NO20025744D0 - Accelerometer with inward groove - Google Patents

Accelerometer with inward groove

Info

Publication number
NO20025744D0
NO20025744D0 NO20025744A NO20025744A NO20025744D0 NO 20025744 D0 NO20025744 D0 NO 20025744D0 NO 20025744 A NO20025744 A NO 20025744A NO 20025744 A NO20025744 A NO 20025744A NO 20025744 D0 NO20025744 D0 NO 20025744D0
Authority
NO
Norway
Prior art keywords
accelerometer
inward groove
inward
groove
Prior art date
Application number
NO20025744A
Other languages
Norwegian (no)
Other versions
NO20025744L (en
Inventor
Robert P Ried
Arjun Selvakumar
Howard D Goldberg
Martin A Schmidt
Lianzhong Yu
Original Assignee
Input Output Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Input Output Inc filed Critical Input Output Inc
Publication of NO20025744D0 publication Critical patent/NO20025744D0/en
Publication of NO20025744L publication Critical patent/NO20025744L/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/181—Geophones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
NO20025744A 2000-05-30 2002-11-29 Accelerometer with inward groove NO20025744L (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US20793400P 2000-05-30 2000-05-30
PCT/US2001/017254 WO2001092895A1 (en) 2000-05-30 2001-05-29 Accelerometer with re-entrant grooves

Publications (2)

Publication Number Publication Date
NO20025744D0 true NO20025744D0 (en) 2002-11-29
NO20025744L NO20025744L (en) 2003-01-28

Family

ID=22772562

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20025744A NO20025744L (en) 2000-05-30 2002-11-29 Accelerometer with inward groove

Country Status (5)

Country Link
EP (1) EP1305639A4 (en)
AU (1) AU2001265084A1 (en)
CA (1) CA2410909A1 (en)
NO (1) NO20025744L (en)
WO (1) WO2001092895A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10117257A1 (en) * 2001-04-06 2002-10-17 Eads Deutschland Gmbh Micromechanical capacitive acceleration sensor
CN101049045B (en) * 2004-10-27 2011-09-21 爱普科斯公司 Reduction of air damping in mems device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0456285A3 (en) * 1986-09-22 1992-01-02 Nippondenso Co., Ltd. Semiconductor accelerometer
US4993143A (en) * 1989-03-06 1991-02-19 Delco Electronics Corporation Method of making a semiconductive structure useful as a pressure sensor
US5228341A (en) * 1989-10-18 1993-07-20 Hitachi, Ltd. Capacitive acceleration detector having reduced mass portion
JP2728807B2 (en) * 1991-07-24 1998-03-18 株式会社日立製作所 Capacitive acceleration sensor
US5616514A (en) * 1993-06-03 1997-04-01 Robert Bosch Gmbh Method of fabricating a micromechanical sensor
DE69702745T2 (en) * 1997-03-04 2000-12-07 St Microelectronics Srl Method of manufacturing micromechanical pressure sensors
JPH1194873A (en) * 1997-09-18 1999-04-09 Mitsubishi Electric Corp Acceleration sensor and its manufacture
DE69930099T2 (en) * 1999-04-09 2006-08-31 Stmicroelectronics S.R.L., Agrate Brianza Production of buried cavities in a monocrystalline semiconductor wafer and semiconductor wafer

Also Published As

Publication number Publication date
EP1305639A4 (en) 2004-03-24
CA2410909A1 (en) 2001-12-06
NO20025744L (en) 2003-01-28
EP1305639A1 (en) 2003-05-02
AU2001265084A1 (en) 2001-12-11
WO2001092895A1 (en) 2001-12-06

Similar Documents

Publication Publication Date Title
NO20026151D0 (en) Accelerometer with U-shaped suspension elements
CY2015035I1 (en) PYRIMIDINE COMPOUNDS
DE60030268D1 (en) accelerometer
NO20021533D0 (en) Accelerometer with high sensitivity
NO20024127L (en) Pyrimidine compounds
DK1303496T3 (en) pyrimidine
DK1440077T3 (en) SYNTHETIC HEPARINPENTASACCHARIDES
PT1341791E (en) IMITAZOQUINOLINAS SUBSTITUTED WITH TIOETER
DE60130927D1 (en) capacitor
FI20020284A0 (en) Accelerometer
DE60107676D1 (en) BOB TOPVERTEILER
DE50111776D1 (en) precoat
DE60124327D1 (en) recorder
DE60226240D1 (en) ACCELEROMETER
NO20032291D0 (en) pyrimidine
DE60135230D1 (en) Aminocyclohexane derivatives
NO20025659L (en) Heterocyclic compounds
DE60143148D1 (en) EN WITH HONEYWAVES
DK1206476T3 (en) 9a-azalides with antibacterial action
NO20025744D0 (en) Accelerometer with inward groove
FR2805883B1 (en) PROFILE
FI20001398A (en) Well
DK1181415T3 (en) Track
NO20002289D0 (en) Skateboard with suspension
ITMI20002088A0 (en) NONE

Legal Events

Date Code Title Description
FC2A Withdrawal, rejection or dismissal of laid open patent application