DE3872430D1 - Verfahren zur herstellung einer schicht aus supraleitendem material. - Google Patents

Verfahren zur herstellung einer schicht aus supraleitendem material.

Info

Publication number
DE3872430D1
DE3872430D1 DE8888303002T DE3872430T DE3872430D1 DE 3872430 D1 DE3872430 D1 DE 3872430D1 DE 8888303002 T DE8888303002 T DE 8888303002T DE 3872430 T DE3872430 T DE 3872430T DE 3872430 D1 DE3872430 D1 DE 3872430D1
Authority
DE
Germany
Prior art keywords
supral
producing
layer
conducting material
conducting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888303002T
Other languages
English (en)
Inventor
Michal Edith Gross
Catherine Ellen Rice
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
American Telephone and Telegraph Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/126,448 external-priority patent/US5416063A/en
Application filed by American Telephone and Telegraph Co Inc filed Critical American Telephone and Telegraph Co Inc
Application granted granted Critical
Publication of DE3872430D1 publication Critical patent/DE3872430D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00Coating not provided for in groups C23C2/00 - C23C24/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0324Processes for depositing or forming copper oxide superconductor layers from a solution
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0576Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0576Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
    • H10N60/0604Monocrystalline substrates, e.g. epitaxial growth
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661Processes performed after copper oxide formation, e.g. patterning
    • H10N60/0688Etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
DE8888303002T 1987-04-10 1988-04-05 Verfahren zur herstellung einer schicht aus supraleitendem material. Expired - Lifetime DE3872430D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US3726487A 1987-04-10 1987-04-10
US07/126,448 US5416063A (en) 1987-04-10 1987-11-30 Method of producing a layer of superconductive oxide

Publications (1)

Publication Number Publication Date
DE3872430D1 true DE3872430D1 (de) 1992-08-06

Family

ID=26713976

Family Applications (2)

Application Number Title Priority Date Filing Date
DE8888303002T Expired - Lifetime DE3872430D1 (de) 1987-04-10 1988-04-05 Verfahren zur herstellung einer schicht aus supraleitendem material.
DE8888303002T Expired - Lifetime DE3872430T2 (de) 1987-04-10 1988-04-05 Verfahren zur herstellung einer schicht aus supraleitendem material.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE8888303002T Expired - Lifetime DE3872430T2 (de) 1987-04-10 1988-04-05 Verfahren zur herstellung einer schicht aus supraleitendem material.

Country Status (6)

Country Link
EP (1) EP0287258B1 (de)
JP (1) JPH0829940B2 (de)
AU (1) AU591836B2 (de)
DE (2) DE3872430D1 (de)
DK (1) DK190888A (de)
HK (1) HK96193A (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3854977T3 (de) * 1987-03-14 2002-11-21 Sumitomo Electric Industries Verfahren zur Abscheidung eines supraleitenden dünnen Filmes
US5204318A (en) * 1987-03-27 1993-04-20 Massachusetts Institute Of Technology Preparation of superconducting oxides and oxide-metal composites
US5189009A (en) * 1987-03-27 1993-02-23 Massachusetts Institute Of Technology Preparation of superconducting oxides and oxide-metal composites
US4880770A (en) * 1987-05-04 1989-11-14 Eastman Kodak Company Metalorganic deposition process for preparing superconducting oxide films
US4994433A (en) * 1987-05-22 1991-02-19 Massachusetts Institute Of Technology Preparation of thin film superconducting oxides
FR2625614A1 (fr) * 1987-05-22 1989-07-07 Massachusetts Inst Technology Pellicules minces d'oxydes supraconducteurs
AU607219B2 (en) * 1987-05-29 1991-02-28 Toray Industries, Inc. Method of forming superconductive thin films and solutions for forming the same
US5041420A (en) * 1987-06-26 1991-08-20 Hewlett-Packard Company Method for making superconductor films from organometallic precursors
US4908346A (en) * 1987-07-01 1990-03-13 Eastman Kodak Company Crystalline rare earth alkaline earth copper oxide thick film circuit element with superconducting onset transition temperature in excess of 77%
US5149682A (en) * 1987-09-11 1992-09-22 W. R. Grace & Co. -Conn. Manufacturing method for superconducting ceramics and products thereof
GB2215548B (en) * 1988-02-26 1991-10-23 Gen Electric Co Plc A method of fabricating superconducting electronic devices
CA2029789A1 (en) * 1989-12-04 1991-06-05 Kenton D. Budd Flexible superconductor coated zirconia fibers
JPH07118012A (ja) * 1992-06-22 1995-05-09 Kokusai Chodendo Sangyo Gijutsu Kenkyu Center 酸化物超電導体およびその製造方法
JP5421561B2 (ja) 2008-08-20 2014-02-19 住友電気工業株式会社 酸化物超電導薄膜の製造方法
CN109554656B (zh) * 2018-12-13 2020-10-09 西安交通大学 一种常温大气氛围下致密陶瓷涂层的制备方法和系统

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US37264A (en) * 1862-12-23 Improvement in passenger-tickets
US4346131A (en) * 1979-08-10 1982-08-24 Westinghouse Electric Corp. Polymerized solutions for depositing optical oxide coatings
US4278632A (en) * 1980-02-08 1981-07-14 Westinghouse Electric Corp. Method of conforming clear vitreous gal of silica-titania material
US4286024A (en) * 1980-04-28 1981-08-25 Westinghouse Electric Corp. Transparent high temperature resistant aluminum silicon oxide monolithic member or coating
US4482644A (en) * 1983-04-18 1984-11-13 Exxon Research & Engineering Co. Oxygen-deficient, barium-containing perovskites
EP0277020B1 (de) * 1987-01-30 1995-04-19 Director-General of the Agency of Industrial Science and Technology Verfahren zur Herstellung eines supraleitenden Materials
JPH0664950B2 (ja) * 1987-03-18 1994-08-22 工業技術院長 酸化物超電導材の製造方法
JPS63239150A (ja) * 1987-03-27 1988-10-05 Sumitomo Electric Ind Ltd 超電導セラミツクス薄膜の製造方法
JPS63250881A (ja) * 1987-04-07 1988-10-18 Semiconductor Energy Lab Co Ltd 超電導体の作製方法
JPH0710008B2 (ja) * 1987-05-26 1995-02-01 理化学研究所 超伝導体薄膜の形成法
JPS6414825A (en) * 1987-07-09 1989-01-19 Mitsubishi Electric Corp Formation of fine electrical conductor layer pattern and device therefor
JPH01111713A (ja) * 1987-10-23 1989-04-28 Tanaka Kikinzoku Kogyo Kk 超電導体インク
JPH0453817A (ja) * 1990-06-20 1992-02-21 Dainippon Ink & Chem Inc ロジン変性フェノール樹脂の製造方法
JPH0476323A (ja) * 1990-07-16 1992-03-11 Matsushita Seiko Co Ltd 空気調和機の露受皿
JPH0476324A (ja) * 1990-07-17 1992-03-11 Matsushita Electric Ind Co Ltd 空気調和装置

Also Published As

Publication number Publication date
DK190888A (da) 1988-10-11
JPH0829940B2 (ja) 1996-03-27
EP0287258A1 (de) 1988-10-19
EP0287258B1 (de) 1992-07-01
AU591836B2 (en) 1989-12-14
HK96193A (en) 1993-09-24
AU1435788A (en) 1988-11-03
DK190888D0 (da) 1988-04-08
DE3872430T2 (de) 1992-12-03
JPS6448325A (en) 1989-02-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: BLUMBACH, KRAMER & PARTNER, 65193 WIESBADEN