HU203821B - Positioner to the production of the semiconductor elements - Google Patents

Positioner to the production of the semiconductor elements Download PDF

Info

Publication number
HU203821B
HU203821B HU875996A HU599687A HU203821B HU 203821 B HU203821 B HU 203821B HU 875996 A HU875996 A HU 875996A HU 599687 A HU599687 A HU 599687A HU 203821 B HU203821 B HU 203821B
Authority
HU
Hungary
Prior art keywords
lever
drive
bearing
base plate
drive nut
Prior art date
Application number
HU875996A
Other languages
German (de)
English (en)
Hungarian (hu)
Other versions
HUT49423A (en
Inventor
Horst Podeschwa
Joachim Gerard
Wolfgang Schoepe
Original Assignee
Elektromat Veb
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat Veb filed Critical Elektromat Veb
Publication of HUT49423A publication Critical patent/HUT49423A/hu
Publication of HU203821B publication Critical patent/HU203821B/hu

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0444—Apparatus for wiring semiconductor or solid-state device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20341—Power elements as controlling elements
    • Y10T74/20354—Planar surface with orthogonal movement only

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Machine Tool Units (AREA)
  • Transmission Devices (AREA)
HU875996A 1987-03-13 1987-12-23 Positioner to the production of the semiconductor elements HU203821B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD87300756A DD297758A7 (de) 1987-03-13 1987-03-13 Positionierungseinrichtung fuer die herstellung von halbleiterbauelementen

Publications (2)

Publication Number Publication Date
HUT49423A HUT49423A (en) 1989-09-28
HU203821B true HU203821B (en) 1991-09-30

Family

ID=5587464

Family Applications (1)

Application Number Title Priority Date Filing Date
HU875996A HU203821B (en) 1987-03-13 1987-12-23 Positioner to the production of the semiconductor elements

Country Status (6)

Country Link
US (1) US4821595A (enExample)
CH (1) CH674685A5 (enExample)
DD (1) DD297758A7 (enExample)
DE (1) DE3739953A1 (enExample)
FR (1) FR2612108B3 (enExample)
HU (1) HU203821B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5013016A (en) * 1990-06-18 1991-05-07 Sankyo Manufacturing Company, Ltd. Positioning table
DE69500707T2 (de) * 1994-02-07 1998-02-12 Ushiodenki K.K., Tokio/Tokyo Haltevorrichtung
US5735173A (en) * 1995-10-04 1998-04-07 Probot Incorporated Pivotally linked position control drive system
CN115179220B (zh) * 2022-08-26 2023-09-05 四川成焊宝玛焊接装备工程有限公司 一种前盖定位装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4006645A (en) * 1974-09-26 1977-02-08 The Perkin-Elmer Corporation X, Y, θ alignment mechanism
JPS5485678A (en) * 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
JPS55134414A (en) * 1979-04-06 1980-10-20 Hitachi Ltd Precise moving unit
JPS57154846A (en) * 1981-03-20 1982-09-24 Hitachi Ltd Xy table
US4492356A (en) * 1982-02-26 1985-01-08 Hitachi, Ltd. Precision parallel translation system
JPS59129633A (ja) * 1983-01-08 1984-07-26 Canon Inc ステージ装置

Also Published As

Publication number Publication date
FR2612108A1 (fr) 1988-09-16
HUT49423A (en) 1989-09-28
US4821595A (en) 1989-04-18
FR2612108B3 (fr) 1989-06-30
DE3739953A1 (de) 1988-09-22
DD297758A7 (de) 1992-01-23
CH674685A5 (enExample) 1990-06-29

Similar Documents

Publication Publication Date Title
US5339749A (en) Table positioning mechanism
CN103551276A (zh) 一种智能高速点胶机
CN108362720A (zh) 一种半导体级单晶硅晶棒定向测试系统
DE2821360A1 (de) Koordinaten-messmaschine
DE19908692A1 (de) Mehrachsige Parallelstabkinematik nach dem Scherenprinzip mit direkter Erfassung des TCP
CN119253956A (zh) 一种中大型电机装配设备
CN117141864B (zh) 一种同步带式倍程机构
CN1106911C (zh) 多功能调节平台
JPH02116442A (ja) Ｘｙテーブル
JP2704392B2 (ja) リベッティングマシン
DE3819231A1 (de) Positioniereinrichtung fuer den tisch einer zerspanungsmaschine
DD297758A7 (de) Positionierungseinrichtung fuer die herstellung von halbleiterbauelementen
US5013016A (en) Positioning table
DE202021100028U1 (de) Eine Bildhauervorrichtung
JP2803880B2 (ja) 直角座標型ロボット
CN222267697U (zh) 一种三轴运动模组的导向机构
HU200861B (en) Drive for high-speed bonding equipments
DD202405A5 (de) Waelzgetriebe bei einer verzahnungsmaschine fuer evolventenverzahnung
EP0512356A2 (de) Messeinrichtung
JP4030215B2 (ja) 加工装置
CN214603023U (zh) 高速高精度运动平台
CN220762315U (zh) 一种精密uvw中空对位平台
JPS6339369B2 (enExample)
DE4221166C2 (de) Justiervorrichtung
DE3404707A1 (de) Reibantriebsvorrichtung

Legal Events

Date Code Title Description
HMM4 Cancellation of final prot. due to non-payment of fee