AU2349401A - Method and device for treating and coating non-conductive, dielectric surfaces using plasmas excited by microwaves - Google Patents
Method and device for treating and coating non-conductive, dielectric surfaces using plasmas excited by microwavesInfo
- Publication number
- AU2349401A AU2349401A AU23494/01A AU2349401A AU2349401A AU 2349401 A AU2349401 A AU 2349401A AU 23494/01 A AU23494/01 A AU 23494/01A AU 2349401 A AU2349401 A AU 2349401A AU 2349401 A AU2349401 A AU 2349401A
- Authority
- AU
- Australia
- Prior art keywords
- microwaves
- treating
- conductive
- dielectric surfaces
- coating non
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32366—Localised processing
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19956832 | 1999-11-12 | ||
DE19956832 | 1999-11-12 | ||
DE10052082A DE10052082A1 (en) | 1999-11-12 | 2000-10-19 | Process for treating and coating surfaces made of non-conductive, dielectric materials by means of microwave-excited plasmas and device for carrying out the process |
DE10052082 | 2000-10-19 | ||
PCT/DE2000/003971 WO2001037312A1 (en) | 1999-11-12 | 2000-11-10 | Method and device for treating and coating non-conductive, dielectric surfaces using plasmas excited by microwaves |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2349401A true AU2349401A (en) | 2001-05-30 |
Family
ID=26007437
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU23494/01A Abandoned AU2349401A (en) | 1999-11-12 | 2000-11-10 | Method and device for treating and coating non-conductive, dielectric surfaces using plasmas excited by microwaves |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU2349401A (en) |
DE (1) | DE10083551D2 (en) |
WO (1) | WO2001037312A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1602748B1 (en) | 2003-03-12 | 2014-07-09 | Toyo Seikan Group Holdings, Ltd. | Microwave plasma processing device |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3222189A1 (en) * | 1982-06-12 | 1984-01-26 | Hans Dr.Rer.Nat. 5370 Kall Beerwald | Plasma process for coating the interior of tubes with dielectric material |
DE3820237C1 (en) * | 1988-06-14 | 1989-09-14 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften Ev, 3400 Goettingen, De | |
US5037666A (en) * | 1989-08-03 | 1991-08-06 | Uha Mikakuto Precision Engineering Research Institute Co., Ltd. | High-speed film forming method by microwave plasma chemical vapor deposition (CVD) under high pressure |
DE4242324A1 (en) * | 1992-04-30 | 1994-06-16 | Max Planck Gesellschaft | Method and device for treating the inner wall of a hollow body by means of a microwave plasma |
-
2000
- 2000-11-10 AU AU23494/01A patent/AU2349401A/en not_active Abandoned
- 2000-11-10 DE DE10083551T patent/DE10083551D2/en not_active Expired - Fee Related
- 2000-11-10 WO PCT/DE2000/003971 patent/WO2001037312A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2001037312A1 (en) | 2001-05-25 |
DE10083551D2 (en) | 2002-12-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase | ||
TH | Corrigenda |
Free format text: IN VOL 15, NO 36, PAGE(S) 7808-7811 UNDER THE HEADING APPLICATIONS LAPSED, REFUSED OR WITHDRAWN PLEASE DELETE ALL REFERENCE TO APPLICATION NO. 11635/01, 12786/01, 15295/01, 17004/01, 17371/01, 17415/01, 17421/01, 19999/01, 22365/01, 23486/01 AND 23494/01 |
|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |