FR2612108B3 - Installation de positionnement pour la fabrication de composants semi-conducteurs assure par une table de coordonnees x-y ayant un moyen d'entrainement respectif - Google Patents

Installation de positionnement pour la fabrication de composants semi-conducteurs assure par une table de coordonnees x-y ayant un moyen d'entrainement respectif

Info

Publication number
FR2612108B3
FR2612108B3 FR878718304A FR8718304A FR2612108B3 FR 2612108 B3 FR2612108 B3 FR 2612108B3 FR 878718304 A FR878718304 A FR 878718304A FR 8718304 A FR8718304 A FR 8718304A FR 2612108 B3 FR2612108 B3 FR 2612108B3
Authority
FR
France
Prior art keywords
manufacture
driving means
semiconductor components
components provided
respective driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR878718304A
Other languages
English (en)
French (fr)
Other versions
FR2612108A1 (fr
Inventor
Hort Podeschwa
Joachim Gerard
Wolfgang Schoepe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektromat Dresden VEB
Elektromat VEB
Original Assignee
Elektromat Dresden VEB
Elektromat VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat Dresden VEB, Elektromat VEB filed Critical Elektromat Dresden VEB
Publication of FR2612108A1 publication Critical patent/FR2612108A1/fr
Application granted granted Critical
Publication of FR2612108B3 publication Critical patent/FR2612108B3/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0444—Apparatus for wiring semiconductor or solid-state device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20341—Power elements as controlling elements
    • Y10T74/20354—Planar surface with orthogonal movement only

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Machine Tool Units (AREA)
  • Transmission Devices (AREA)
FR878718304A 1987-03-13 1987-12-29 Installation de positionnement pour la fabrication de composants semi-conducteurs assure par une table de coordonnees x-y ayant un moyen d'entrainement respectif Expired FR2612108B3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD87300756A DD297758A7 (de) 1987-03-13 1987-03-13 Positionierungseinrichtung fuer die herstellung von halbleiterbauelementen

Publications (2)

Publication Number Publication Date
FR2612108A1 FR2612108A1 (fr) 1988-09-16
FR2612108B3 true FR2612108B3 (fr) 1989-06-30

Family

ID=5587464

Family Applications (1)

Application Number Title Priority Date Filing Date
FR878718304A Expired FR2612108B3 (fr) 1987-03-13 1987-12-29 Installation de positionnement pour la fabrication de composants semi-conducteurs assure par une table de coordonnees x-y ayant un moyen d'entrainement respectif

Country Status (6)

Country Link
US (1) US4821595A (enExample)
CH (1) CH674685A5 (enExample)
DD (1) DD297758A7 (enExample)
DE (1) DE3739953A1 (enExample)
FR (1) FR2612108B3 (enExample)
HU (1) HU203821B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5013016A (en) * 1990-06-18 1991-05-07 Sankyo Manufacturing Company, Ltd. Positioning table
DE69500707T2 (de) * 1994-02-07 1998-02-12 Ushiodenki K.K., Tokio/Tokyo Haltevorrichtung
US5735173A (en) * 1995-10-04 1998-04-07 Probot Incorporated Pivotally linked position control drive system
CN115179220B (zh) * 2022-08-26 2023-09-05 四川成焊宝玛焊接装备工程有限公司 一种前盖定位装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4006645A (en) * 1974-09-26 1977-02-08 The Perkin-Elmer Corporation X, Y, θ alignment mechanism
JPS5485678A (en) * 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
JPS55134414A (en) * 1979-04-06 1980-10-20 Hitachi Ltd Precise moving unit
JPS57154846A (en) * 1981-03-20 1982-09-24 Hitachi Ltd Xy table
US4492356A (en) * 1982-02-26 1985-01-08 Hitachi, Ltd. Precision parallel translation system
JPS59129633A (ja) * 1983-01-08 1984-07-26 Canon Inc ステージ装置

Also Published As

Publication number Publication date
FR2612108A1 (fr) 1988-09-16
HU203821B (en) 1991-09-30
HUT49423A (en) 1989-09-28
US4821595A (en) 1989-04-18
DE3739953A1 (de) 1988-09-22
DD297758A7 (de) 1992-01-23
CH674685A5 (enExample) 1990-06-29

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Legal Events

Date Code Title Description
ST Notification of lapse