DE3727678C2 - - Google Patents

Info

Publication number
DE3727678C2
DE3727678C2 DE3727678A DE3727678A DE3727678C2 DE 3727678 C2 DE3727678 C2 DE 3727678C2 DE 3727678 A DE3727678 A DE 3727678A DE 3727678 A DE3727678 A DE 3727678A DE 3727678 C2 DE3727678 C2 DE 3727678C2
Authority
DE
Germany
Prior art keywords
film
alloy
pattern
mask
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3727678A
Other languages
German (de)
English (en)
Other versions
DE3727678A1 (de
Inventor
Nobuyuki Yoshioka
Nobuo Fujiwara
Yaichirou Itami Hyogo Jp Watakabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61195991A external-priority patent/JPS6351632A/ja
Priority claimed from JP6625487A external-priority patent/JPH0628230B2/ja
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of DE3727678A1 publication Critical patent/DE3727678A1/de
Application granted granted Critical
Publication of DE3727678C2 publication Critical patent/DE3727678C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE19873727678 1986-08-20 1987-08-19 Roentgenmaske und verfahren zur herstellung einer roentgenmaske Granted DE3727678A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP61195991A JPS6351632A (ja) 1986-08-20 1986-08-20 Ｘ線露光用マスクとその製造方法
JP6625487A JPH0628230B2 (ja) 1987-03-20 1987-03-20 Ｘ線露光用マスクおよびその製造方法

Publications (2)

Publication Number Publication Date
DE3727678A1 DE3727678A1 (de) 1988-02-25
DE3727678C2 true DE3727678C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-05-07

Family

ID=26407431

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19873727678 Granted DE3727678A1 (de) 1986-08-20 1987-08-19 Roentgenmaske und verfahren zur herstellung einer roentgenmaske

Country Status (2)

Country Link
US (1) US4873162A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3727678A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0563251A1 (en) * 1990-12-20 1993-10-06 Exxon Chemical Patents Inc. Uv/eb curable butyl copolymers for lithographic and corrosion-resistant coating applications
JP3071876B2 (ja) * 1991-01-08 2000-07-31 株式会社東芝 Ｘ線マスク、その製造方法、及びこれを用いた露光方法
US5178975A (en) * 1991-01-25 1993-01-12 International Business Machines Corporation High resolution X-ray mask having high aspect ratio absorber patterns
JPH05343299A (ja) * 1992-06-08 1993-12-24 Mitsubishi Electric Corp Ｘ線マスク及びｘ線マスクの製造方法
US5318687A (en) * 1992-08-07 1994-06-07 International Business Machines Corporation Low stress electrodeposition of gold for X-ray mask fabrication
US5677090A (en) * 1995-02-23 1997-10-14 Mitsubishi Denki Kabushiki Kaisha Method of making X-ray mask having reduced stress
JP3578872B2 (ja) * 1995-10-26 2004-10-20 三菱電機株式会社 Ｘ線マスクの製造方法および加熱装置
JP3588222B2 (ja) * 1997-03-24 2004-11-10 三菱電機株式会社 Ｘ線マスクの製造方法
JPH11288863A (ja) 1998-04-01 1999-10-19 Mitsubishi Electric Corp Ｘ線マスクおよびその製造方法
TW352419B (en) * 1998-06-04 1999-02-11 United Microelectronics Corp Composition of X-ray mask
US6106351A (en) * 1998-09-02 2000-08-22 Micron Technology, Inc. Methods of manufacturing microelectronic substrate assemblies for use in planarization processes
JP2000100698A (ja) 1998-09-22 2000-04-07 Mitsubishi Electric Corp Ｘ線マスクおよびその製造方法
US9145332B2 (en) 2012-08-16 2015-09-29 Infineon Technologies Ag Etching apparatus and method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4037111A (en) * 1976-06-08 1977-07-19 Bell Telephone Laboratories, Incorporated Mask structures for X-ray lithography
JPS60220933A (ja) * 1984-04-18 1985-11-05 Nec Corp Ｘ線露光マスク及びその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61116358A (ja) * 1984-11-09 1986-06-03 Mitsubishi Electric Corp フオトマスク材料
JPH0682602B2 (ja) * 1985-08-16 1994-10-19 株式会社日立製作所 Ｘ線リングラフィー用マスクおよびその製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4037111A (en) * 1976-06-08 1977-07-19 Bell Telephone Laboratories, Incorporated Mask structures for X-ray lithography
JPS60220933A (ja) * 1984-04-18 1985-11-05 Nec Corp Ｘ線露光マスク及びその製造方法
US4634643A (en) * 1984-04-18 1987-01-06 Nec X-ray mask and method of manufacturing the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
US-Z.: Solid State Techn. Jan. 1980, S. 53-58 *

Also Published As

Publication number Publication date
DE3727678A1 (de) 1988-02-25
US4873162A (en) 1989-10-10

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)