DE3739953A1 - Positioniereinrichtung fuer die herstellung von halbleiterbauelementen - Google Patents

Positioniereinrichtung fuer die herstellung von halbleiterbauelementen

Info

Publication number
DE3739953A1
DE3739953A1 DE19873739953 DE3739953A DE3739953A1 DE 3739953 A1 DE3739953 A1 DE 3739953A1 DE 19873739953 DE19873739953 DE 19873739953 DE 3739953 A DE3739953 A DE 3739953A DE 3739953 A1 DE3739953 A1 DE 3739953A1
Authority
DE
Germany
Prior art keywords
lever
drive
bearing
bearing plate
cross table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19873739953
Other languages
German (de)
English (en)
Inventor
Horst Dipl Ing Podeschwa
Joachim Dipl Ing Gerard
Wolfgang Schoepe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektromat VEB
Original Assignee
Elektromat VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat VEB filed Critical Elektromat VEB
Publication of DE3739953A1 publication Critical patent/DE3739953A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0444—Apparatus for wiring semiconductor or solid-state device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20341—Power elements as controlling elements
    • Y10T74/20354—Planar surface with orthogonal movement only

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Machine Tool Units (AREA)
  • Transmission Devices (AREA)
DE19873739953 1987-03-13 1987-11-25 Positioniereinrichtung fuer die herstellung von halbleiterbauelementen Withdrawn DE3739953A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD87300756A DD297758A7 (de) 1987-03-13 1987-03-13 Positionierungseinrichtung fuer die herstellung von halbleiterbauelementen

Publications (1)

Publication Number Publication Date
DE3739953A1 true DE3739953A1 (de) 1988-09-22

Family

ID=5587464

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19873739953 Withdrawn DE3739953A1 (de) 1987-03-13 1987-11-25 Positioniereinrichtung fuer die herstellung von halbleiterbauelementen

Country Status (6)

Country Link
US (1) US4821595A (enExample)
CH (1) CH674685A5 (enExample)
DD (1) DD297758A7 (enExample)
DE (1) DE3739953A1 (enExample)
FR (1) FR2612108B3 (enExample)
HU (1) HU203821B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5013016A (en) * 1990-06-18 1991-05-07 Sankyo Manufacturing Company, Ltd. Positioning table
DE69500707T2 (de) * 1994-02-07 1998-02-12 Ushiodenki K.K., Tokio/Tokyo Haltevorrichtung
US5735173A (en) * 1995-10-04 1998-04-07 Probot Incorporated Pivotally linked position control drive system
CN115179220B (zh) * 2022-08-26 2023-09-05 四川成焊宝玛焊接装备工程有限公司 一种前盖定位装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4006645A (en) * 1974-09-26 1977-02-08 The Perkin-Elmer Corporation X, Y, θ alignment mechanism
JPS5485678A (en) * 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
JPS55134414A (en) * 1979-04-06 1980-10-20 Hitachi Ltd Precise moving unit
JPS57154846A (en) * 1981-03-20 1982-09-24 Hitachi Ltd Xy table
US4492356A (en) * 1982-02-26 1985-01-08 Hitachi, Ltd. Precision parallel translation system
JPS59129633A (ja) * 1983-01-08 1984-07-26 Canon Inc ステージ装置

Also Published As

Publication number Publication date
FR2612108A1 (fr) 1988-09-16
HU203821B (en) 1991-09-30
HUT49423A (en) 1989-09-28
US4821595A (en) 1989-04-18
FR2612108B3 (fr) 1989-06-30
DD297758A7 (de) 1992-01-23
CH674685A5 (enExample) 1990-06-29

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee