JPS6478141A - Field effect type solution sensor - Google Patents
Field effect type solution sensorInfo
- Publication number
- JPS6478141A JPS6478141A JP23477487A JP23477487A JPS6478141A JP S6478141 A JPS6478141 A JP S6478141A JP 23477487 A JP23477487 A JP 23477487A JP 23477487 A JP23477487 A JP 23477487A JP S6478141 A JPS6478141 A JP S6478141A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- shell
- inorg
- holes
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
PURPOSE:To obtain the structure of a sensor which is capable of making stable measurement by providing the shell of a thin inorg. film having through-holes to the surface of a gate insulating film forming sensitive part apart at a certain spacing from said surface. CONSTITUTION:The shell 1 consisting of the thin inorg. film existing in the sensitive part of the sensor, i.e., on the surface of the gate insulating film apart at the certain spacing therefrom and having the through-holes 2 is formed. Silicon nitride, aluminum oxide, and the materials essentially consisting thereof are preferably used as the material of the inorg. film. The diffusion state of a sample soln. on the surface of the gate sensitive part 3 is thereby stably maintained. The output of the sensor is hardly fluctuated and is stably maintained even if the stirring state and flowing state of the sample soln. are nonuniform. The shell 1 can be formed on the element surface with high adhesive strength thereof and the durability is imparted to the shell by using the inorg. material. The sensor is capable of dealing with various sample states by changing the size of the holes 2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23477487A JPS6478141A (en) | 1987-09-21 | 1987-09-21 | Field effect type solution sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23477487A JPS6478141A (en) | 1987-09-21 | 1987-09-21 | Field effect type solution sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6478141A true JPS6478141A (en) | 1989-03-23 |
Family
ID=16976157
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23477487A Pending JPS6478141A (en) | 1987-09-21 | 1987-09-21 | Field effect type solution sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6478141A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006084417A (en) * | 2004-09-17 | 2006-03-30 | Canon Inc | Sensor and manufacturing method therefor |
JP2012503171A (en) * | 2008-09-16 | 2012-02-02 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Exhaust gas protective layer for high temperature ChemFET exhaust gas sensor |
-
1987
- 1987-09-21 JP JP23477487A patent/JPS6478141A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006084417A (en) * | 2004-09-17 | 2006-03-30 | Canon Inc | Sensor and manufacturing method therefor |
JP2012503171A (en) * | 2008-09-16 | 2012-02-02 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Exhaust gas protective layer for high temperature ChemFET exhaust gas sensor |
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