DE3235304A1 - Verfahren zum herstellen von siliciumnitrid-pulver - Google Patents

Verfahren zum herstellen von siliciumnitrid-pulver

Info

Publication number
DE3235304A1
DE3235304A1 DE19823235304 DE3235304A DE3235304A1 DE 3235304 A1 DE3235304 A1 DE 3235304A1 DE 19823235304 DE19823235304 DE 19823235304 DE 3235304 A DE3235304 A DE 3235304A DE 3235304 A1 DE3235304 A1 DE 3235304A1
Authority
DE
Germany
Prior art keywords
silicon nitride
powder
silicon
nitrogen
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19823235304
Other languages
German (de)
English (en)
Inventor
Kiyoshi Kasai
Sinji Nagata
Takaaki Shinnanyo Yamaguchi Tsukidate
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Corp
Original Assignee
Toyo Soda Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Soda Manufacturing Co Ltd filed Critical Toyo Soda Manufacturing Co Ltd
Publication of DE3235304A1 publication Critical patent/DE3235304A1/de
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
DE19823235304 1981-09-24 1982-09-24 Verfahren zum herstellen von siliciumnitrid-pulver Ceased DE3235304A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14961581A JPS5855316A (ja) 1981-09-24 1981-09-24 窒化珪素粉末の製造法

Publications (1)

Publication Number Publication Date
DE3235304A1 true DE3235304A1 (de) 1983-04-14

Family

ID=15479076

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19823235304 Ceased DE3235304A1 (de) 1981-09-24 1982-09-24 Verfahren zum herstellen von siliciumnitrid-pulver

Country Status (2)

Country Link
JP (1) JPS5855316A (enrdf_load_stackoverflow)
DE (1) DE3235304A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3605126A1 (de) * 1985-02-18 1986-08-21 Toyo Soda Manufacturing Co., Ltd., Shinnanyo, Yamaguchi Verfahren zur herstellung eines siliciumnitridpulvers mit hohem (alpha)-typ-gehalt
EP2415708A4 (en) * 2009-03-30 2014-06-25 Ube Industries NITROGEN-CONTAINING SILANE POWDER COMPOUND AND MANUFACTURING METHOD THEREFOR

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5939704A (ja) * 1982-08-26 1984-03-05 Asahi Glass Co Ltd 窒化珪素の合成法
JPS62148309A (ja) * 1985-12-23 1987-07-02 Toyo Soda Mfg Co Ltd 高α型窒化珪素粉末の製造法
JP2907366B2 (ja) * 1993-05-18 1999-06-21 宇部興産株式会社 結晶質窒化珪素粉末の製造法
JP5589294B2 (ja) * 2009-03-30 2014-09-17 宇部興産株式会社 含窒素シラン化合物粉末及びその製造方法
JP5589295B2 (ja) * 2009-03-30 2014-09-17 宇部興産株式会社 含窒素シラン化合物粉末及びその製造方法
CN104087291B (zh) 2010-03-31 2017-04-12 宇部兴产株式会社 赛隆系氧氮化物荧光体的制造方法以及赛隆系氧氮化物荧光体
JP5407999B2 (ja) * 2010-03-31 2014-02-05 宇部興産株式会社 結晶質窒化ケイ素粉末の製造方法
KR101574888B1 (ko) * 2014-04-14 2015-12-07 오씨아이 주식회사 입자크기의 균일도를 향상시킨 연속식 질화규소 제조장치 및 제조방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4101616A (en) * 1975-10-30 1978-07-18 Gte Sylvania Incorporated Process for producing Si3 N4 article
GB2035981A (en) * 1978-11-08 1980-06-25 Battelle Memorial Institute Silicon nitride-based sintering composition
GB2040902A (en) * 1979-01-10 1980-09-03 Toyo Soda Mfg Co Ltd High purity silicon nitride and its production

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5925666B2 (ja) * 1976-04-26 1984-06-20 株式会社サト−研究所 ハンドラベラ−等における定圧機構
JPS54124898A (en) * 1978-03-22 1979-09-28 Toyo Soda Mfg Co Ltd Preparation of silicon nitride

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4101616A (en) * 1975-10-30 1978-07-18 Gte Sylvania Incorporated Process for producing Si3 N4 article
GB2035981A (en) * 1978-11-08 1980-06-25 Battelle Memorial Institute Silicon nitride-based sintering composition
GB2040902A (en) * 1979-01-10 1980-09-03 Toyo Soda Mfg Co Ltd High purity silicon nitride and its production

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
US-Z: Journal of the American Ceramic Society, Vol.56, Nr.12, S.628-633, 1973 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3605126A1 (de) * 1985-02-18 1986-08-21 Toyo Soda Manufacturing Co., Ltd., Shinnanyo, Yamaguchi Verfahren zur herstellung eines siliciumnitridpulvers mit hohem (alpha)-typ-gehalt
US4716028A (en) * 1985-02-18 1987-12-29 Toyo Soda Manufacturing Co., Ltd. Process for preparation of high-type silicon nitride powder
EP2415708A4 (en) * 2009-03-30 2014-06-25 Ube Industries NITROGEN-CONTAINING SILANE POWDER COMPOUND AND MANUFACTURING METHOD THEREFOR

Also Published As

Publication number Publication date
JPS5855316A (ja) 1983-04-01
JPS6111886B2 (enrdf_load_stackoverflow) 1986-04-05

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8127 New person/name/address of the applicant

Owner name: TOSOH CORP., SHINNANYO, YAMAGUCHI, JP

8110 Request for examination paragraph 44
8131 Rejection