DE2549637A1 - Siliciumcarbidformkoerper hoher dichte und verfahren zu deren herstellung - Google Patents
Siliciumcarbidformkoerper hoher dichte und verfahren zu deren herstellungInfo
- Publication number
- DE2549637A1 DE2549637A1 DE19752549637 DE2549637A DE2549637A1 DE 2549637 A1 DE2549637 A1 DE 2549637A1 DE 19752549637 DE19752549637 DE 19752549637 DE 2549637 A DE2549637 A DE 2549637A DE 2549637 A1 DE2549637 A1 DE 2549637A1
- Authority
- DE
- Germany
- Prior art keywords
- silicon carbide
- silicon
- grain size
- sintered
- powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 55
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 39
- 229910052710 silicon Inorganic materials 0.000 claims description 25
- 239000010703 silicon Substances 0.000 claims description 25
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 22
- 238000005245 sintering Methods 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 17
- 229910052799 carbon Inorganic materials 0.000 claims description 16
- 239000000203 mixture Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- 239000012298 atmosphere Substances 0.000 claims description 6
- 238000004939 coking Methods 0.000 claims description 6
- 239000000843 powder Substances 0.000 claims description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052796 boron Inorganic materials 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 25
- 238000006243 chemical reaction Methods 0.000 description 9
- 238000000465 moulding Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 238000007731 hot pressing Methods 0.000 description 5
- 239000011148 porous material Substances 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- XPFVYQJUAUNWIW-UHFFFAOYSA-N furfuryl alcohol Chemical compound OCC1=CC=CO1 XPFVYQJUAUNWIW-UHFFFAOYSA-N 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000002902 bimodal effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- HYBBIBNJHNGZAN-UHFFFAOYSA-N furfural Chemical compound O=CC1=CC=CO1 HYBBIBNJHNGZAN-UHFFFAOYSA-N 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000008240 homogeneous mixture Substances 0.000 description 1
- -1 however Substances 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 238000010952 in-situ formation Methods 0.000 description 1
- 238000000462 isostatic pressing Methods 0.000 description 1
- RCHKEJKUUXXBSM-UHFFFAOYSA-N n-benzyl-2-(3-formylindol-1-yl)acetamide Chemical compound C12=CC=CC=C2C(C=O)=CN1CC(=O)NCC1=CC=CC=C1 RCHKEJKUUXXBSM-UHFFFAOYSA-N 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000004533 oil dispersion Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/575—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by pressure sintering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US52242874A | 1974-11-11 | 1974-11-11 | |
| US05/555,855 US3998646A (en) | 1974-11-11 | 1975-03-06 | Process for forming high density silicon carbide |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2549637A1 true DE2549637A1 (de) | 1976-05-20 |
Family
ID=27060810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19752549637 Pending DE2549637A1 (de) | 1974-11-11 | 1975-11-05 | Siliciumcarbidformkoerper hoher dichte und verfahren zu deren herstellung |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3998646A (enExample) |
| CA (1) | CA1063134A (enExample) |
| DE (1) | DE2549637A1 (enExample) |
| FR (1) | FR2290406A1 (enExample) |
| GB (1) | GB1495086A (enExample) |
| IT (1) | IT1050937B (enExample) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2833909A1 (de) * | 1977-08-04 | 1979-02-22 | Nippon Crucible Co | Aktives siliziumcarbidpulver, enthaltend eine borkomponente, und verfahren zu dessen herstellung |
| EP0004031A1 (de) * | 1978-03-03 | 1979-09-19 | Elektroschmelzwerk Kempten GmbH | Dichte polykristalline Formkörper aus alpha-Siliciumcarbid und Verfahren zu ihrer Herstellung durch drucklose Sinterung |
| DE2910628A1 (de) * | 1978-07-03 | 1980-01-24 | Coors Porcelain Co | Verfahren zur herstellung eines reaktionsgebundenen siliziumkarbidkoerpers |
| DE3028441A1 (de) * | 1979-08-02 | 1981-02-12 | Tokyo Shibaura Electric Co | Turboladerrotor mit gekruemmten schaufelblaettern |
| EP0046520A1 (de) * | 1980-08-22 | 1982-03-03 | Mtu Motoren- Und Turbinen-Union MàNchen Gmbh | Keramische Brennkammer |
| DE3127649A1 (de) * | 1980-07-17 | 1982-05-06 | Asahi Glass Co. Ltd., Tokyo | Dichtgesinterter siliciumcarbid-keramikkoerper |
| DE3044162A1 (de) * | 1980-11-24 | 1982-06-03 | Annawerk Keramische Betriebe GmbH, 8633 Rödental | Polykristalliner formkoerper aus siliziumkarbid und verfahren zu seiner herstellung |
| DE3210987A1 (de) * | 1981-03-27 | 1982-10-07 | Japan Metals & Chemicals Co., Ltd., Tokyo | Sinterformen aus siliziumkarbid und verfahren zu ihrer herstellung |
| DE4392693T1 (de) * | 1992-06-08 | 1994-09-08 | Ngk Insulators Ltd | Temperaturwechselbeständige, kriechfeste und oxydationsfeste Einsätze |
| CN115304380A (zh) * | 2022-07-16 | 2022-11-08 | 陕西固勤材料技术有限公司 | 一种辊道窑传动用碳化硅辊棒及其制备方法与应用 |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4795673A (en) * | 1978-01-09 | 1989-01-03 | Stemcor Corporation | Composite material of discontinuous silicon carbide particles and continuous silicon matrix and method of producing same |
| CA1332065C (en) * | 1978-05-01 | 1994-09-20 | John Allen Cappola | Sintered alpha silicon carbide body having equiaxed microstructure |
| US4220455A (en) * | 1978-10-24 | 1980-09-02 | General Electric Company | Polycrystalline diamond and/or cubic boron nitride body and process for making said body |
| JPS55116667A (en) * | 1979-02-28 | 1980-09-08 | Asahi Glass Co Ltd | Silicon carbide sintered body |
| DE2927226A1 (de) * | 1979-07-05 | 1981-01-08 | Kempten Elektroschmelz Gmbh | Dichte formkoerper aus polykristallinem beta -siliciumcarbid und verfahren zu ihrer herstellung durch heisspressen |
| JPS55167177A (en) * | 1979-06-08 | 1980-12-26 | Ngk Spark Plug Co | Manufacture of silicon carbide heating body |
| US4244902A (en) * | 1979-06-18 | 1981-01-13 | Ford Motor Company | Pressureless method of forming a silicon carbide ceramic material |
| DE3005587A1 (de) * | 1980-02-15 | 1981-08-20 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Verfahren zur herstellung von formkoerpern |
| JPS5832070A (ja) * | 1981-08-21 | 1983-02-24 | 信越化学工業株式会社 | 高密度炭化けい素焼結体の製造方法 |
| DE3218052A1 (de) * | 1982-05-13 | 1983-11-17 | Elektroschmelzwerk Kempten GmbH, 8000 München | Polykristalline, praktisch porenfreie sinterkoerper aus (alpha)-siliciumcarbid, borcarbid und freiem kohlenstoff und verfahren zu ihrer herstellung |
| US4502983A (en) * | 1983-06-28 | 1985-03-05 | Mamoru Omori | Composite silicon carbide sintered shapes and its manufacture |
| DE3443817A1 (de) * | 1983-12-02 | 1985-06-27 | Director General of Agency of Industrial Science and Technology Itaru Todoriki, Tokio/Tokyo | Verfahren zur herstellung von keramik |
| US4874725A (en) * | 1984-04-27 | 1989-10-17 | Nippon Tungsten Co., Ltd. | High-density sintered article of silicon carbid |
| JPS6169116A (ja) * | 1984-09-13 | 1986-04-09 | Toshiba Ceramics Co Ltd | シリコンウエハ−の連続ｃｖｄコ−テイング用サセプター |
| US5298470A (en) * | 1989-09-22 | 1994-03-29 | The Carborundum Company | Silicon carbide bodies having high toughness and fracture resistance and method of making same |
| US5840436A (en) * | 1992-06-08 | 1998-11-24 | Ngk Insulators, Ltd. | Spalling-resistant, creep-resistant and oxidation-resistant setters |
| US5904892A (en) * | 1996-04-01 | 1999-05-18 | Saint-Gobain/Norton Industrial Ceramics Corp. | Tape cast silicon carbide dummy wafer |
| US6162543A (en) * | 1998-12-11 | 2000-12-19 | Saint-Gobain Industrial Ceramics, Inc. | High purity siliconized silicon carbide having high thermal shock resistance |
| US6609452B1 (en) | 2000-01-11 | 2003-08-26 | M Cubed Technologies, Inc. | Silicon carbide armor bodies, and methods for making same |
| US7104177B1 (en) | 2000-01-11 | 2006-09-12 | Aghajanian Michael K | Ceramic-rich composite armor, and methods for making same |
| US6862970B2 (en) | 2000-11-21 | 2005-03-08 | M Cubed Technologies, Inc. | Boron carbide composite bodies, and methods for making same |
| WO2002068373A2 (en) * | 2000-11-21 | 2002-09-06 | M Cubed Technologies, Inc. | Reaction-bonded silicon carbide composite bodies and methods for making same |
| US6887421B2 (en) * | 2002-01-14 | 2005-05-03 | Redunndant Materials, Inc. | Method for making a silicon carbide resistor with silicon/silicon carbide contacts by induction heating |
| DE102006052027B4 (de) * | 2006-11-03 | 2009-06-25 | Metoxit Ag | Verfahren zum Bestimmen des Sinterschwunds eines vorgesinterten Körpers und Bearbeitungsmaschine zur Bearbeitung von Weißlingen |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1916836A (en) * | 1930-12-22 | 1933-07-04 | Ig Farbenindustrie Ag | Production of shaped articles from masses containing silicon |
| US2964823A (en) * | 1954-04-20 | 1960-12-20 | Norton Co | Process of making recrystallized silicon carbide articles |
| US3275722A (en) * | 1959-07-08 | 1966-09-27 | Power Jets Res & Dev Ltd | Production of dense bodies of silicon carbide |
| US3171871A (en) * | 1960-07-19 | 1965-03-02 | Norton Co | Method of making electrical heater bars |
| GB1180918A (en) * | 1966-06-10 | 1970-02-11 | Atomic Energy Authority Uk | Improvements in or relating to the Manufacture of Dense Bodies of Silicon Carbide. |
| US3836673A (en) * | 1972-03-23 | 1974-09-17 | Norton Co | Sintered silicon carbide |
-
1975
- 1975-03-06 US US05/555,855 patent/US3998646A/en not_active Expired - Lifetime
- 1975-10-06 CA CA237,138A patent/CA1063134A/en not_active Expired
- 1975-10-17 FR FR7531782A patent/FR2290406A1/fr active Granted
- 1975-10-29 GB GB44619/75A patent/GB1495086A/en not_active Expired
- 1975-11-05 DE DE19752549637 patent/DE2549637A1/de active Pending
- 1975-11-10 IT IT69766/75A patent/IT1050937B/it active
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2833909A1 (de) * | 1977-08-04 | 1979-02-22 | Nippon Crucible Co | Aktives siliziumcarbidpulver, enthaltend eine borkomponente, und verfahren zu dessen herstellung |
| EP0004031A1 (de) * | 1978-03-03 | 1979-09-19 | Elektroschmelzwerk Kempten GmbH | Dichte polykristalline Formkörper aus alpha-Siliciumcarbid und Verfahren zu ihrer Herstellung durch drucklose Sinterung |
| DE2910628A1 (de) * | 1978-07-03 | 1980-01-24 | Coors Porcelain Co | Verfahren zur herstellung eines reaktionsgebundenen siliziumkarbidkoerpers |
| DE3028441A1 (de) * | 1979-08-02 | 1981-02-12 | Tokyo Shibaura Electric Co | Turboladerrotor mit gekruemmten schaufelblaettern |
| DE3127649A1 (de) * | 1980-07-17 | 1982-05-06 | Asahi Glass Co. Ltd., Tokyo | Dichtgesinterter siliciumcarbid-keramikkoerper |
| EP0046520A1 (de) * | 1980-08-22 | 1982-03-03 | Mtu Motoren- Und Turbinen-Union MàNchen Gmbh | Keramische Brennkammer |
| DE3044162A1 (de) * | 1980-11-24 | 1982-06-03 | Annawerk Keramische Betriebe GmbH, 8633 Rödental | Polykristalliner formkoerper aus siliziumkarbid und verfahren zu seiner herstellung |
| DE3210987A1 (de) * | 1981-03-27 | 1982-10-07 | Japan Metals & Chemicals Co., Ltd., Tokyo | Sinterformen aus siliziumkarbid und verfahren zu ihrer herstellung |
| DE4392693T1 (de) * | 1992-06-08 | 1994-09-08 | Ngk Insulators Ltd | Temperaturwechselbeständige, kriechfeste und oxydationsfeste Einsätze |
| CN115304380A (zh) * | 2022-07-16 | 2022-11-08 | 陕西固勤材料技术有限公司 | 一种辊道窑传动用碳化硅辊棒及其制备方法与应用 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2290406A1 (fr) | 1976-06-04 |
| GB1495086A (en) | 1977-12-14 |
| US3998646A (en) | 1976-12-21 |
| IT1050937B (it) | 1981-03-20 |
| FR2290406B3 (enExample) | 1978-07-13 |
| CA1063134A (en) | 1979-09-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| OHN | Withdrawal |