FR2552416B1 - Procede de preparation de trifluorure d'azote par reaction gaz-solide - Google Patents

Procede de preparation de trifluorure d'azote par reaction gaz-solide

Info

Publication number
FR2552416B1
FR2552416B1 FR8414798A FR8414798A FR2552416B1 FR 2552416 B1 FR2552416 B1 FR 2552416B1 FR 8414798 A FR8414798 A FR 8414798A FR 8414798 A FR8414798 A FR 8414798A FR 2552416 B1 FR2552416 B1 FR 2552416B1
Authority
FR
France
Prior art keywords
preparation
gas
solid reaction
nitrogen trifluoride
trifluoride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8414798A
Other languages
English (en)
Other versions
FR2552416A1 (fr
Inventor
Minoru Aramaki
Yoshiyuki Kobayashi
Tamio Nakamura
Hisaji Nakano
Takashi Suenaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Publication of FR2552416A1 publication Critical patent/FR2552416A1/fr
Application granted granted Critical
Publication of FR2552416B1 publication Critical patent/FR2552416B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C01B21/0832—Binary compounds of nitrogen with halogens
    • C01B21/0835—Nitrogen trifluoride

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Catalysts (AREA)
  • Silicon Compounds (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
FR8414798A 1983-09-27 1984-09-26 Procede de preparation de trifluorure d'azote par reaction gaz-solide Expired FR2552416B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58177016A JPS6071503A (ja) 1983-09-27 1983-09-27 Νｆ↓３の製造法

Publications (2)

Publication Number Publication Date
FR2552416A1 FR2552416A1 (fr) 1985-03-29
FR2552416B1 true FR2552416B1 (fr) 1987-02-13

Family

ID=16023685

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8414798A Expired FR2552416B1 (fr) 1983-09-27 1984-09-26 Procede de preparation de trifluorure d'azote par reaction gaz-solide

Country Status (6)

Country Link
US (1) US4543242A (fr)
JP (1) JPS6071503A (fr)
DE (1) DE3435298A1 (fr)
FR (1) FR2552416B1 (fr)
GB (1) GB2146978B (fr)
IT (1) IT1176778B (fr)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4711680A (en) * 1983-05-23 1987-12-08 Rockwell International Corporation Pure fluorine gas generator
US4759179A (en) * 1987-07-20 1988-07-26 Rockwell International Corporation Method for generating electronically excited NF for use in a laser
JPH0755807B2 (ja) * 1987-11-04 1995-06-14 三井東圧化学株式会社 三弗化窒素の製造方法
JPH01261208A (ja) * 1988-04-11 1989-10-18 Mitsui Toatsu Chem Inc 三弗化窒素ガスの精製方法
JPH0280310A (ja) * 1988-06-01 1990-03-20 Mitsui Toatsu Chem Inc 三弗化窒素ガスの精製方法
EP0424727B1 (fr) * 1989-10-26 1995-04-19 MITSUI TOATSU CHEMICALS, Inc. Procédé de production de trifluorure d'azote
JPH0798648B2 (ja) * 1990-01-10 1995-10-25 セントラル硝子株式会社 Ｎｆ３ガスの精製方法
US5637285A (en) * 1996-01-30 1997-06-10 Air Products And Chemicals, Inc. Process for nitrogen trifluoride synthesis
JP3727797B2 (ja) * 1998-05-22 2005-12-14 セントラル硝子株式会社 三フッ化窒素の製造方法
US7018598B2 (en) * 2000-05-12 2006-03-28 Showa Denko K.K. Process for producing nitrogen trifluoride
US6986874B2 (en) 2000-12-14 2006-01-17 The Boc Group, Inc. Method and apparatus for the production of nitrogen trifluoride
RU2184698C1 (ru) * 2001-05-08 2002-07-10 Закрытое акционерное общество Научно-производственное объединение "ПиМ-Инвест" Способ получения трифторида азота
RU2178384C1 (ru) * 2001-05-11 2002-01-20 Общество с ограниченной ответственностью "НьюКем" Способ получения фторидов азота
RU2182556C1 (ru) * 2001-09-28 2002-05-20 Зао "Астор-Электроникс" Способ получения трифторида азота
US6908601B2 (en) * 2002-02-08 2005-06-21 The Boc Group, Inc. Method for the production of nitrogen trifluoride
US6790428B2 (en) * 2002-03-20 2004-09-14 Air Products And Chemicals, Inc. Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride
KR100452233B1 (ko) * 2002-07-19 2004-10-12 한국과학기술연구원 젯트루프식 분사형 반응기를 이용한 삼불화질소 제조방법
US20040096386A1 (en) * 2002-11-19 2004-05-20 Syvret Robert George Method for nitrogen trifluoride production
US7128885B2 (en) * 2002-12-23 2006-10-31 The Boc Group, Inc. NF3 production reactor
US7074378B2 (en) * 2004-01-23 2006-07-11 Air Products And Chemicals, Inc. Process for the purification of NF3
US7045107B2 (en) * 2004-09-20 2006-05-16 Air Products And Chemicals, Inc. Process for the production of nitrogen trifluoride
JP5034322B2 (ja) 2005-07-06 2012-09-26 セントラル硝子株式会社 ハロゲン化窒素の合成方法
US7413722B2 (en) * 2005-08-04 2008-08-19 Foosung Co., Ltd. Method and apparatus for manufacturing nitrogen trifluoride
US8163262B1 (en) 2011-01-04 2012-04-24 Omotowa Bamidele A Method for production of nitrogen trifluoride from trimethylsilylamines

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA625055A (en) * 1961-08-01 D. Marsh Frank Preparation of nitrogen fluorides
US3032400A (en) * 1960-01-14 1962-05-01 Du Pont Method of producing nitrogen fluorides
US4001380A (en) * 1961-05-16 1977-01-04 Allied Chemical Corporation Manufacture of nitrogen trifluoride
US3304248A (en) * 1963-07-24 1967-02-14 Stauffer Chemical Co Process for the production of nitrogen fluorides
US4091081A (en) * 1977-04-19 1978-05-23 Air Products And Chemicals, Inc. Preparation of nitrogen trifluoride
JPS558926A (en) * 1978-07-03 1980-01-22 Bridgestone Corp Pneumatic tire for vehicle
US4284617A (en) * 1979-11-30 1981-08-18 The United States Of America As Represented By The Secretary Of The Navy Solid compositions for generation fluorine and gaseous fluorine compounds

Also Published As

Publication number Publication date
IT8422794A0 (it) 1984-09-24
US4543242A (en) 1985-09-24
JPS6221724B2 (fr) 1987-05-14
JPS6071503A (ja) 1985-04-23
FR2552416A1 (fr) 1985-03-29
GB2146978B (en) 1986-11-19
IT8422794A1 (it) 1986-03-24
GB8423776D0 (en) 1984-10-24
GB2146978A (en) 1985-05-01
DE3435298C2 (fr) 1988-01-28
IT1176778B (it) 1987-08-18
DE3435298A1 (de) 1985-04-11

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