DE3850920T2 - Zusammengesetzte supraleitende Schichtstruktur. - Google Patents

Zusammengesetzte supraleitende Schichtstruktur.

Info

Publication number
DE3850920T2
DE3850920T2 DE3850920T DE3850920T DE3850920T2 DE 3850920 T2 DE3850920 T2 DE 3850920T2 DE 3850920 T DE3850920 T DE 3850920T DE 3850920 T DE3850920 T DE 3850920T DE 3850920 T2 DE3850920 T2 DE 3850920T2
Authority
DE
Germany
Prior art keywords
layer structure
superconducting layer
compound superconducting
compound
superconducting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3850920T
Other languages
English (en)
Other versions
DE3850920D1 (de
Inventor
Takeshi Kamada
Shinichiro Hatta
Kentaro Setsune
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE3850920D1 publication Critical patent/DE3850920D1/de
Publication of DE3850920T2 publication Critical patent/DE3850920T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/087—Oxides of copper or solid solutions thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0408—Processes for depositing or forming copper oxide superconductor layers by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0576—Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
    • H10N60/0632—Intermediate layers, e.g. for growth control

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)
DE3850920T 1987-08-21 1988-08-19 Zusammengesetzte supraleitende Schichtstruktur. Expired - Fee Related DE3850920T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62208670A JPH0688858B2 (ja) 1987-08-21 1987-08-21 超電導体

Publications (2)

Publication Number Publication Date
DE3850920D1 DE3850920D1 (de) 1994-09-08
DE3850920T2 true DE3850920T2 (de) 1995-03-02

Family

ID=16560113

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3850920T Expired - Fee Related DE3850920T2 (de) 1987-08-21 1988-08-19 Zusammengesetzte supraleitende Schichtstruktur.

Country Status (3)

Country Link
EP (1) EP0304078B1 (de)
JP (1) JPH0688858B2 (de)
DE (1) DE3850920T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5221660A (en) * 1987-12-25 1993-06-22 Sumitomo Electric Industries, Ltd. Semiconductor substrate having a superconducting thin film
US5361720A (en) * 1988-04-22 1994-11-08 British Technology Group Ltd. Epitaxial deposition
GB8809548D0 (en) * 1988-04-22 1988-05-25 Somekh R E Epitaxial barrier layers in thin film technology
US5323023A (en) * 1992-12-02 1994-06-21 Xerox Corporation Epitaxial magnesium oxide as a buffer layer on (111) tetrahedral semiconductors

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117691A (ja) * 1983-11-30 1985-06-25 Fujitsu Ltd 超伝導デバイス
JPS6430117A (en) * 1987-07-24 1989-02-01 Furukawa Electric Co Ltd Formation of ceramic superconductor membrane
JPS6450313A (en) * 1987-08-21 1989-02-27 Hitachi Ltd Superconductor device

Also Published As

Publication number Publication date
JPH0688858B2 (ja) 1994-11-09
JPS6452326A (en) 1989-02-28
EP0304078A2 (de) 1989-02-22
DE3850920D1 (de) 1994-09-08
EP0304078A3 (en) 1990-12-19
EP0304078B1 (de) 1994-08-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee