AU1301300A - The method and the apparatus for plasma generation - Google Patents

The method and the apparatus for plasma generation

Info

Publication number
AU1301300A
AU1301300A AU13013/00A AU1301300A AU1301300A AU 1301300 A AU1301300 A AU 1301300A AU 13013/00 A AU13013/00 A AU 13013/00A AU 1301300 A AU1301300 A AU 1301300A AU 1301300 A AU1301300 A AU 1301300A
Authority
AU
Australia
Prior art keywords
plasma generation
plasma
generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU13013/00A
Inventor
Jury Vladimirovich Korchagin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU1301300A publication Critical patent/AU1301300A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32247—Resonators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
AU13013/00A 1999-04-07 1999-11-11 The method and the apparatus for plasma generation Abandoned AU1301300A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
RU99106909 1999-04-07
RO99106909 1999-04-07
RO99110864 1999-05-25
RU99110864A RU2171554C2 (en) 1999-04-07 1999-05-25 Method of plasma generation and device for its realization
PCT/RU1999/000428 WO2000060910A1 (en) 1999-04-07 1999-11-11 The method and the apparatus for plasma generation

Publications (1)

Publication Number Publication Date
AU1301300A true AU1301300A (en) 2000-10-23

Family

ID=26654009

Family Applications (1)

Application Number Title Priority Date Filing Date
AU13013/00A Abandoned AU1301300A (en) 1999-04-07 1999-11-11 The method and the apparatus for plasma generation

Country Status (3)

Country Link
AU (1) AU1301300A (en)
RU (1) RU2171554C2 (en)
WO (1) WO2000060910A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990068381A (en) * 1999-05-11 1999-09-06 허방욱 microwave plasma burner
AUPQ861500A0 (en) * 2000-07-06 2000-08-03 Varian Australia Pty Ltd Plasma source for spectrometry
AU6884501A (en) * 2000-07-06 2002-01-21 Varian Australia Plasma source for spectrometry
FR2832022B1 (en) * 2001-11-06 2003-12-19 Christian Lincot METHOD AND DEVICE FOR IN SITU APPLICATION OF AN INTENSE ELECTRIC FIELD WITH VARIABLE POWER FOR LOCALIZED TREATMENTS
RU2215061C1 (en) 2002-09-30 2003-10-27 Институт прикладной физики РАН High-speed method for depositing diamond films from gas phase in plasma of shf-discharge and plasma reactor for performing the same
WO2007086875A1 (en) * 2006-01-30 2007-08-02 Amarante Technologies, Inc. Work processing system and plasma generating apparatus
WO2009128741A1 (en) * 2008-04-14 2009-10-22 Закрытое Акционерное Общество "Kotэc-Cибиpь" Uhf plasmotron
US8826983B2 (en) * 2010-12-29 2014-09-09 Schlumberger Technology Corporation Plasma charges
JP6323849B2 (en) 2012-08-28 2018-05-16 アジレント・テクノロジーズ・インクＡｇｉｌｅｎｔ Ｔｅｃｈｎｏｌｏｇｉｅｓ， Ｉｎｃ． Apparatus including electromagnetic waveguide and plasma source, and plasma generation method
CN116419464A (en) * 2023-06-09 2023-07-11 安徽农业大学 Plasma torch device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3712971A1 (en) * 1987-04-16 1988-11-03 Plasonic Oberflaechentechnik G Method and device for producing (generating) a plasma
DE3905303C2 (en) * 1988-02-24 1996-07-04 Hitachi Ltd Device for generating a plasma by means of microwaves
JPH0216732A (en) * 1988-07-05 1990-01-19 Mitsubishi Electric Corp Plasma reactor
RU2046559C1 (en) * 1992-12-30 1995-10-20 Вадим Генадиевич Бровкин Method for plasma generation and device for implementation of said method

Also Published As

Publication number Publication date
WO2000060910A1 (en) 2000-10-12
RU2171554C2 (en) 2001-07-27

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase
TH Corrigenda

Free format text: IN VOL 15, NO 5, PAGE(S) 796-799 UNDER THE HEADING APPLICATIONS LAPSED, REFUSED OR WITHDRAWN PLEASE DELETE ALL REFERENCE TO APPLICATION NO. 13013/00, 35594/00, 36688/00, 36690/00, 41368/00 AND 45462/00

MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase