DE3677169D1 - Hochreine siliziumnitridfaser und verfahren zu ihrer herstellung. - Google Patents

Hochreine siliziumnitridfaser und verfahren zu ihrer herstellung.

Info

Publication number
DE3677169D1
DE3677169D1 DE8686308752T DE3677169T DE3677169D1 DE 3677169 D1 DE3677169 D1 DE 3677169D1 DE 8686308752 T DE8686308752 T DE 8686308752T DE 3677169 T DE3677169 T DE 3677169T DE 3677169 D1 DE3677169 D1 DE 3677169D1
Authority
DE
Germany
Prior art keywords
production
silicon nitride
high purity
purity silicon
nitride fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686308752T
Other languages
English (en)
Inventor
Mikiro Arai
Hayato Nishii
Osamu Funayama
Takeshi Isoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tonen General Sekiyu KK
Original Assignee
Toa Nenryo Kogyyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toa Nenryo Kogyyo KK filed Critical Toa Nenryo Kogyyo KK
Application granted granted Critical
Publication of DE3677169D1 publication Critical patent/DE3677169D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • DTEXTILES; PAPER
    • D01NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01FCHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F9/00Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
    • D01F9/08Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
    • D01F9/10Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material by decomposition of organic substances
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/589Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2904Staple length fiber
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913Rod, strand, filament or fiber

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Textile Engineering (AREA)
  • Inorganic Fibers (AREA)
  • Ceramic Products (AREA)
DE8686308752T 1985-11-19 1986-11-11 Hochreine siliziumnitridfaser und verfahren zu ihrer herstellung. Expired - Lifetime DE3677169D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60257824A JPS62125015A (ja) 1985-11-19 1985-11-19 高純度窒化珪素繊維およびその製法

Publications (1)

Publication Number Publication Date
DE3677169D1 true DE3677169D1 (de) 1991-02-28

Family

ID=17311632

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686308752T Expired - Lifetime DE3677169D1 (de) 1985-11-19 1986-11-11 Hochreine siliziumnitridfaser und verfahren zu ihrer herstellung.

Country Status (4)

Country Link
US (1) US4818611A (de)
EP (1) EP0227283B1 (de)
JP (1) JPS62125015A (de)
DE (1) DE3677169D1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6060237A (en) * 1985-02-26 2000-05-09 Biostar, Inc. Devices and methods for optical detection of nucleic acid hybridization
US4895709A (en) * 1985-04-26 1990-01-23 Sri International Method of preparing metal carbides, nitrides, and the like
JPH0618885B2 (ja) * 1986-02-12 1994-03-16 東燃株式会社 ポリシロキサザンおよびその製法
US5482830A (en) * 1986-02-25 1996-01-09 Biostar, Inc. Devices and methods for detection of an analyte based upon light interference
JP2666950B2 (ja) * 1988-03-05 1997-10-22 東燃株式会社 窒化珪素質無機繊維
JP2608061B2 (ja) * 1987-03-20 1997-05-07 日本原子力研究所 高純度高強度窒化ケイ素連続無機繊維及びその製造方法
JPH0823087B2 (ja) * 1987-08-13 1996-03-06 財団法人石油産業活性化センタ− 窒化珪素繊維の製造方法
DE3743826A1 (de) * 1987-12-23 1989-07-06 Hoechst Ag Polymere hydridothiosilazane, verfahren zu ihrer herstellung, aus ihnen herstellbare, siliziumnitrid enthaltende keramische materialien, sowie deren herstellung
JP2553371B2 (ja) * 1988-01-09 1996-11-13 東芝セラミックス株式会社 窒化珪素および炭素の複合物の製造方法
DE68926260T2 (de) * 1988-02-29 1996-08-22 Toa Nenryo Kogyo Kk Formkörper aus Keramik auf Siliciumnitrid-Basis und Verfahren zu ihrer Herstellung
JPH01317177A (ja) * 1988-03-05 1989-12-21 Tonen Corp 無機繊維強化セラミックス複合材料
US5032551A (en) * 1988-03-05 1991-07-16 Toa Nenryo Kogyo Kabushiki Kaisha Silicon nitride based ceramic fibers, process of preparing same and composite material containing same
JPH0291222A (ja) * 1988-09-29 1990-03-30 Tonen Corp 異形無機繊維及びその製造方法
US4929704A (en) * 1988-12-20 1990-05-29 Hercules Incorporated Isocyanate- and isothiocyanate-modified polysilazane ceramic precursors
US5639671A (en) * 1989-09-18 1997-06-17 Biostar, Inc. Methods for optimizing of an optical assay device
US5541057A (en) * 1989-09-18 1996-07-30 Biostar, Inc. Methods for detection of an analyte
US5132354A (en) * 1990-06-15 1992-07-21 Ethyl Corporation Silicon nitride precursor polymer
US5955377A (en) * 1991-02-11 1999-09-21 Biostar, Inc. Methods and kits for the amplification of thin film based assays
US5550063A (en) * 1991-02-11 1996-08-27 Biostar, Inc. Methods for production of an optical assay device
US5292830A (en) * 1991-06-20 1994-03-08 Tonen Corporation Thermosetting copolymers, silicon carbide-based fiber and processes for producing same
US5418136A (en) * 1991-10-01 1995-05-23 Biostar, Inc. Devices for detection of an analyte based upon light interference
US5494829A (en) * 1992-07-31 1996-02-27 Biostar, Inc. Devices and methods for detection of an analyte based upon light interference
JPH06294018A (ja) * 1993-04-08 1994-10-21 Honda Motor Co Ltd 結晶質セラミックファイバー及びその製造方法
US5552272A (en) * 1993-06-10 1996-09-03 Biostar, Inc. Detection of an analyte by fluorescence using a thin film optical device
TWI452419B (zh) * 2008-01-28 2014-09-11 Az Electronic Mat Ip Japan Kk 細微圖案光罩及其製造方法、及使用其之細微圖案形成方法
US8084186B2 (en) * 2009-02-10 2011-12-27 Az Electronic Materials Usa Corp. Hardmask process for forming a reverse tone image using polysilazane
CN109183422A (zh) * 2018-07-25 2019-01-11 佛山腾鲤新能源科技有限公司 一种抗氧化涂层碳纤维的制备方法
CN112694336B (zh) * 2020-12-29 2021-11-16 哈尔滨工业大学 一种高纯α相氮化硅纤维毡的制备方法
CN115140714A (zh) * 2022-06-07 2022-10-04 哈尔滨工业大学 一种Si3N4气凝胶及其制备方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3244480A (en) * 1964-03-03 1966-04-05 Robert C Johnson Synthesis of fibrous silicon nitride
US3640693A (en) * 1969-02-03 1972-02-08 United Aircraft Corp Method of forming silicon compound fibers
DE2243527A1 (de) * 1972-09-05 1974-04-18 Bayer Ag Formkoerper aus homogenen mischungen von siliciumcarbid und siliciumnitrid und verfahren zu ihrer herstellung
US4036653A (en) * 1975-05-28 1977-07-19 E. I. Du Pont De Nemours And Company Amorphous silicon nitride composition containing carbon, and vapor phase process
US4101616A (en) * 1975-10-30 1978-07-18 Gte Sylvania Incorporated Process for producing Si3 N4 article
US4397828A (en) * 1981-11-16 1983-08-09 Massachusetts Institute Of Technology Stable liquid polymeric precursor to silicon nitride and process
JPS59207812A (ja) * 1983-05-10 1984-11-26 Toa Nenryo Kogyo Kk 窒化珪素の製造法
JPS60145903A (ja) * 1983-12-29 1985-08-01 Toa Nenryo Kogyo Kk 無機ポリシラザン及びその合成方法
US4482669A (en) * 1984-01-19 1984-11-13 Massachusetts Institute Of Technology Preceramic organosilazane polymers
US4535007A (en) * 1984-07-02 1985-08-13 Dow Corning Corporation Silicon nitride-containing ceramics
US4761389A (en) * 1985-04-01 1988-08-02 Dow Corning Corporation Process for preparing ceramic materials with reduced carbon levels

Also Published As

Publication number Publication date
EP0227283B1 (de) 1991-01-23
JPH042686B2 (de) 1992-01-20
US4818611A (en) 1989-04-04
JPS62125015A (ja) 1987-06-06
EP0227283A3 (en) 1987-07-29
EP0227283A2 (de) 1987-07-01

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: TONEN CORP., TOKIO/TOKYO, JP

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee