JPS6450313A - Superconductor device - Google Patents

Superconductor device

Info

Publication number
JPS6450313A
JPS6450313A JP62206303A JP20630387A JPS6450313A JP S6450313 A JPS6450313 A JP S6450313A JP 62206303 A JP62206303 A JP 62206303A JP 20630387 A JP20630387 A JP 20630387A JP S6450313 A JPS6450313 A JP S6450313A
Authority
JP
Japan
Prior art keywords
thin film
mgo
srtio3
forming
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62206303A
Other languages
Japanese (ja)
Inventor
Tadanori Taguchi
Toshiyuki Aida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62206303A priority Critical patent/JPS6450313A/en
Publication of JPS6450313A publication Critical patent/JPS6450313A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE:To obtain a superconductive thin film having a a characteristic close to a bulk characteristic by forming an oxide superconductive thin film via a MgO thin film or a SrTiO3 thin film provided on a bulk substrate. CONSTITUTION:A MgO or SrTiO3 thin film 2 is provided on a bulk substrate 1 used for a semiconductor device so far, and an oxide system superconductive thin film 3 is provided on the film 2. The thickness of the Mgo or SrTiO3 thin film is made to above 100nm by forming a thin film having the equivalent critical temperature to a sintered body by the film 3. The upper limit is 100mum judging from a process and effectiveness forming the MgO or SrTiO3 thin film. The forming MgO or SrTiO3 thin film is possible by the sputter and CVD methods. And a substrate having a heat resistance such as sapphire, zirconia, and lithicon is used to the substrate 1 used. This makes it possible to prevent the occurrence of 1 crack in a superconductive thin film. In addition, MgO or SrTiO3 performs the role of a layer to relax a thermal expansion coefficient.
JP62206303A 1987-08-21 1987-08-21 Superconductor device Pending JPS6450313A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62206303A JPS6450313A (en) 1987-08-21 1987-08-21 Superconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62206303A JPS6450313A (en) 1987-08-21 1987-08-21 Superconductor device

Publications (1)

Publication Number Publication Date
JPS6450313A true JPS6450313A (en) 1989-02-27

Family

ID=16521069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62206303A Pending JPS6450313A (en) 1987-08-21 1987-08-21 Superconductor device

Country Status (1)

Country Link
JP (1) JPS6450313A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6452326A (en) * 1987-08-21 1989-02-28 Matsushita Electric Ind Co Ltd Superconductor
JPH02237082A (en) * 1988-04-30 1990-09-19 Sumitomo Electric Ind Ltd Semiconductor substrate provided with superconductor thin film and manufacture thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6452326A (en) * 1987-08-21 1989-02-28 Matsushita Electric Ind Co Ltd Superconductor
JPH02237082A (en) * 1988-04-30 1990-09-19 Sumitomo Electric Ind Ltd Semiconductor substrate provided with superconductor thin film and manufacture thereof

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