DE3222189A1 - Plasmaverfahren zur innenbeschichtung von rohren mit dielektrischem material - Google Patents
Plasmaverfahren zur innenbeschichtung von rohren mit dielektrischem materialInfo
- Publication number
- DE3222189A1 DE3222189A1 DE19823222189 DE3222189A DE3222189A1 DE 3222189 A1 DE3222189 A1 DE 3222189A1 DE 19823222189 DE19823222189 DE 19823222189 DE 3222189 A DE3222189 A DE 3222189A DE 3222189 A1 DE3222189 A1 DE 3222189A1
- Authority
- DE
- Germany
- Prior art keywords
- plasma
- plasma column
- pipe
- zone
- dielectric material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 22
- 238000000576 coating method Methods 0.000 title claims description 15
- 239000011248 coating agent Substances 0.000 title claims description 12
- 239000003989 dielectric material Substances 0.000 title claims description 6
- 238000000926 separation method Methods 0.000 claims description 14
- 230000008021 deposition Effects 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 3
- 239000007858 starting material Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
- C03B37/01823—Plasma deposition burners or heating means
- C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Metallurgy (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19823222189 DE3222189A1 (de) | 1982-06-12 | 1982-06-12 | Plasmaverfahren zur innenbeschichtung von rohren mit dielektrischem material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19823222189 DE3222189A1 (de) | 1982-06-12 | 1982-06-12 | Plasmaverfahren zur innenbeschichtung von rohren mit dielektrischem material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3222189A1 true DE3222189A1 (de) | 1984-01-26 |
| DE3222189C2 DE3222189C2 (enExample) | 1990-05-31 |
Family
ID=6165952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19823222189 Granted DE3222189A1 (de) | 1982-06-12 | 1982-06-12 | Plasmaverfahren zur innenbeschichtung von rohren mit dielektrischem material |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE3222189A1 (enExample) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2575151A1 (fr) * | 1984-12-21 | 1986-06-27 | France Etat | Procede et dispositif de fabrication de preformes pour fibres optiques, et preformes obtenues par ce procede |
| EP0199527A1 (en) * | 1985-04-19 | 1986-10-29 | Sumitomo Electric Industries Limited | A process for the production of a surface-coated article |
| EP0250326A1 (fr) * | 1986-06-20 | 1987-12-23 | Georges Le Noane | Procédé de fabrication de préformes pour fibres optiques |
| DE3632748A1 (de) * | 1986-09-26 | 1988-04-07 | Ver Foerderung Inst Kunststoff | Verfahren zur beschichtung von hohlkoerpern |
| DE3820237C1 (enExample) * | 1988-06-14 | 1989-09-14 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften Ev, 3400 Goettingen, De | |
| EP0333580A1 (fr) * | 1988-03-16 | 1989-09-20 | ETAT FRANCAIS représenté par le Ministre des Postes, Télécommunications et de l'Espace | Dispositif de fabrication de préformes pour fibres optiques |
| EP0568049A1 (de) * | 1992-04-30 | 1993-11-03 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren und Einrichtung zur PECVD-Innenbeschichtung eines Hohlkörpers mittels eines Mikrowellenplasmas |
| US5318612A (en) * | 1991-06-21 | 1994-06-07 | France Telecom Etablissement Autonome De Droit Public | Method for producing optical fiber preforms and device to implement said method |
| WO2001037312A1 (de) * | 1999-11-12 | 2001-05-25 | Knn Systemtechnik Gmbh | Verfahren und vorrichtung zum behandeln und beschichten von oberflächen aus nichtleitenden, dielektrischen materialien mittels mikrowellenangeregter plasmen |
| EP1619265A1 (en) * | 2004-07-15 | 2006-01-25 | Sub-One Technology, Inc. | Method and system for coating internal surfaces of prefabricated process piping in the field |
| WO2006096641A1 (en) * | 2005-03-07 | 2006-09-14 | Sub-One Technology, Inc. | Method and system for coating internal surfaces using reverse-flow cycling and other techniques |
| DE102007043333A1 (de) * | 2007-09-12 | 2009-04-09 | Maschinenfabrik Reinhausen Gmbh | Verfahren zur Behandlung und Untersuchung von Bauteilen |
| CN102276143A (zh) * | 2010-06-11 | 2011-12-14 | 德拉克通信科技公司 | 用于制造初级预制品的方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4034211C1 (en) * | 1990-10-27 | 1991-11-14 | Schott Glaswerke, 6500 Mainz, De | Coating interior of pipe-glass tube - comprises coupling HF energy to tube using resonator to deliver pulsed microwave discharges |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2328930A1 (de) * | 1972-06-08 | 1974-01-03 | Int Standard Electric Corp | Innenbeschichtetes glasrohr und verfahren zur herstellung der beschichtung |
| DE2444100A1 (de) * | 1974-09-14 | 1976-03-25 | Philips Patentverwaltung | Verfahren zur herstellung von innenbeschichteten glasrohren zum ziehen von lichtleitfasern |
| DE2642949A1 (de) * | 1976-09-24 | 1978-03-30 | Philips Patentverwaltung | Verfahren zur herstellung von innenbeschichteten glasrohren zum ziehen von lichtleitfasern |
| DE2804125A1 (de) * | 1977-02-10 | 1978-08-17 | Northern Telecom Ltd | Verfahren und vorrichtung zur herstellung einer optischen faser |
| DE2712933A1 (de) * | 1977-03-18 | 1978-09-21 | Sulzer Ag | Vorrichtung zum bestrahlen von fliessbarem gut, insbesondere klaerschlamm, mittels elektronenstrahlen |
| DE2929166A1 (de) * | 1979-07-19 | 1981-01-29 | Philips Patentverwaltung | Verfahren zur herstellung von lichtleitfasern |
| DE3010314B1 (de) * | 1980-03-18 | 1981-02-05 | Hans Dr Rer Nat Beerwald | Verfahren zur Innenbeschichtung von elektrisch nicht leitfaehigen Rohren mittels Gasentladungen |
| GB2068359A (en) * | 1980-01-29 | 1981-08-12 | Ass Elect Ind | Manufacture of optical fibre preforms |
-
1982
- 1982-06-12 DE DE19823222189 patent/DE3222189A1/de active Granted
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2328930A1 (de) * | 1972-06-08 | 1974-01-03 | Int Standard Electric Corp | Innenbeschichtetes glasrohr und verfahren zur herstellung der beschichtung |
| DE2444100A1 (de) * | 1974-09-14 | 1976-03-25 | Philips Patentverwaltung | Verfahren zur herstellung von innenbeschichteten glasrohren zum ziehen von lichtleitfasern |
| DE2642949A1 (de) * | 1976-09-24 | 1978-03-30 | Philips Patentverwaltung | Verfahren zur herstellung von innenbeschichteten glasrohren zum ziehen von lichtleitfasern |
| DE2804125A1 (de) * | 1977-02-10 | 1978-08-17 | Northern Telecom Ltd | Verfahren und vorrichtung zur herstellung einer optischen faser |
| DE2712933A1 (de) * | 1977-03-18 | 1978-09-21 | Sulzer Ag | Vorrichtung zum bestrahlen von fliessbarem gut, insbesondere klaerschlamm, mittels elektronenstrahlen |
| DE2929166A1 (de) * | 1979-07-19 | 1981-01-29 | Philips Patentverwaltung | Verfahren zur herstellung von lichtleitfasern |
| GB2068359A (en) * | 1980-01-29 | 1981-08-12 | Ass Elect Ind | Manufacture of optical fibre preforms |
| DE3010314B1 (de) * | 1980-03-18 | 1981-02-05 | Hans Dr Rer Nat Beerwald | Verfahren zur Innenbeschichtung von elektrisch nicht leitfaehigen Rohren mittels Gasentladungen |
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2575151A1 (fr) * | 1984-12-21 | 1986-06-27 | France Etat | Procede et dispositif de fabrication de preformes pour fibres optiques, et preformes obtenues par ce procede |
| EP0199527A1 (en) * | 1985-04-19 | 1986-10-29 | Sumitomo Electric Industries Limited | A process for the production of a surface-coated article |
| EP0250326A1 (fr) * | 1986-06-20 | 1987-12-23 | Georges Le Noane | Procédé de fabrication de préformes pour fibres optiques |
| FR2600327A1 (fr) * | 1986-06-20 | 1987-12-24 | Lenoane Georges | Procede de fabrication de preformes pour fibres optiques et mandrin utilisable pour la mise en oeuvre de ce procede, application a la fabrication de fibres optiques monomodes |
| DE3632748A1 (de) * | 1986-09-26 | 1988-04-07 | Ver Foerderung Inst Kunststoff | Verfahren zur beschichtung von hohlkoerpern |
| EP0333580A1 (fr) * | 1988-03-16 | 1989-09-20 | ETAT FRANCAIS représenté par le Ministre des Postes, Télécommunications et de l'Espace | Dispositif de fabrication de préformes pour fibres optiques |
| FR2628730A1 (fr) * | 1988-03-16 | 1989-09-22 | France Etat | Dispositif de fabrication de preformes pour fibres optiques |
| US4944244A (en) * | 1988-03-16 | 1990-07-31 | Etat Francais Represente Par Le Ministere Des Postes | Apparatus for the production of preforms for optical fibers |
| DE3820237C1 (enExample) * | 1988-06-14 | 1989-09-14 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften Ev, 3400 Goettingen, De | |
| US4897285A (en) * | 1988-06-14 | 1990-01-30 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. | Method and apparatus for PCVD internal coating a metallic pipe by means of a microwave plasma |
| US5318612A (en) * | 1991-06-21 | 1994-06-07 | France Telecom Etablissement Autonome De Droit Public | Method for producing optical fiber preforms and device to implement said method |
| EP0568049A1 (de) * | 1992-04-30 | 1993-11-03 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren und Einrichtung zur PECVD-Innenbeschichtung eines Hohlkörpers mittels eines Mikrowellenplasmas |
| WO2001037312A1 (de) * | 1999-11-12 | 2001-05-25 | Knn Systemtechnik Gmbh | Verfahren und vorrichtung zum behandeln und beschichten von oberflächen aus nichtleitenden, dielektrischen materialien mittels mikrowellenangeregter plasmen |
| EP1619265A1 (en) * | 2004-07-15 | 2006-01-25 | Sub-One Technology, Inc. | Method and system for coating internal surfaces of prefabricated process piping in the field |
| WO2006096641A1 (en) * | 2005-03-07 | 2006-09-14 | Sub-One Technology, Inc. | Method and system for coating internal surfaces using reverse-flow cycling and other techniques |
| US7541069B2 (en) | 2005-03-07 | 2009-06-02 | Sub-One Technology, Inc. | Method and system for coating internal surfaces using reverse-flow cycling |
| DE102007043333A1 (de) * | 2007-09-12 | 2009-04-09 | Maschinenfabrik Reinhausen Gmbh | Verfahren zur Behandlung und Untersuchung von Bauteilen |
| DE102007043333B4 (de) * | 2007-09-12 | 2011-05-05 | Maschinenfabrik Reinhausen Gmbh | Verfahren zur Behandlung und Untersuchung von Bauteilen |
| CN102276143A (zh) * | 2010-06-11 | 2011-12-14 | 德拉克通信科技公司 | 用于制造初级预制品的方法 |
| EP2394967A1 (en) | 2010-06-11 | 2011-12-14 | Draka Comteq B.V. | A method and an apparatus for manufacturing a primary preform |
| NL2004874C2 (nl) * | 2010-06-11 | 2011-12-19 | Draka Comteq Bv | Werkwijze voor het vervaardigen van een primaire voorvorm. |
| US8667816B2 (en) | 2010-06-11 | 2014-03-11 | Draka Comteq B.V. | Method for manufacturing a primary preform |
| CN102276143B (zh) * | 2010-06-11 | 2017-09-12 | 德拉克通信科技公司 | 用于制造初级预制品的方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3222189C2 (enExample) | 1990-05-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0036191B1 (de) | Plasmabeschichtungsverfahren für die Innenbeschichtung von rohrförmigen Glasrohlingen | |
| DE3222189C2 (enExample) | ||
| DE69733660T2 (de) | Mikrowellenplasma chemischen synthese von ultrafeinen pulvern | |
| DE19726443C2 (de) | Verfahren zur Oberflächenvergütung innerer Oberflächen von Hohlkörpern und Vorrichtung zur Durchführung des Verfahrens | |
| DE2647121C2 (de) | Verfahren zur Herstellung einer Vorform für optische Fasern | |
| DE69025583T2 (de) | Verfahren zur Herstellung eines Gegenstands mit eingeschlossenem feuerfestem dielektrischem Teil | |
| DE69630377T2 (de) | Durch mikrowellen gesteuertes plasmaspritzgerät und spritzverfahren | |
| DE69302398T2 (de) | Vorrichtung für Mikrowellen - Plasma - CVD | |
| DE4136297A1 (de) | Vorrichtung zur lokalen erzeugung eines plasmas in einer behandlungskammer mittels mikrowellenanregung | |
| DE2444100A1 (de) | Verfahren zur herstellung von innenbeschichteten glasrohren zum ziehen von lichtleitfasern | |
| DE2950446C2 (enExample) | ||
| DE3632684A1 (de) | Verfahren und vorrichtung zum innenbeschichten von rohren | |
| EP0171103B1 (de) | Verfahren zum Herstellen massiver gläserner Vorformen aus hohlen Vorformen | |
| DE3204846A1 (de) | Plasmaverfahren zur innenbeschichtung von glasrohren | |
| DE68902995T2 (de) | Verfahren zum erhitzen eines quarzglasrohres. | |
| DE4203369C2 (de) | Verfahren und Vorrichtung zur Herstellung von Vorformen für Lichtwellenleiter | |
| EP0094053B1 (de) | Plasmaverfahren zur Herstellung eines dielektrischen Stabes | |
| DE19706556C1 (de) | Vorrichtung zum Ätzen oder zum Abscheiden unter Verwendung eines Plasmas sowie in der Vorrichtung verwendetes rohrförmiges Abschirmelement | |
| DE102006048815A1 (de) | Vorrichtung und Verfahren zur Erzeugung von Mikrowellenplasmen hoher Leistung | |
| DE2721198B2 (de) | Verfahren und Vorrichtung zum Herstellen eines Vorformlings für das Ziehen von Lichtleitfasern | |
| DE102009044496A1 (de) | Vorrichtung zur Erzeugung von Plasma mittels Mikrowellen | |
| DE10341239B4 (de) | ECR-Plasmaquelle mit linearer Plasmaaustrittsöffnung | |
| EP0963141B1 (de) | Vorrichtung zur Erzeugung von Plasma | |
| DE2605483A1 (de) | Verfahren zur herstellung eines lichtleiters | |
| DE4034211C1 (en) | Coating interior of pipe-glass tube - comprises coupling HF energy to tube using resonator to deliver pulsed microwave discharges |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |