AU2001265084A1 - Accelerometer with re-entrant grooves - Google Patents

Accelerometer with re-entrant grooves

Info

Publication number
AU2001265084A1
AU2001265084A1 AU2001265084A AU6508401A AU2001265084A1 AU 2001265084 A1 AU2001265084 A1 AU 2001265084A1 AU 2001265084 A AU2001265084 A AU 2001265084A AU 6508401 A AU6508401 A AU 6508401A AU 2001265084 A1 AU2001265084 A1 AU 2001265084A1
Authority
AU
Australia
Prior art keywords
accelerometer
entrant grooves
entrant
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001265084A
Inventor
Howard D. Goldberg
Robert P. Ried
Martin A. Schmidt
Arjun Selvakumar
Lianzhong Yu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ion Geophysical Corp
Original Assignee
Ion Geophysical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ion Geophysical Corp filed Critical Ion Geophysical Corp
Publication of AU2001265084A1 publication Critical patent/AU2001265084A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/181—Geophones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
AU2001265084A 2000-05-30 2001-05-29 Accelerometer with re-entrant grooves Abandoned AU2001265084A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US20793400P 2000-05-30 2000-05-30
US60207934 2000-05-30
PCT/US2001/017254 WO2001092895A1 (en) 2000-05-30 2001-05-29 Accelerometer with re-entrant grooves

Publications (1)

Publication Number Publication Date
AU2001265084A1 true AU2001265084A1 (en) 2001-12-11

Family

ID=22772562

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001265084A Abandoned AU2001265084A1 (en) 2000-05-30 2001-05-29 Accelerometer with re-entrant grooves

Country Status (5)

Country Link
EP (1) EP1305639A4 (en)
AU (1) AU2001265084A1 (en)
CA (1) CA2410909A1 (en)
NO (1) NO20025744L (en)
WO (1) WO2001092895A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10117257A1 (en) * 2001-04-06 2002-10-17 Eads Deutschland Gmbh Micromechanical capacitive acceleration sensor
CN101049045B (en) * 2004-10-27 2011-09-21 爱普科斯公司 Reduction of air damping in mems device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0456285A3 (en) * 1986-09-22 1992-01-02 Nippondenso Co., Ltd. Semiconductor accelerometer
US4993143A (en) * 1989-03-06 1991-02-19 Delco Electronics Corporation Method of making a semiconductive structure useful as a pressure sensor
US5228341A (en) * 1989-10-18 1993-07-20 Hitachi, Ltd. Capacitive acceleration detector having reduced mass portion
JP2728807B2 (en) * 1991-07-24 1998-03-18 株式会社日立製作所 Capacitive acceleration sensor
US5616514A (en) * 1993-06-03 1997-04-01 Robert Bosch Gmbh Method of fabricating a micromechanical sensor
DE69702745T2 (en) * 1997-03-04 2000-12-07 St Microelectronics Srl Method of manufacturing micromechanical pressure sensors
JPH1194873A (en) * 1997-09-18 1999-04-09 Mitsubishi Electric Corp Acceleration sensor and its manufacture
DE69930099T2 (en) * 1999-04-09 2006-08-31 Stmicroelectronics S.R.L., Agrate Brianza Production of buried cavities in a monocrystalline semiconductor wafer and semiconductor wafer

Also Published As

Publication number Publication date
EP1305639A4 (en) 2004-03-24
CA2410909A1 (en) 2001-12-06
NO20025744L (en) 2003-01-28
EP1305639A1 (en) 2003-05-02
NO20025744D0 (en) 2002-11-29
WO2001092895A1 (en) 2001-12-06

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