AU2349401A - Method and device for treating and coating non-conductive, dielectric surfaces using plasmas excited by microwaves - Google Patents

Method and device for treating and coating non-conductive, dielectric surfaces using plasmas excited by microwaves

Info

Publication number
AU2349401A
AU2349401A AU23494/01A AU2349401A AU2349401A AU 2349401 A AU2349401 A AU 2349401A AU 23494/01 A AU23494/01 A AU 23494/01A AU 2349401 A AU2349401 A AU 2349401A AU 2349401 A AU2349401 A AU 2349401A
Authority
AU
Australia
Prior art keywords
microwaves
treating
conductive
dielectric surfaces
coating non
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU23494/01A
Inventor
Udo Krohmann
Bernd Neumann
Torsten Neumann
Andreas Ohl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KNN SYSTEMTECHNIK GmbH
Original Assignee
KNN SYSTEMTECHNIK GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10052082A external-priority patent/DE10052082A1/en
Application filed by KNN SYSTEMTECHNIK GmbH filed Critical KNN SYSTEMTECHNIK GmbH
Publication of AU2349401A publication Critical patent/AU2349401A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32366—Localised processing
AU23494/01A 1999-11-12 2000-11-10 Method and device for treating and coating non-conductive, dielectric surfaces using plasmas excited by microwaves Abandoned AU2349401A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE19956832 1999-11-12
DE19956832 1999-11-12
DE10052082 2000-10-19
DE10052082A DE10052082A1 (en) 1999-11-12 2000-10-19 Process for treating and coating surfaces made of non-conductive, dielectric materials by means of microwave-excited plasmas and device for carrying out the process
PCT/DE2000/003971 WO2001037312A1 (en) 1999-11-12 2000-11-10 Method and device for treating and coating non-conductive, dielectric surfaces using plasmas excited by microwaves

Publications (1)

Publication Number Publication Date
AU2349401A true AU2349401A (en) 2001-05-30

Family

ID=26007437

Family Applications (1)

Application Number Title Priority Date Filing Date
AU23494/01A Abandoned AU2349401A (en) 1999-11-12 2000-11-10 Method and device for treating and coating non-conductive, dielectric surfaces using plasmas excited by microwaves

Country Status (3)

Country Link
AU (1) AU2349401A (en)
DE (1) DE10083551D2 (en)
WO (1) WO2001037312A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100453695C (en) 2003-03-12 2009-01-21 东洋制罐株式会社 Microwave plasma processing device and plasma processing gas supply member

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3222189A1 (en) * 1982-06-12 1984-01-26 Hans Dr.Rer.Nat. 5370 Kall Beerwald Plasma process for coating the interior of tubes with dielectric material
DE3820237C1 (en) * 1988-06-14 1989-09-14 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften Ev, 3400 Goettingen, De
JPH03193880A (en) * 1989-08-03 1991-08-23 Mikakutou Seimitsu Kogaku Kenkyusho:Kk Method and device for forming film at high rate by microwave plasma cvd under high pressure
DE4242324A1 (en) * 1992-04-30 1994-06-16 Max Planck Gesellschaft Method and device for treating the inner wall of a hollow body by means of a microwave plasma

Also Published As

Publication number Publication date
WO2001037312A1 (en) 2001-05-25
DE10083551D2 (en) 2002-12-19

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase
TH Corrigenda

Free format text: IN VOL 15, NO 36, PAGE(S) 7808-7811 UNDER THE HEADING APPLICATIONS LAPSED, REFUSED OR WITHDRAWN PLEASE DELETE ALL REFERENCE TO APPLICATION NO. 11635/01, 12786/01, 15295/01, 17004/01, 17371/01, 17415/01, 17421/01, 19999/01, 22365/01, 23486/01 AND 23494/01

MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase