DD297758A7 - Positionierungseinrichtung fuer die herstellung von halbleiterbauelementen - Google Patents

Positionierungseinrichtung fuer die herstellung von halbleiterbauelementen Download PDF

Info

Publication number
DD297758A7
DD297758A7 DD87300756A DD30075687A DD297758A7 DD 297758 A7 DD297758 A7 DD 297758A7 DD 87300756 A DD87300756 A DD 87300756A DD 30075687 A DD30075687 A DD 30075687A DD 297758 A7 DD297758 A7 DD 297758A7
Authority
DD
German Democratic Republic
Prior art keywords
lever
drive
bearing
bearing plate
cross table
Prior art date
Application number
DD87300756A
Other languages
German (de)
English (en)
Inventor
Horst Podeschwa
Joachim Gerard
Wolfgang Schoepe
Original Assignee
������@������������k��
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ������@������������k�� filed Critical ������@������������k��
Priority to DD87300756A priority Critical patent/DD297758A7/de
Priority to DE19873739953 priority patent/DE3739953A1/de
Priority to US07/130,057 priority patent/US4821595A/en
Priority to HU875996A priority patent/HU203821B/hu
Priority to FR878718304A priority patent/FR2612108B3/fr
Priority to CH795/88A priority patent/CH674685A5/de
Publication of DD297758A7 publication Critical patent/DD297758A7/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0444—Apparatus for wiring semiconductor or solid-state device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20341—Power elements as controlling elements
    • Y10T74/20354—Planar surface with orthogonal movement only

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Machine Tool Units (AREA)
  • Transmission Devices (AREA)
DD87300756A 1987-03-13 1987-03-13 Positionierungseinrichtung fuer die herstellung von halbleiterbauelementen DD297758A7 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DD87300756A DD297758A7 (de) 1987-03-13 1987-03-13 Positionierungseinrichtung fuer die herstellung von halbleiterbauelementen
DE19873739953 DE3739953A1 (de) 1987-03-13 1987-11-25 Positioniereinrichtung fuer die herstellung von halbleiterbauelementen
US07/130,057 US4821595A (en) 1987-03-13 1987-12-08 Positioning device for the production of semiconductor components
HU875996A HU203821B (en) 1987-03-13 1987-12-23 Positioner to the production of the semiconductor elements
FR878718304A FR2612108B3 (fr) 1987-03-13 1987-12-29 Installation de positionnement pour la fabrication de composants semi-conducteurs assure par une table de coordonnees x-y ayant un moyen d'entrainement respectif
CH795/88A CH674685A5 (enExample) 1987-03-13 1988-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD87300756A DD297758A7 (de) 1987-03-13 1987-03-13 Positionierungseinrichtung fuer die herstellung von halbleiterbauelementen

Publications (1)

Publication Number Publication Date
DD297758A7 true DD297758A7 (de) 1992-01-23

Family

ID=5587464

Family Applications (1)

Application Number Title Priority Date Filing Date
DD87300756A DD297758A7 (de) 1987-03-13 1987-03-13 Positionierungseinrichtung fuer die herstellung von halbleiterbauelementen

Country Status (6)

Country Link
US (1) US4821595A (enExample)
CH (1) CH674685A5 (enExample)
DD (1) DD297758A7 (enExample)
DE (1) DE3739953A1 (enExample)
FR (1) FR2612108B3 (enExample)
HU (1) HU203821B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5013016A (en) * 1990-06-18 1991-05-07 Sankyo Manufacturing Company, Ltd. Positioning table
DE69500707T2 (de) * 1994-02-07 1998-02-12 Ushiodenki K.K., Tokio/Tokyo Haltevorrichtung
US5735173A (en) * 1995-10-04 1998-04-07 Probot Incorporated Pivotally linked position control drive system
CN115179220B (zh) * 2022-08-26 2023-09-05 四川成焊宝玛焊接装备工程有限公司 一种前盖定位装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4006645A (en) * 1974-09-26 1977-02-08 The Perkin-Elmer Corporation X, Y, θ alignment mechanism
JPS5485678A (en) * 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
JPS55134414A (en) * 1979-04-06 1980-10-20 Hitachi Ltd Precise moving unit
JPS57154846A (en) * 1981-03-20 1982-09-24 Hitachi Ltd Xy table
US4492356A (en) * 1982-02-26 1985-01-08 Hitachi, Ltd. Precision parallel translation system
JPS59129633A (ja) * 1983-01-08 1984-07-26 Canon Inc ステージ装置

Also Published As

Publication number Publication date
FR2612108A1 (fr) 1988-09-16
HU203821B (en) 1991-09-30
HUT49423A (en) 1989-09-28
US4821595A (en) 1989-04-18
FR2612108B3 (fr) 1989-06-30
DE3739953A1 (de) 1988-09-22
CH674685A5 (enExample) 1990-06-29

Similar Documents

Publication Publication Date Title
DE3909292C2 (de) Längs- und Quer-Tischführungs- und -drehmechanismus
DE69003281T2 (de) Vorrichtung zum Stanzen oder Formen mit Kniehebeln für die hin- und hergehende Bewegung der Werkzeuge.
DE10017959C2 (de) Lineararbeitsvorrichtung
EP0267352A2 (de) Vorrichtung zur wiederholbaren, hochgenauen Festlegung der relativen räumlichen Lage eines ersten Gegenstandes in Bezug auf zweite Gegenstände
DE29521292U1 (de) Geschwindigkeits-Erhöhungsvorrichtung für eine geradlinige Bewegung eines Orthogonalkoordinaten-Roboters
DE4139423A1 (de) X-y-antriebsvorrichtung
DE19623656A1 (de) Werkstückzuführungsvorrichtung für eine Plattenverarbeitungsmaschine sowie eine diese Vorrichtung verwendende Plattenverarbeitungsmaschine
DE4430395C2 (de) Zweidimensionales Antriebssystem
DE2550831A1 (de) Antriebskupplung
DE69722935T2 (de) Hintergauge
DE3739953A1 (de) Positioniereinrichtung fuer die herstellung von halbleiterbauelementen
EP0349794A2 (de) Vorrichtung zum Kuppeln und Entkuppeln von Greiferschienenteilen
DE4008788C2 (enExample)
DE2851700C2 (de) Zentrier- und Spannvorrichtung für Werkstückträger (Paletten)
EP0274057A1 (de) Sicherheitskupplung für einen Roboter
DE2415235C3 (de) Lenkgetriebe mit Hilfskraftunterstützung, insbesondere für Kraftfahrzeuge
DE2409959A1 (de) Vorrichtung zur kontinuierlichen verschiebung eines mechanischen organs und damit ausgestattete maschinen
EP0226136A2 (de) Vorrichtung zum spanlosen Bearbeiten von Bauteilen
DE3412848A1 (de) Handhabungsgeraet
DE29511071U1 (de) Antriebseinheit eines Schlittens für Stanz-Biegemaschinen
DD158443A1 (de) Kreuztisch,insbesondere fuer drahtkontaktierungsgeraete
CH433893A (de) Einrichtung zum Führen eines Organes
DE3717464A1 (de) Montageeinrichtung
DD257784A1 (de) Einrichtung zum spiel- und verreissfreien klemmen von fuehrungen an positionsantrieben
DE3512514A1 (de) Querwalzmaschine mit geradlinig, hydraulisch angetriebenen walzschlitten

Legal Events

Date Code Title Description
NPI Change in the person, name or address of the patentee (addendum to changes before extension act)
RPV Change in the person, the name or the address of the representative (searches according to art. 11 and 12 extension act)
RPV Change in the person, the name or the address of the representative (searches according to art. 11 and 12 extension act)
RPV Change in the person, the name or the address of the representative (searches according to art. 11 and 12 extension act)
RPV Change in the person, the name or the address of the representative (searches according to art. 11 and 12 extension act)
ENJ Ceased due to non-payment of renewal fee