DE3575813D1 - Verfahren zum herstellen einer halbleiteranordnung mit einer gateelektrodenstapel-struktur. - Google Patents

Verfahren zum herstellen einer halbleiteranordnung mit einer gateelektrodenstapel-struktur.

Info

Publication number
DE3575813D1
DE3575813D1 DE8585105571T DE3575813T DE3575813D1 DE 3575813 D1 DE3575813 D1 DE 3575813D1 DE 8585105571 T DE8585105571 T DE 8585105571T DE 3575813 T DE3575813 T DE 3575813T DE 3575813 D1 DE3575813 D1 DE 3575813D1
Authority
DE
Germany
Prior art keywords
producing
gate electrode
stack structure
electrode stack
semiconductor arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585105571T
Other languages
English (en)
Inventor
Kuniyoshi C O Patent Yoshikawa
Masaki C O Patent Divisio Sato
Seiichi C O Patent Divisi Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP59090414A external-priority patent/JPS60234372A/ja
Priority claimed from JP14533684A external-priority patent/JPS6124283A/ja
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3575813D1 publication Critical patent/DE3575813D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
    • H01L29/7881—Programmable transistors with only two possible levels of programmation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/401—Multistep manufacturing processes
    • H01L29/4011—Multistep manufacturing processes for data storage electrodes
    • H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Non-Volatile Memory (AREA)
DE8585105571T 1984-05-07 1985-05-07 Verfahren zum herstellen einer halbleiteranordnung mit einer gateelektrodenstapel-struktur. Expired - Lifetime DE3575813D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP59090414A JPS60234372A (ja) 1984-05-07 1984-05-07 半導体装置の製造方法
JP14533684A JPS6124283A (ja) 1984-07-13 1984-07-13 半導体装置の製造方法

Publications (1)

Publication Number Publication Date
DE3575813D1 true DE3575813D1 (de) 1990-03-08

Family

ID=26431898

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585105571T Expired - Lifetime DE3575813D1 (de) 1984-05-07 1985-05-07 Verfahren zum herstellen einer halbleiteranordnung mit einer gateelektrodenstapel-struktur.

Country Status (2)

Country Link
EP (1) EP0160965B1 (de)
DE (1) DE3575813D1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4789883A (en) * 1985-12-17 1988-12-06 Advanced Micro Devices, Inc. Integrated circuit structure having gate electrode and underlying oxide and method of making same
EP0253014B1 (de) * 1986-07-18 1990-04-11 Nippondenso Co., Ltd. Verfahren zur Herstellung einer nichtflüchtigen Halbleiterspeicheranordnung mit Möglichkeit zum Einschreiben und Löschen
US4905062A (en) * 1987-11-19 1990-02-27 Texas Instruments Incorporated Planar famos transistor with trench isolation
FR2634318B1 (fr) * 1988-07-13 1992-02-21 Commissariat Energie Atomique Procede de fabrication d'une cellule de memoire integree
US5336628A (en) * 1988-10-25 1994-08-09 Commissariat A L'energie Atomique Method for fabricating semiconductor memory device
US4992391A (en) * 1989-11-29 1991-02-12 Advanced Micro Devices, Inc. Process for fabricating a control gate for a floating gate FET
JPH0637317A (ja) * 1990-04-11 1994-02-10 General Motors Corp <Gm> 薄膜トランジスタおよびその製造方法
JPH088317B2 (ja) * 1990-04-24 1996-01-29 株式会社東芝 半導体記憶装置及びその製造方法
US5310692A (en) * 1992-05-29 1994-05-10 Sgs-Thomson Microelectronics, Inc. Method of forming a MOSFET structure with planar surface
US6034410A (en) * 1994-01-14 2000-03-07 Stmicroelectronics, Inc. MOSFET structure with planar surface
FR2820751B1 (fr) 2001-02-09 2005-01-14 Bostik Findley Adhesifs thermofusibles auto-adhesifs extrudables a chaud et leur utilisation dans les films multicouches

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4183134A (en) * 1977-02-15 1980-01-15 Westinghouse Electric Corp. High yield processing for silicon-on-sapphire CMOS integrated circuits
JPS53124084A (en) * 1977-04-06 1978-10-30 Hitachi Ltd Semiconductor memory device containing floating type poly silicon layer and its manufacture
US4258466A (en) * 1978-11-02 1981-03-31 Texas Instruments Incorporated High density electrically programmable ROM
JPS5713772A (en) * 1980-06-30 1982-01-23 Hitachi Ltd Semiconductor device and manufacture thereof
US4412310A (en) * 1980-10-14 1983-10-25 Intel Corporation EPROM Cell with reduced programming voltage and method of fabrication

Also Published As

Publication number Publication date
EP0160965A3 (en) 1987-09-09
EP0160965B1 (de) 1990-01-31
EP0160965A2 (de) 1985-11-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee