DE4107756A1 - Verfahren und vorrichtung zum aufwachsen einer duennen metallschicht - Google Patents

Verfahren und vorrichtung zum aufwachsen einer duennen metallschicht

Info

Publication number
DE4107756A1
DE4107756A1 DE4107756A DE4107756A DE4107756A1 DE 4107756 A1 DE4107756 A1 DE 4107756A1 DE 4107756 A DE4107756 A DE 4107756A DE 4107756 A DE4107756 A DE 4107756A DE 4107756 A1 DE4107756 A1 DE 4107756A1
Authority
DE
Germany
Prior art keywords
copper
substrate
raw material
gas
gas discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE4107756A
Other languages
German (de)
English (en)
Other versions
DE4107756C2 (enExample
Inventor
Nobuyoshi Awaya
Yoshinobu Arita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Publication of DE4107756A1 publication Critical patent/DE4107756A1/de
Application granted granted Critical
Publication of DE4107756C2 publication Critical patent/DE4107756C2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/4557—Heated nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • C23C16/4482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material by bubbling of carrier gas through liquid source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45565—Shower nozzles

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
DE4107756A 1990-03-09 1991-03-11 Verfahren und vorrichtung zum aufwachsen einer duennen metallschicht Granted DE4107756A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5658690 1990-03-09
JP27327490 1990-10-15

Publications (2)

Publication Number Publication Date
DE4107756A1 true DE4107756A1 (de) 1991-09-12
DE4107756C2 DE4107756C2 (enExample) 1992-10-01

Family

ID=26397539

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4107756A Granted DE4107756A1 (de) 1990-03-09 1991-03-11 Verfahren und vorrichtung zum aufwachsen einer duennen metallschicht

Country Status (3)

Country Link
US (2) US5316796A (enExample)
KR (1) KR940002439B1 (enExample)
DE (1) DE4107756A1 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0630988A1 (en) * 1993-05-18 1994-12-28 Air Products And Chemicals, Inc. Process for improved quality of CVD copper films
EP0799907A1 (en) * 1996-04-05 1997-10-08 Ebara Corporation Liquid material vaporizer apparatus and gas ejection device
EP0849375A3 (en) * 1996-11-20 1998-12-02 Ebara Corporation Liquid feed vaporization system and gas injection device
DE102007020852A1 (de) * 2007-05-02 2008-11-06 Stein, Ralf Gasversorgungssystem und Verfahren zur Bereitstellung eines gasförmigen Abscheidungsmediums
EP2777067A4 (en) * 2011-11-10 2016-03-30 Saint Gobain Cristaux Et Detecteurs SYSTEM FOR USE IN THE PRODUCTION OF SEMICONDUCTOR CRYSTAL MATERIALS

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5447568A (en) * 1991-12-26 1995-09-05 Canon Kabushiki Kaisha Chemical vapor deposition method and apparatus making use of liquid starting material
US6004885A (en) * 1991-12-26 1999-12-21 Canon Kabushiki Kaisha Thin film formation on semiconductor wafer
US6379466B1 (en) 1992-01-17 2002-04-30 Applied Materials, Inc. Temperature controlled gas distribution plate
FR2695944B1 (fr) * 1992-09-24 1994-11-18 Onera (Off Nat Aerospatiale) Appareil de dépôt chimique en phase vapeur activé par un plasma micro-ondes.
JPH07224385A (ja) * 1994-02-09 1995-08-22 Fujitsu Ltd 金属薄膜選択気相成長方法
FR2724185B1 (fr) * 1994-09-02 1998-12-11 Fujitsu Ltd Procede de depot chimique en phase vapeur de couches metalliques dans des zones selectives
US5653806A (en) * 1995-03-10 1997-08-05 Advanced Technology Materials, Inc. Showerhead-type discharge assembly for delivery of source reagent vapor to a substrate, and CVD process utilizing same
JP3983831B2 (ja) * 1995-05-30 2007-09-26 シグマメルテック株式会社 基板ベーキング装置及び基板ベーキング方法
US5741363A (en) * 1996-03-22 1998-04-21 Advanced Technology Materials, Inc. Interiorly partitioned vapor injector for delivery of source reagent vapor mixtures for chemical vapor deposition
WO1998010116A1 (en) * 1996-09-05 1998-03-12 Talison Research Ultrasonic nozzle feed for plasma deposited film networks
KR100256669B1 (ko) * 1997-12-23 2000-05-15 정선종 화학기상증착 장치 및 그를 이용한 구리 박막 형성 방법
US6179277B1 (en) 1998-02-27 2001-01-30 Applied Materials, Inc. Liquid vaporizer systems and methods for their use
JP3334605B2 (ja) 1998-05-07 2002-10-15 三菱電機株式会社 電極形成用ｃｖｄ原料、およびそれを用いて形成されたキャパシタ用電極、配線膜
US6358323B1 (en) * 1998-07-21 2002-03-19 Applied Materials, Inc. Method and apparatus for improved control of process and purge material in a substrate processing system
US6010749A (en) * 1998-10-28 2000-01-04 Goldman; Mark A. Process for the production of volatile metal
JP3065041B2 (ja) * 1998-10-29 2000-07-12 アプライド マテリアルズ インコーポレイテッド 半導体デバイスの成膜方法及び成膜装置
JP3093184B2 (ja) * 1998-10-29 2000-10-03 アプライド マテリアルズ インコーポレイテッド 成膜方法及び装置
JP3582437B2 (ja) * 1999-12-24 2004-10-27 株式会社村田製作所 薄膜製造方法及びそれに用いる薄膜製造装置
WO2001053007A1 (en) * 2000-01-21 2001-07-26 Midwest Research Institute Method for forming thin-film conductors through the decomposition of metal-chelates in association with metal particles
JP4567148B2 (ja) * 2000-06-23 2010-10-20 東京エレクトロン株式会社 薄膜形成装置
DE10119741B4 (de) * 2001-04-23 2012-01-19 Mattson Thermal Products Gmbh Verfahren und Vorrichtung zum Behandeln von Halbleitersubstraten
US6759344B2 (en) * 2002-01-29 2004-07-06 Asm Japan K.K. Method for forming low dielectric constant interlayer insulation film
JP3828821B2 (ja) * 2002-03-13 2006-10-04 株式会社堀場エステック 液体材料気化供給装置
US6653236B2 (en) * 2002-03-29 2003-11-25 Micron Technology, Inc. Methods of forming metal-containing films over surfaces of semiconductor substrates; and semiconductor constructions
US7341947B2 (en) * 2002-03-29 2008-03-11 Micron Technology, Inc. Methods of forming metal-containing films over surfaces of semiconductor substrates
US7030042B2 (en) * 2002-08-28 2006-04-18 Micron Technology, Inc. Systems and methods for forming tantalum oxide layers and tantalum precursor compounds
US6784049B2 (en) * 2002-08-28 2004-08-31 Micron Technology, Inc. Method for forming refractory metal oxide layers with tetramethyldisiloxane
US7713907B2 (en) * 2006-03-06 2010-05-11 Uchicago Argonne, Llc Method of preparing size-selected metal clusters
EP2007915A2 (en) * 2006-04-20 2008-12-31 Shell Erneuerbare Energien GmbH Thermal evaporation apparatus, use and method of depositing a material
JP2008031541A (ja) * 2006-07-31 2008-02-14 Tokyo Electron Ltd Ｃｖｄ成膜方法およびｃｖｄ成膜装置
US20090078202A1 (en) * 2007-09-26 2009-03-26 Neocera, Llc Substrate heater for material deposition
KR101336363B1 (ko) * 2009-01-29 2013-12-04 도쿄엘렉트론가부시키가이샤 성막 장치 및 가스 토출 부재
KR102057220B1 (ko) * 2013-02-19 2020-01-22 삼성전자주식회사 약액 공급기, 약액 공급기를 구비하는 기판 처리 장치 및 이를 이용한 기판의 처리방법
JP6905149B2 (ja) * 2019-02-14 2021-07-21 株式会社日立ハイテク 半導体製造装置
JP7540864B2 (ja) * 2020-06-15 2024-08-27 東京エレクトロン株式会社 シャワープレート及び成膜装置
CN112680712A (zh) * 2020-12-03 2021-04-20 无锡市邑晶半导体科技有限公司 一种基于原子层沉积技术制备纳米金颗粒薄膜的方法
CN112626500A (zh) * 2020-12-03 2021-04-09 无锡市邑晶半导体科技有限公司 一种基于等离子体增强原子层沉积技术制备纳米金颗粒薄膜的方法

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2576289A (en) * 1949-12-02 1951-11-27 Ohio Commw Eng Co Dynamic pyrolytic plating process
US2704728A (en) * 1951-10-08 1955-03-22 Ohio Commw Eng Co Gas plating metal objects with copper acetylacetonate
US2760261A (en) * 1952-04-17 1956-08-28 Ohio Commw Eng Co Method of bonding articles
US2833676A (en) * 1954-08-17 1958-05-06 Erie Resistor Corp Metal coated dielectrics and method for producing same
US3697342A (en) * 1970-12-16 1972-10-10 Ibm Method of selective chemical vapor deposition
EP0135179A1 (en) * 1983-09-16 1985-03-27 International Business Machines Corporation Process for depositing metallic copper
EP0297348A1 (en) * 1987-06-30 1989-01-04 International Business Machines Corporation Method for chemical vapor deposition of copper, silver, and gold using a cyclopentadienyl metal complex
US4842891A (en) * 1987-02-20 1989-06-27 Hitachi, Ltd. Method of forming a copper film by chemical vapor deposition
DE3916622A1 (de) * 1988-05-23 1989-11-30 Nippon Telegraph & Telephone Verfahren zum zuechten einer sehr duennen metallschicht und vorrichtung hierfuer

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US3356527A (en) * 1964-04-23 1967-12-05 Ross W Moshier Vapor-plating metals from fluorocarbon keto metal compounds
US4325987A (en) * 1979-07-31 1982-04-20 Societa Italiana Vetro-Siv-S.P.A. Process for the production of an electrically conducting article
GB2195663B (en) * 1986-08-15 1990-08-22 Nippon Telegraph & Telephone Chemical vapour deposition method and apparatus therefor
US5098516A (en) * 1990-12-31 1992-03-24 Air Products And Chemicals, Inc. Processes for the chemical vapor deposition of copper and etching of copper

Patent Citations (9)

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Publication number Priority date Publication date Assignee Title
US2576289A (en) * 1949-12-02 1951-11-27 Ohio Commw Eng Co Dynamic pyrolytic plating process
US2704728A (en) * 1951-10-08 1955-03-22 Ohio Commw Eng Co Gas plating metal objects with copper acetylacetonate
US2760261A (en) * 1952-04-17 1956-08-28 Ohio Commw Eng Co Method of bonding articles
US2833676A (en) * 1954-08-17 1958-05-06 Erie Resistor Corp Metal coated dielectrics and method for producing same
US3697342A (en) * 1970-12-16 1972-10-10 Ibm Method of selective chemical vapor deposition
EP0135179A1 (en) * 1983-09-16 1985-03-27 International Business Machines Corporation Process for depositing metallic copper
US4842891A (en) * 1987-02-20 1989-06-27 Hitachi, Ltd. Method of forming a copper film by chemical vapor deposition
EP0297348A1 (en) * 1987-06-30 1989-01-04 International Business Machines Corporation Method for chemical vapor deposition of copper, silver, and gold using a cyclopentadienyl metal complex
DE3916622A1 (de) * 1988-05-23 1989-11-30 Nippon Telegraph & Telephone Verfahren zum zuechten einer sehr duennen metallschicht und vorrichtung hierfuer

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US-Z.: Appl. Phys. A45(1988), S. 151 *
US-Z.: Appl. Phys. Letters 46(1), 1985, S. 97 *
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US-Z.: J.Vac. Sci. Technol. A4(6), 19876, S. 2452 *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0630988A1 (en) * 1993-05-18 1994-12-28 Air Products And Chemicals, Inc. Process for improved quality of CVD copper films
EP0799907A1 (en) * 1996-04-05 1997-10-08 Ebara Corporation Liquid material vaporizer apparatus and gas ejection device
US6036783A (en) * 1996-04-05 2000-03-14 Ebara Corporation Liquid material vaporizer apparatus and gas ejection device
EP0849375A3 (en) * 1996-11-20 1998-12-02 Ebara Corporation Liquid feed vaporization system and gas injection device
US6195504B1 (en) 1996-11-20 2001-02-27 Ebara Corporation Liquid feed vaporization system and gas injection device
US6269221B1 (en) 1996-11-20 2001-07-31 Ebara Corporation Liquid feed vaporization system and gas injection device
US6282368B1 (en) 1996-11-20 2001-08-28 Ebara Corporation Liquid feed vaporization system and gas injection device
DE102007020852A1 (de) * 2007-05-02 2008-11-06 Stein, Ralf Gasversorgungssystem und Verfahren zur Bereitstellung eines gasförmigen Abscheidungsmediums
EP2777067A4 (en) * 2011-11-10 2016-03-30 Saint Gobain Cristaux Et Detecteurs SYSTEM FOR USE IN THE PRODUCTION OF SEMICONDUCTOR CRYSTAL MATERIALS

Also Published As

Publication number Publication date
DE4107756C2 (enExample) 1992-10-01
US5462014A (en) 1995-10-31
US5316796A (en) 1994-05-31
KR940002439B1 (ko) 1994-03-24

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Free format text: TAUCHNER, P., DIPL.-CHEM. DR.RER.NAT. HEUNEMANN, D., DIPL.-PHYS. DR.RER.NAT. RAUH, P., DIPL.-CHEM. DR.RER.NAT. HERMANN, G., DIPL.-PHYS. DR.RER.NAT. SCHMIDT, J., DIPL.-ING. JAENICHEN, H., DIPL.-BIOL. DR.RER.NAT., PAT.-ANWAELTE TREMMEL, H., RECHTSANW., 8000 MUENCHEN

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