DE3851668T2 - Zusammengesetzte supraleitende Schicht. - Google Patents

Zusammengesetzte supraleitende Schicht.

Info

Publication number
DE3851668T2
DE3851668T2 DE19883851668 DE3851668T DE3851668T2 DE 3851668 T2 DE3851668 T2 DE 3851668T2 DE 19883851668 DE19883851668 DE 19883851668 DE 3851668 T DE3851668 T DE 3851668T DE 3851668 T2 DE3851668 T2 DE 3851668T2
Authority
DE
Germany
Prior art keywords
superconducting layer
compound superconducting
compound
layer
superconducting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE19883851668
Other languages
English (en)
Other versions
DE3851668T3 (de
DE3851668D1 (de
Inventor
Shinichiro Hatta
Hidetaka Higashino
Kumiko Hirochi
Hideaki Adachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27475261&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3851668(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP62186154A external-priority patent/JPS6430112A/ja
Priority claimed from JP62186153A external-priority patent/JP2802063B2/ja
Priority claimed from JP62189279A external-priority patent/JPS6433816A/ja
Priority claimed from JP62189280A external-priority patent/JPS6433817A/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE3851668D1 publication Critical patent/DE3851668D1/de
Publication of DE3851668T2 publication Critical patent/DE3851668T2/de
Publication of DE3851668T3 publication Critical patent/DE3851668T3/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming superconductor layers
    • H10N60/0408—Processes for depositing or forming superconductor layers by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming superconductor layers
    • H10N60/0576—Processes for depositing or forming superconductor layers characterised by the substrate
    • H10N60/0604—Monocrystalline substrates, e.g. epitaxial growth
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming superconductor layers
    • H10N60/0576—Processes for depositing or forming superconductor layers characterised by the substrate
    • H10N60/0632—Intermediate layers, e.g. for growth control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/901—Printed circuit
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9265—Special properties
    • Y10S428/93—Electric superconducting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/702—Josephson junction present
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/703—Microelectronic device with superconducting conduction line
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/704—Wire, fiber, or cable
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal
DE19883851668 1987-07-24 1988-07-22 Zusammengesetzte supraleitende Schicht. Expired - Fee Related DE3851668T3 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP62186154A JPS6430112A (en) 1987-07-24 1987-07-24 Superconductor
JP62186153A JP2802063B2 (ja) 1987-07-24 1987-07-24 超電導体
JP62189279A JPS6433816A (en) 1987-07-29 1987-07-29 Superconductor
JP62189280A JPS6433817A (en) 1987-07-29 1987-07-29 Superconductor

Publications (3)

Publication Number Publication Date
DE3851668D1 DE3851668D1 (de) 1994-11-03
DE3851668T2 true DE3851668T2 (de) 1995-05-04
DE3851668T3 DE3851668T3 (de) 1999-03-04

Family

ID=27475261

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19883851668 Expired - Fee Related DE3851668T3 (de) 1987-07-24 1988-07-22 Zusammengesetzte supraleitende Schicht.

Country Status (3)

Country Link
US (3) US5661112A (de)
EP (1) EP0300499B2 (de)
DE (1) DE3851668T3 (de)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3851668T3 (de) * 1987-07-24 1999-03-04 Matsushita Electric Ind Co Ltd Zusammengesetzte supraleitende Schicht.
US4980339A (en) * 1987-07-29 1990-12-25 Matsushita Electric Industrial Co., Ltd. Superconductor structure
CA1303252C (en) * 1987-08-13 1992-06-09 John A. Agostinelli Circuit element with barrier layer for protecting crystalline oxide conductive layer
JPH01171247A (ja) * 1987-12-25 1989-07-06 Mitsubishi Metal Corp 超伝導体配線の構造
DE69018303T2 (de) * 1989-04-17 1995-11-09 Ngk Insulators Ltd Supraleitende Struktur zur magnetischen Abschirmung.
US5741377A (en) * 1995-04-10 1998-04-21 Martin Marietta Energy Systems, Inc. Structures having enhanced biaxial texture and method of fabricating same
DE19634424C2 (de) * 1996-08-26 1998-07-02 Abb Research Ltd Verfahren zur Herstellung eines Strombegrenzers mit einem Hochtemperatursupraleiter
US6387525B1 (en) * 1997-04-14 2002-05-14 Florida State University Self insulating substrate tape
DE19746976C2 (de) 1997-10-24 2000-11-30 Abb Research Ltd Hochtemperatursupraleiter-Anordnung
DE19748483C1 (de) 1997-11-04 1999-03-04 Siemens Ag Aufbau mit Hoch-T¶c¶-Supraleitermaterial, Verfahren zur Herstellung und Verwendung des Aufbaus
US6372356B1 (en) 1998-06-04 2002-04-16 Xerox Corporation Compliant substrates for growing lattice mismatched films
KR100309675B1 (ko) * 1998-11-23 2001-12-17 오길록 고온초전도계단형모서리조셉슨접합제작방법
US6248459B1 (en) * 1999-03-22 2001-06-19 Motorola, Inc. Semiconductor structure having a crystalline alkaline earth metal oxide interface with silicon
US6693033B2 (en) 2000-02-10 2004-02-17 Motorola, Inc. Method of removing an amorphous oxide from a monocrystalline surface
US6590236B1 (en) 2000-07-24 2003-07-08 Motorola, Inc. Semiconductor structure for use with high-frequency signals
US6555946B1 (en) 2000-07-24 2003-04-29 Motorola, Inc. Acoustic wave device and process for forming the same
US6638838B1 (en) 2000-10-02 2003-10-28 Motorola, Inc. Semiconductor structure including a partially annealed layer and method of forming the same
US20020089023A1 (en) * 2001-01-05 2002-07-11 Motorola, Inc. Low leakage current metal oxide-nitrides and method of fabricating same
US6673646B2 (en) 2001-02-28 2004-01-06 Motorola, Inc. Growth of compound semiconductor structures on patterned oxide films and process for fabricating same
US6709989B2 (en) 2001-06-21 2004-03-23 Motorola, Inc. Method for fabricating a semiconductor structure including a metal oxide interface with silicon
JP3506428B2 (ja) * 2001-07-13 2004-03-15 株式会社東芝 高周波部材
US6646293B2 (en) 2001-07-18 2003-11-11 Motorola, Inc. Structure for fabricating high electron mobility transistors utilizing the formation of complaint substrates
US6693298B2 (en) 2001-07-20 2004-02-17 Motorola, Inc. Structure and method for fabricating epitaxial semiconductor on insulator (SOI) structures and devices utilizing the formation of a compliant substrate for materials used to form same
US6667196B2 (en) 2001-07-25 2003-12-23 Motorola, Inc. Method for real-time monitoring and controlling perovskite oxide film growth and semiconductor structure formed using the method
US6589856B2 (en) 2001-08-06 2003-07-08 Motorola, Inc. Method and apparatus for controlling anti-phase domains in semiconductor structures and devices
US6639249B2 (en) 2001-08-06 2003-10-28 Motorola, Inc. Structure and method for fabrication for a solid-state lighting device
US6673667B2 (en) 2001-08-15 2004-01-06 Motorola, Inc. Method for manufacturing a substantially integral monolithic apparatus including a plurality of semiconductor materials
JP2007200870A (ja) * 2006-01-26 2007-08-09 Ls Cable Ltd 超伝導ケーブル用基板の製造方法
DE102006036798B4 (de) * 2006-08-07 2013-08-29 Infineon Technologies Ag Elektronisches Bauteil und Verfahren zum Herstellen
US7615385B2 (en) 2006-09-20 2009-11-10 Hypres, Inc Double-masking technique for increasing fabrication yield in superconducting electronics
US8759257B2 (en) * 2009-10-02 2014-06-24 Ambature, Inc. High temperature superconducting films and methods for modifying and creating same
JP4503704B1 (ja) * 2009-10-22 2010-07-14 パナソニック株式会社 熱電変換材料および熱電変換素子
FR2967820A1 (fr) * 2010-11-19 2012-05-25 Nexans Conducteur de transport d'energie electrique
US9240317B2 (en) 2013-03-28 2016-01-19 Umm Al-Qura University High temperature GaN based super semiconductor and fabrication process
WO2017040598A1 (en) * 2015-08-31 2017-03-09 Massachusetts Institute Of Technology Systems and methods for hybrid superconducting medium
US10847706B2 (en) 2015-09-01 2020-11-24 Massachusetts Institute Of Technology Systems and methods for hybrid superconducting medium comprising first and second layers with different superconductor to induce a proximity effect between thereof
US11201273B2 (en) * 2019-09-13 2021-12-14 Microsoft Technology Licensing, Llc Semiconductor-superconductor heterostructure

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU598113B2 (en) * 1987-03-14 1990-06-14 Sumitomo Electric Industries, Ltd. Process for depositing a superconducting thin film
DE3887910T2 (de) * 1987-03-20 1994-08-04 Fujikura Ltd Verfahren zur Herstellung eines Drahtes aus supraleitendem Oxid und damit hergestellter Draht.
US4826808A (en) * 1987-03-27 1989-05-02 Massachusetts Institute Of Technology Preparation of superconducting oxides and oxide-metal composites
US4952554A (en) * 1987-04-01 1990-08-28 At&T Bell Laboratories Apparatus and systems comprising a clad superconductive oxide body, and method for producing such body
US5122507A (en) * 1987-05-01 1992-06-16 Sumitomo Electric Industries, Ltd. Process for manufacturing a superconducting composite
US5017551A (en) * 1987-05-04 1991-05-21 Eastman Kodak Company Barrier layer containing conductive articles
US4880770A (en) * 1987-05-04 1989-11-14 Eastman Kodak Company Metalorganic deposition process for preparing superconducting oxide films
JPH0280303A (ja) * 1987-06-04 1990-03-20 Tonen Corp 超伝導体薄膜の形成方法及びその為の装置
DE3851668T3 (de) * 1987-07-24 1999-03-04 Matsushita Electric Ind Co Ltd Zusammengesetzte supraleitende Schicht.
US4975413A (en) * 1987-08-12 1990-12-04 Amoco Corporation Superconductor-coated carbon fiber composites

Also Published As

Publication number Publication date
USRE36814E (en) 2000-08-08
US5661112A (en) 1997-08-26
EP0300499A2 (de) 1989-01-25
EP0300499A3 (en) 1990-12-19
EP0300499B2 (de) 1998-08-19
DE3851668T3 (de) 1999-03-04
EP0300499B1 (de) 1994-09-28
US5998337A (en) 1999-12-07
DE3851668D1 (de) 1994-11-03

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8339 Ceased/non-payment of the annual fee