DE3780242T2 - Halbleiterbeschleunigungsmesser. - Google Patents

Halbleiterbeschleunigungsmesser.

Info

Publication number
DE3780242T2
DE3780242T2 DE8787113466T DE3780242T DE3780242T2 DE 3780242 T2 DE3780242 T2 DE 3780242T2 DE 8787113466 T DE8787113466 T DE 8787113466T DE 3780242 T DE3780242 T DE 3780242T DE 3780242 T2 DE3780242 T2 DE 3780242T2
Authority
DE
Germany
Prior art keywords
semiconductor accelerometer
accelerometer
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787113466T
Other languages
English (en)
Other versions
DE3780242D1 (de
Inventor
Masahito Imai
Toshitaka Yamada
Tiaki Mizuno
Hirohito Shioya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61224122A external-priority patent/JPS6378577A/ja
Priority claimed from JP61225437A external-priority patent/JPH0711535B2/ja
Priority claimed from JP61232223A external-priority patent/JPS6386576A/ja
Priority claimed from JP61262557A external-priority patent/JPS63116473A/ja
Priority claimed from JP61277991A external-priority patent/JPS63132171A/ja
Priority claimed from JP21771887A external-priority patent/JPS6459075A/ja
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Publication of DE3780242D1 publication Critical patent/DE3780242D1/de
Application granted granted Critical
Publication of DE3780242T2 publication Critical patent/DE3780242T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/003—Details of instruments used for damping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
DE8787113466T 1986-09-22 1987-09-15 Halbleiterbeschleunigungsmesser. Expired - Fee Related DE3780242T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP61224122A JPS6378577A (ja) 1986-09-22 1986-09-22 半導体式加速度センサ
JP61225437A JPH0711535B2 (ja) 1986-09-23 1986-09-23 半導体式加速度センサ
JP61232223A JPS6386576A (ja) 1986-09-30 1986-09-30 半導体式加速度センサ
JP61262557A JPS63116473A (ja) 1986-11-04 1986-11-04 半導体式加速度センサの組付け方法
JP61277991A JPS63132171A (ja) 1986-11-21 1986-11-21 半導体式加速度検出装置
JP21771887A JPS6459075A (en) 1987-08-30 1987-08-30 Semiconductor acceleration sensor

Publications (2)

Publication Number Publication Date
DE3780242D1 DE3780242D1 (de) 1992-08-13
DE3780242T2 true DE3780242T2 (de) 1993-03-18

Family

ID=27553941

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787113466T Expired - Fee Related DE3780242T2 (de) 1986-09-22 1987-09-15 Halbleiterbeschleunigungsmesser.

Country Status (3)

Country Link
US (1) US4829822A (de)
EP (3) EP0454190A3 (de)
DE (1) DE3780242T2 (de)

Families Citing this family (37)

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US5121633A (en) * 1987-12-18 1992-06-16 Nissan Motor Co., Ltd. Semiconductor accelerometer
GB2215914B (en) * 1988-03-17 1991-07-03 Emi Plc Thorn A microengineered diaphragm pressure switch and a method of manufacture thereof
DE68907121T2 (de) * 1988-04-11 1994-01-27 Nippon Denso Co Beschleunigungsaufnehmer.
CA1330265C (en) * 1988-09-23 1994-06-21 Craig W. White Self-calibrating accelerometer
JPH0623780B2 (ja) * 1989-09-21 1994-03-30 日本電装株式会社 半導体加速度センサの製造方法
EP0543901B1 (de) * 1990-08-17 1995-10-04 Analog Devices, Inc. Monolithischer beschleunigungsmesser
US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
US5326726A (en) * 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
JPH0830716B2 (ja) * 1990-11-30 1996-03-27 三菱電機株式会社 半導体加速度検出装置
US5191794A (en) * 1990-12-24 1993-03-09 Litton Systems, Inc. Integrated accelerometer with resilient limit stops
US6295870B1 (en) * 1991-02-08 2001-10-02 Alliedsignal Inc. Triaxial angular rate and acceleration sensor
US5408112A (en) * 1991-06-03 1995-04-18 Nippondenso Co., Ltd. Semiconductor strain sensor having improved resistance to bonding strain effects
JPH057006A (ja) * 1991-06-28 1993-01-14 Mitsubishi Electric Corp 半導体加速度検出装置
US5233873A (en) * 1991-07-03 1993-08-10 Texas Instruments Incorporated Accelerometer
JPH05119057A (ja) * 1991-10-23 1993-05-14 Nec Corp 半導体加速度センサ
JPH05164775A (ja) * 1991-12-17 1993-06-29 Atsugi Unisia Corp 加速度センサ
DE4202148A1 (de) * 1992-01-27 1993-07-29 Kansei Kk Beschleunigungs-sensor-baugruppe
US5277064A (en) * 1992-04-08 1994-01-11 General Motors Corporation Thick film accelerometer
FR2690275B1 (fr) * 1992-04-21 1994-06-10 Asulab Sa Moyens de positionnement d'un dispositif microelectronique et ensemble de montage d'un tel dispositif.
JP2804874B2 (ja) * 1992-12-25 1998-09-30 三菱電機株式会社 半導体加速度検出装置
US5780742A (en) * 1993-04-15 1998-07-14 Honeywell Inc. Mechanical resonance, silicon accelerometer
US6911727B1 (en) 1995-06-06 2005-06-28 Analog Devices, Inc. Package for sealing an integrated circuit die
FR2736723B1 (fr) * 1995-07-12 1997-09-19 Sagem Accelerometre pendulaire a actionneur capacitif de test
EP0793103A3 (de) * 1996-02-27 1998-10-07 Seiko Instruments R&D Center Inc. Halbleiter-Beschleunigungssensor
JP2800112B2 (ja) * 1996-02-28 1998-09-21 株式会社エスアイアイ・アールディセンター 半導体装置
JP3117925B2 (ja) * 1996-04-19 2000-12-18 株式会社エスアイアイ・アールディセンター 半導体加速度センサ
EP0948059A1 (de) * 1998-02-05 1999-10-06 Asulab S.A. Positionierungsmittel in einem mikroelektronischen Bauelement und Bildsensor mit Verwendung dieses Bauelements
AU2001265084A1 (en) * 2000-05-30 2001-12-11 Input/Output, Inc. Accelerometer with re-entrant grooves
FI119078B (fi) * 2002-02-12 2008-07-15 Nokia Corp Kiihtyvyysanturi
EP1443331A3 (de) 2003-02-03 2005-10-12 Denso Corporation Messaufnehmer und keramische Verpackung zur Montage von elektronischen Komponenten
CN100399550C (zh) * 2003-02-03 2008-07-02 株式会社电装 传感器器件以及用于安装电子元件的陶瓷封装外壳
US7109580B2 (en) 2004-03-03 2006-09-19 Hymite A/S Hermetically sealed package for optical, electronic, opto-electronic and other devices
DE102004034290A1 (de) * 2004-07-15 2007-01-11 Siemens Ag Sensor für Kraftfahrzeuge
JP2006133161A (ja) * 2004-11-09 2006-05-25 Fujitsu Media Device Kk 加速度センサー
US7243544B2 (en) 2005-06-16 2007-07-17 Honeywell International Inc. Passive and wireless acoustic wave accelerometer
JP7024349B2 (ja) * 2017-11-24 2022-02-24 セイコーエプソン株式会社 センサーユニット、センサーユニットの製造方法、慣性計測装置、電子機器、および移動体

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3089343A (en) * 1960-08-04 1963-05-14 Lockheed Aircraft Corp Transducer devices employing a fluid film for improvement of sensitivity and frequency response characteristics
US3557628A (en) * 1967-12-27 1971-01-26 Toyoda Chuo Kenkyusho Kk Accelerometer
US3884085A (en) * 1972-04-05 1975-05-20 Robinson Halpern Company Accelerometer assembly
US3893156A (en) * 1973-06-29 1975-07-01 Ibm Novel beam lead integrated circuit structure and method for making the same including automatic registration of beam leads with corresponding dielectric substrate leads
DE2655604C2 (de) * 1976-12-08 1984-11-29 Robert Bosch Gmbh, 7000 Stuttgart Verzögerungsaufnehmer zur Auslösung von Insassenschutzvorrichtungen im Kraftfahrzeug
DE2801969C2 (de) * 1978-01-18 1982-11-04 Robert Bosch Gmbh, 7000 Stuttgart Sensor für Schwingungen
DE2835999A1 (de) * 1978-08-17 1980-03-06 Bosch Gmbh Robert Beschleunigungsaufnehmer, insbesondere zur ausloesung von insassenschutzvorrichtungen in kraftfahrzeugen
GB2130373B (en) * 1982-11-17 1986-12-31 Stc Plc Accelerometer device
JPS59158566A (ja) * 1983-02-28 1984-09-08 Nippon Denso Co Ltd 半導体加速度センサ
US4488445A (en) * 1983-10-28 1984-12-18 Honeywell Inc. Integrated silicon accelerometer with cross-axis compensation
JPS6169151A (ja) * 1984-05-18 1986-04-09 Toshiba Corp 気密封止用キヤツプ半田付装置
FR2564826B1 (fr) * 1984-05-25 1986-08-22 Thomson Csf Procede d'assemblage d'au moins deux pieces en ceramique, presentant chacune au moins une surface plane
JPH0660906B2 (ja) * 1984-12-18 1994-08-10 日産自動車株式会社 半導体加速度センサ
JPH0515669A (ja) * 1991-06-28 1993-01-26 Juki Corp ミシンの布押え装置
US5149980A (en) * 1991-11-01 1992-09-22 Hewlett-Packard Company Substrate advance measurement system using cross-correlation of light sensor array signals

Also Published As

Publication number Publication date
EP0261555A2 (de) 1988-03-30
EP0456285A3 (en) 1992-01-02
EP0261555B1 (de) 1992-07-08
US4829822A (en) 1989-05-16
EP0454190A2 (de) 1991-10-30
DE3780242D1 (de) 1992-08-13
EP0261555A3 (en) 1989-07-26
EP0456285A2 (de) 1991-11-13
EP0454190A3 (en) 1992-01-08

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Legal Events

Date Code Title Description
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee