring Cells (AREA)
FR9213474A 1991-11-11 1992-11-09 Microcuvette pour spectroscopie a infrarouges. Granted FR2683631A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4137060A DE4137060C2 (de) 1991-11-11 1991-11-11 Mikroküvette für die Infrarotspektroskopie

Publications (2)

Publication Number Publication Date
FR2683631A1 true FR2683631A1 (fr) 1993-05-14
FR2683631B1 FR2683631B1 (enExample) 1995-03-10

Family

ID=6444540

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9213474A Granted FR2683631A1 (fr) 1991-11-11 1992-11-09 Microcuvette pour spectroscopie a infrarouges.

Country Status (4)

Country Link
DE (1) DE4137060C2 (enExample)
FR (1) FR2683631A1 (enExample)
GB (1) GB2261285B (enExample)
NL (1) NL9201933A (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9315508U1 (de) * 1993-10-13 1994-03-31 Palocz-Andresen, Michael, Dr.-Ing., 20459 Hamburg Infrarot-Absorptions-Gasanalysator mit getrennter optischer Küvette
WO1998022803A1 (de) 1996-11-18 1998-05-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische transmissionsmesszelle
DE19647644C2 (de) * 1996-11-18 1999-04-15 Fraunhofer Ges Forschung Mikromechanische Transmissionsmeßzelle
DE19738626C2 (de) * 1997-09-04 2001-02-08 Erhard Wendlandt Mikrodurchfluss- und Kulturküvette
DE19739126C1 (de) * 1997-09-06 1999-04-29 Karlsruhe Forschzent Dünnschichtzelle
GB9820776D0 (en) * 1998-09-25 1998-11-18 Ford Michael A Imrovements to infrarec cells
RU2177667C2 (ru) * 1998-12-03 2001-12-27 Российский Федеральный Ядерный Центр - Всероссийский Научно-Исследовательский Институт Экспериментальной Физики Кювета фототропного затвора для лазеров
DE10247020A1 (de) * 2002-10-09 2004-04-22 Micro-Biolytics Gmbh Dünnschichtzelle
DE10316723A1 (de) * 2003-04-09 2004-11-18 Siemens Ag Probenplatte zum Einbau in eine Gehäusestruktur
DE10321472B4 (de) * 2003-05-13 2005-05-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Fluidik-Modul, Verfahren zu seiner Herstellung und Verfahren zum Betreiben eines Fluidik-Moduls
DE10351160B3 (de) * 2003-11-03 2005-03-31 Roche Diagnostics Gmbh Durchfluß-Meßküvette und Transmissionsspektrometer zur Untersuchung biologischer Flüssigkeiten
DE102004008685A1 (de) * 2004-02-21 2005-09-29 Roche Diagnostics Gmbh Transmissionsspektrometer zur Untersuchung einer flüssigen Probe
US7355697B2 (en) 2004-08-26 2008-04-08 The United States Of America As Represented By The Department Of Health And Human Services Flow-through, thermal-expansion-compensated cell for light spectroscopy
US7894055B2 (en) 2004-08-26 2011-02-22 The United States Of America As Represented By The Department Of Health And Human Services Flow-through, inlet-gas-temperature-controlled, solvent-resistant, thermal-expansion compensated cell for light spectroscopy
DE102007019695B4 (de) * 2007-04-24 2009-08-13 Analytik Jena Ag Küvette für die optische Analyse kleiner Volumina
EP2457078A4 (en) * 2009-07-23 2014-07-30 Insight Nanofluidics Inc NANOFLUIDIC CELL
DE102009051853A1 (de) 2009-10-27 2011-06-09 Hydac Electronic Gmbh Messzelle zur Infrarot-Analyse von Fluiden, Messsystem mit einer solchen Messzelle und Verfahren zur Herstellung einer solchen Messzelle
US9804086B2 (en) * 2014-11-13 2017-10-31 Emcee Electronics, Inc. Biodiesel detector
US9797830B2 (en) * 2014-11-13 2017-10-24 Emcee Electronics, Inc. Biodiesel detector
US10782225B2 (en) * 2017-06-22 2020-09-22 Horiba, Ltd. Optical measurement cell and particle properties measuring instrument using the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4037974A (en) * 1974-10-17 1977-07-26 Fletcher Taylor C Sample cell for spectrophotometers
JPS5638008A (en) * 1979-09-06 1981-04-13 Canon Inc Display cell
EP0347579A2 (de) * 1988-06-01 1989-12-27 Daimler-Benz Aerospace Aktiengesellschaft Vorrichtung mit Träger besonderer Struktur zur Aufnahme, Untersuchung und Behandlung von Proben

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3024874A1 (de) * 1980-07-01 1982-02-04 Gernot Klaus Brück Verfahren zum bestrahlen einer messprobe unter dem brewsterwinkel
DE4004990C2 (de) * 1990-02-19 1998-04-09 Fisher Rosemount Gmbh & Co Ges Analysenküvette

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4037974A (en) * 1974-10-17 1977-07-26 Fletcher Taylor C Sample cell for spectrophotometers
JPS5638008A (en) * 1979-09-06 1981-04-13 Canon Inc Display cell
EP0347579A2 (de) * 1988-06-01 1989-12-27 Daimler-Benz Aerospace Aktiengesellschaft Vorrichtung mit Träger besonderer Struktur zur Aufnahme, Untersuchung und Behandlung von Proben

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
E.F. RISSMANN: "THIN LIQUID INFRARED CELL FOR QUANTITATIVE STUDIES USING AQUEOUS SOLUTIONS", ANALYTICAL CHEMISTRY, vol. 44, no. 3, March 1972 (1972-03-01), COLUMBUS US, pages 644 - 646 *
EDWIN F. RISSMANN ET AL.: "AN INFRARED METHOD FOR RAPID ANALYSIS OF THE SULFATE CONTENT OF REACTED LIME AND LIMESTONE MATERIALS", ANALYTICAL CHEMISTRY, vol. 42, no. 13, November 1970 (1970-11-01), COLUMBUS US, pages 1628 - 1632 *
KURT E. PETERSEN: "SILICON AS A MECHANICAL MATERIAL", PROCEEDINGS OF THE IEEE, vol. 70, no. 5, May 1982 (1982-05-01), NEW YORK US, pages 420 - 457 *
PATENT ABSTRACTS OF JAPAN vol. 5, no. 92 (P - 066) 16 June 1981 (1981-06-16) *

Also Published As

Publication number Publication date
NL9201933A (nl) 1993-06-01
DE4137060C2 (de) 1993-10-14
DE4137060A1 (de) 1993-05-13
GB9223607D0 (en) 1992-12-23
FR2683631B1 (enExample) 1995-03-10
GB2261285B (en) 1995-06-14
GB2261285A (en) 1993-05-12

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