DE3222189C2 - - Google Patents

Info

Publication number
DE3222189C2
DE3222189C2 DE19823222189 DE3222189A DE3222189C2 DE 3222189 C2 DE3222189 C2 DE 3222189C2 DE 19823222189 DE19823222189 DE 19823222189 DE 3222189 A DE3222189 A DE 3222189A DE 3222189 C2 DE3222189 C2 DE 3222189C2
Authority
DE
Germany
Prior art keywords
plasma
column
zone
frequency
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE19823222189
Other languages
German (de)
English (en)
Other versions
DE3222189A1 (de
Inventor
Hans Dr.Rer.Nat. 5370 Kall De Beerwald
Guenter Dr.Rer.Nat. Boehm
Guenter Dr.Rer.Nat. 4630 Bochum De Glomski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to DE19823222189 priority Critical patent/DE3222189A1/de
Publication of DE3222189A1 publication Critical patent/DE3222189A1/de
Application granted granted Critical
Publication of DE3222189C2 publication Critical patent/DE3222189C2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
    • C03B37/01815—Reactant deposition burners or deposition heating means
    • C03B37/01823—Plasma deposition burners or heating means
    • C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Chemical Vapour Deposition (AREA)
DE19823222189 1982-06-12 1982-06-12 Plasmaverfahren zur innenbeschichtung von rohren mit dielektrischem material Granted DE3222189A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19823222189 DE3222189A1 (de) 1982-06-12 1982-06-12 Plasmaverfahren zur innenbeschichtung von rohren mit dielektrischem material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19823222189 DE3222189A1 (de) 1982-06-12 1982-06-12 Plasmaverfahren zur innenbeschichtung von rohren mit dielektrischem material

Publications (2)

Publication Number Publication Date
DE3222189A1 DE3222189A1 (de) 1984-01-26
DE3222189C2 true DE3222189C2 (enExample) 1990-05-31

Family

ID=6165952

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19823222189 Granted DE3222189A1 (de) 1982-06-12 1982-06-12 Plasmaverfahren zur innenbeschichtung von rohren mit dielektrischem material

Country Status (1)

Country Link
DE (1) DE3222189A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4034211C1 (en) * 1990-10-27 1991-11-14 Schott Glaswerke, 6500 Mainz, De Coating interior of pipe-glass tube - comprises coupling HF energy to tube using resonator to deliver pulsed microwave discharges

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2575151B1 (fr) * 1984-12-21 1991-08-30 France Etat Procede et dispositif de fabrication de preformes pour fibres optiques, et preformes obtenues par ce procede
US4675206A (en) * 1985-04-19 1987-06-23 Sumitomo Electric Industries, Ltd. Process for the production of a surface-coated article
FR2600327B1 (fr) * 1986-06-20 1992-04-17 Lenoane Georges Procede de fabrication de preformes pour fibres optiques et mandrin utilisable pour la mise en oeuvre de ce procede, application a la fabrication de fibres optiques monomodes
DE3632748A1 (de) * 1986-09-26 1988-04-07 Ver Foerderung Inst Kunststoff Verfahren zur beschichtung von hohlkoerpern
FR2628730B1 (fr) * 1988-03-16 1990-06-29 France Etat Dispositif de fabrication de preformes pour fibres optiques
DE3820237C1 (enExample) * 1988-06-14 1989-09-14 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften Ev, 3400 Goettingen, De
FR2677972B1 (fr) * 1991-06-21 1996-12-06 France Telecom Procede de fabrication de preformes pour fibres optiques et dispositif pour la mise en óoeuvre de ce procede.
DE4242324A1 (de) * 1992-04-30 1994-06-16 Max Planck Gesellschaft Verfahren und Einrichtung zur Behandlung der Innenwand eines Hohlkörpers mittels eines Mikrowellenplasmas
AU2349401A (en) * 1999-11-12 2001-05-30 Knn Systemtechnik Gmbh Method and device for treating and coating non-conductive, dielectric surfaces using plasmas excited by microwaves
US7300684B2 (en) * 2004-07-15 2007-11-27 Sub-One Technology, Inc. Method and system for coating internal surfaces of prefabricated process piping in the field
US7541069B2 (en) * 2005-03-07 2009-06-02 Sub-One Technology, Inc. Method and system for coating internal surfaces using reverse-flow cycling
DE102007043333B4 (de) * 2007-09-12 2011-05-05 Maschinenfabrik Reinhausen Gmbh Verfahren zur Behandlung und Untersuchung von Bauteilen
NL2004874C2 (nl) 2010-06-11 2011-12-19 Draka Comteq Bv Werkwijze voor het vervaardigen van een primaire voorvorm.

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1427327A (en) * 1972-06-08 1976-03-10 Standard Telephones Cables Ltd Glass optical fibres
DE2444100C3 (de) * 1974-09-14 1979-04-12 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zur Herstellung von innenbeschichteten Glasrohren zum Ziehen von Lichtleitfasern
DE2642949C3 (de) * 1976-09-24 1980-11-20 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zur Herstellung von innenbeschichteten Glasrohren zum Ziehen von Lichtleitfasern
CA1080562A (en) * 1977-02-10 1980-07-01 Frederick D. King Method of and apparatus for manufacturing an optical fibre with plasma activated deposition in a tube
CH622963A5 (en) * 1977-03-18 1981-05-15 Sulzer Ag Appliance for the irradiation of flowable material, especially sewage sludge, by means of electron beams
DE2929166A1 (de) * 1979-07-19 1981-01-29 Philips Patentverwaltung Verfahren zur herstellung von lichtleitfasern
GB2068359B (en) * 1980-01-29 1983-06-08 Ass Elect Ind Manufacture of optical fibre preforms
DE3010314C2 (de) * 1980-03-18 1982-01-07 Beerwald, Hans, Dr.Rer.Nat., 5370 Kall Verfahren zur innenbeschichtung von elektrisch nicht leitfähigen Rohren mittels Gasentladungen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4034211C1 (en) * 1990-10-27 1991-11-14 Schott Glaswerke, 6500 Mainz, De Coating interior of pipe-glass tube - comprises coupling HF energy to tube using resonator to deliver pulsed microwave discharges

Also Published As

Publication number Publication date
DE3222189A1 (de) 1984-01-26

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee