DE3867299D1 - Kartusche aus verbundmaterial fuer einkristall-produktions-vorrichtung. - Google Patents
Kartusche aus verbundmaterial fuer einkristall-produktions-vorrichtung.Info
- Publication number
- DE3867299D1 DE3867299D1 DE8888401031T DE3867299T DE3867299D1 DE 3867299 D1 DE3867299 D1 DE 3867299D1 DE 8888401031 T DE8888401031 T DE 8888401031T DE 3867299 T DE3867299 T DE 3867299T DE 3867299 D1 DE3867299 D1 DE 3867299D1
- Authority
- DE
- Germany
- Prior art keywords
- composite material
- single crystal
- production device
- material cartridge
- crystal production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/002—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8705942A FR2614321A1 (fr) | 1987-04-27 | 1987-04-27 | Cartouche en materiaux composites pour dispositif d'elaboration de monocristaux. |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3867299D1 true DE3867299D1 (de) | 1992-02-13 |
Family
ID=9350523
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8888401031T Expired - Lifetime DE3867299D1 (de) | 1987-04-27 | 1988-04-27 | Kartusche aus verbundmaterial fuer einkristall-produktions-vorrichtung. |
Country Status (8)
Country | Link |
---|---|
US (1) | US5132145A (de) |
EP (1) | EP0290322B1 (de) |
JP (1) | JP2740513B2 (de) |
AT (1) | ATE71159T1 (de) |
DE (1) | DE3867299D1 (de) |
ES (1) | ES2029046T3 (de) |
FR (1) | FR2614321A1 (de) |
IE (1) | IE61689B1 (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05509132A (ja) * | 1990-05-18 | 1993-12-16 | ヒトコ カーボン コンポジッツ インコーポレイテッド | 化学蒸着法のための素材 |
US5306565A (en) * | 1990-09-18 | 1994-04-26 | Norton Company | High temperature ceramic composite |
DE69229007T2 (de) * | 1991-01-16 | 1999-10-21 | Sgl Carbon Composites Inc | Verbundwerkstoffe aus siliciumcarbidfaserarmiertem Kohlenstoff |
US5283109A (en) * | 1991-04-15 | 1994-02-01 | Ultramet | High temperature resistant structure |
US5294489A (en) * | 1992-04-02 | 1994-03-15 | General Electric Company | Protective coating with reactive interlayer on reinforcement in silicon carbide composite |
US6068925A (en) * | 1995-02-27 | 2000-05-30 | Sgl Carbon Composites | Corrosion resistant composites useful in chemical reactors |
US5858486A (en) * | 1995-02-27 | 1999-01-12 | Sgl Carbon Composites, Inc. | High purity carbon/carbon composite useful as a crucible susceptor |
US5683281A (en) * | 1995-02-27 | 1997-11-04 | Hitco Technologies, Inc | High purity composite useful as furnace components |
US5989504A (en) * | 1995-02-27 | 1999-11-23 | Sgl Carbon Composites | Chemical process employing corrosion resistant composites |
DE19625813A1 (de) * | 1996-06-28 | 1998-01-02 | Ecm Ingenieur Unternehmen Fuer | Vorrichtung zur Entnahme von fluiden Medien |
US5977636A (en) * | 1997-01-17 | 1999-11-02 | Micron Technology, Inc. | Method of forming an electrically conductive contact plug, method of forming a reactive or diffusion barrier layer over a substrate, integrated circuitry, and method of forming a layer of titanium boride |
US6588603B1 (en) * | 1997-08-01 | 2003-07-08 | Colony Incorporated | Bicycle rack |
JP4135239B2 (ja) * | 1997-12-26 | 2008-08-20 | 住友電気工業株式会社 | 半導体結晶およびその製造方法ならびに製造装置 |
US6572700B2 (en) | 1997-12-26 | 2003-06-03 | Sumitomo Electric Industries, Ltd. | Semiconductor crystal, and method and apparatus of production thereof |
US6395203B1 (en) | 1999-08-30 | 2002-05-28 | General Electric Company | Process for producing low impurity level ceramic |
JP4641600B2 (ja) * | 2000-09-07 | 2011-03-02 | 株式会社Ihiエアロスペース | 単結晶製造装置の宇宙実験用カートリッジ |
FR2828893B1 (fr) * | 2001-08-24 | 2003-12-05 | Commissariat Energie Atomique | Dispositif de compensation de volume dans une cartouche de solidification de deux charges liquides |
US20050064247A1 (en) * | 2003-06-25 | 2005-03-24 | Ajit Sane | Composite refractory metal carbide coating on a substrate and method for making thereof |
DE10357698A1 (de) * | 2003-12-09 | 2005-07-14 | Schunk Kohlenstofftechnik Gmbh | Träger für zu behandelnde Gegenstände sowie Verfahren zur Herstellung eines solchen |
KR101179486B1 (ko) * | 2004-12-20 | 2012-09-07 | 인덕터썸코포레이션 | 전기 유도 임피더 |
EP1811064A1 (de) * | 2006-01-12 | 2007-07-25 | Vesuvius Crucible Company | Tiegel zur Behandlung einer Siliciumschmelze |
JP5137362B2 (ja) * | 2006-09-12 | 2013-02-06 | イビデン株式会社 | 金属基材と無機材料表面層とからなる構造体 |
US8911824B2 (en) * | 2008-12-31 | 2014-12-16 | Zircoa, Inc. | Method of impregnating crucibles and refractory articles |
GB2479165A (en) * | 2009-10-14 | 2011-10-05 | Rec Wafer Norway As | Reusable crucible |
CN102859049B (zh) * | 2010-03-30 | 2016-01-20 | 瑞科斯太阳能源私人有限公司 | 制造半导体级硅晶锭的方法、可再使用的坩埚及其制造方法 |
DE102011052016A1 (de) * | 2011-07-21 | 2013-01-24 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Bausatz für einen Schmelztiegel, Schmelztiegel und Verfahren zur Herstellung eines Schmelztiegels |
CA2986916C (en) * | 2015-05-26 | 2023-10-17 | XDI Holdings, LLC | Plasma assisted, dirty water, direct steam generation system, apparatus and method |
WO2017220484A1 (en) * | 2016-06-24 | 2017-12-28 | Basf Se | Open vessels and their use |
CN116675522B (zh) * | 2023-04-20 | 2024-05-14 | 无锡市尚领石英科技有限公司 | 一种大尺寸石英坩埚及其制备方法 |
Family Cites Families (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3556893A (en) * | 1967-12-15 | 1971-01-19 | Union Carbide Corp | Fiber reinforced hot pressing molds |
JPS5338282B2 (de) * | 1973-12-19 | 1978-10-14 | ||
JPS5321390B2 (de) * | 1974-06-03 | 1978-07-03 | ||
JPS5833196B2 (ja) * | 1975-10-27 | 1983-07-18 | トウホクダイガクキンゾクザイリヨウケンキユウシヨチヨウ | タイネツセイセラミツクスフクゴウザイリヨウノセイゾウホウホウ |
JPS5848505B2 (ja) * | 1976-02-26 | 1983-10-28 | 東北大学金属材料研究所長 | 主としてsicよりなるシリコンカ−バイド成形体の製造方法 |
FR2345253A1 (fr) * | 1976-03-23 | 1977-10-21 | Radiotechnique Compelec | Creuset pour la fabrication d'un lingot de materiau cristallin |
US4099924A (en) * | 1977-03-16 | 1978-07-11 | Rca Corporation | Apparatus improvements for growing single crystalline silicon sheets |
JPS544895A (en) * | 1977-06-14 | 1979-01-13 | Kanebo Ltd | Production of impermeable carbon molded element |
US4373006A (en) * | 1979-08-09 | 1983-02-08 | United Technologies Corporation | Silicon carbide coated carbon fibers and composites |
US4657794A (en) * | 1980-01-16 | 1987-04-14 | Vereinigte Aluminium-Werke Aktiengeselschaft | Binderless ceramic or ceramic oxide hollow body and method for its manufacture |
US4341826A (en) * | 1980-02-13 | 1982-07-27 | United Technologies Corporation | Internal combustion engine and composite parts formed from silicon carbide fiber-reinforced ceramic or glass matrices |
US4396677A (en) * | 1980-10-24 | 1983-08-02 | Josef Intrater | Metal, carbon, carbide and other composites thereof |
US4500602A (en) * | 1981-08-10 | 1985-02-19 | Ltv Aerospace And Defense Co. | Composite protective coating for carbon-carbon substrates |
DE3133209C2 (de) * | 1981-08-21 | 1985-04-25 | MTU Motoren- und Turbinen-Union München GmbH, 8000 München | Hohler Verbundkörper, insbesondere Umdrehungskörper und Verfahren zu seiner Herstellung |
FR2520352B1 (fr) * | 1982-01-22 | 1986-04-25 | Europ Propulsion | Structure composite de type refractaire-refractaire et son procede de fabrication |
US4476178A (en) * | 1982-06-24 | 1984-10-09 | United Technologies Corporation | Composite silicon carbide coatings for carbon-carbon materials |
US4472476A (en) * | 1982-06-24 | 1984-09-18 | United Technologies Corporation | Composite silicon carbide/silicon nitride coatings for carbon-carbon materials |
US4435455A (en) * | 1983-01-10 | 1984-03-06 | United Technologies Corporation | Compliant composite tubular liners of fiber reinforced glass/glass-ceramic having utility as gun barrel liners |
US4766013A (en) * | 1983-03-15 | 1988-08-23 | Refractory Composites, Inc. | Carbon composite article and method of making same |
FR2544661A1 (fr) * | 1983-04-19 | 1984-10-26 | Europ Propulsion | Materiaux composites constitues par une matrice en carbone coke de resine, renforcee par des fibres refractaires revetues de carbone pyrolytique, et procede pour leur obtention |
US4502983A (en) * | 1983-06-28 | 1985-03-05 | Mamoru Omori | Composite silicon carbide sintered shapes and its manufacture |
DE3337630A1 (de) * | 1983-10-15 | 1985-04-25 | W.C. Heraeus Gmbh, 6450 Hanau | Temperaturausgleichskoerper |
JPS60180988A (ja) * | 1984-02-29 | 1985-09-14 | Rigaku Denki Kogyo Kk | ブリツジマン・ストツクバ−ガ−法単結晶成長用るつぼ |
CH663455A5 (de) * | 1984-04-19 | 1987-12-15 | Balzers Hochvakuum | Rohr mit einer innenbeschichtung. |
JPS60226462A (ja) * | 1984-04-24 | 1985-11-11 | 宇部興産株式会社 | 無機繊維強化耐熱セラミツク複合材料 |
JPS60255699A (ja) * | 1984-05-30 | 1985-12-17 | Sumitomo Electric Ind Ltd | 半導体Si単結晶製造用部材及びその製造法 |
US4569886A (en) * | 1984-06-18 | 1986-02-11 | The United States Of America As Represented By The Secretary Of The Navy | Fabrication of novel whisker reinforced ceramics |
JPS6126589A (ja) * | 1984-07-12 | 1986-02-05 | Toshiba Mach Co Ltd | 単結晶引上機の原料供給装置 |
US4581263A (en) * | 1984-08-27 | 1986-04-08 | Fiber Materials, Inc. | Graphite fiber mold |
US4598024A (en) * | 1984-09-28 | 1986-07-01 | The United States Of America As Represented By The United States Department Of Energy | Dispersion toughened ceramic composites and method for making same |
JPS61219787A (ja) * | 1985-03-26 | 1986-09-30 | Kyocera Corp | 高純度半導体単結晶製造用ルツボ |
JPH0686352B2 (ja) * | 1985-04-30 | 1994-11-02 | 京セラ株式会社 | 高純度半導体単結晶製造用ルツボ |
JPS61291484A (ja) * | 1985-06-18 | 1986-12-22 | Hitachi Chem Co Ltd | 黒鉛るつぼ |
JPS62119175A (ja) * | 1985-11-18 | 1987-05-30 | 工業技術院長 | 炭化珪素繊維強化スピネル複合焼結体の製造法 |
JPS63139100A (ja) * | 1986-12-01 | 1988-06-10 | Hitachi Cable Ltd | 化合物半導体単結晶製造用部材及びその製造方法 |
-
1987
- 1987-04-27 FR FR8705942A patent/FR2614321A1/fr active Pending
-
1988
- 1988-04-12 IE IE110388A patent/IE61689B1/en not_active IP Right Cessation
- 1988-04-27 JP JP63102882A patent/JP2740513B2/ja not_active Expired - Fee Related
- 1988-04-27 AT AT88401031T patent/ATE71159T1/de not_active IP Right Cessation
- 1988-04-27 EP EP88401031A patent/EP0290322B1/de not_active Expired - Lifetime
- 1988-04-27 ES ES198888401031T patent/ES2029046T3/es not_active Expired - Lifetime
- 1988-04-27 DE DE8888401031T patent/DE3867299D1/de not_active Expired - Lifetime
-
1990
- 1990-02-02 US US07/474,460 patent/US5132145A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
ES2029046T3 (es) | 1992-07-16 |
EP0290322A1 (de) | 1988-11-09 |
US5132145A (en) | 1992-07-21 |
IE61689B1 (en) | 1994-11-16 |
FR2614321A1 (fr) | 1988-10-28 |
IE881103L (en) | 1988-10-27 |
ATE71159T1 (de) | 1992-01-15 |
JPH02120292A (ja) | 1990-05-08 |
EP0290322B1 (de) | 1992-01-02 |
JP2740513B2 (ja) | 1998-04-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: SOCIETE NATIONALE D'ETUDE ET DE CONSTRUCTION DE MO |
|
8339 | Ceased/non-payment of the annual fee |