DE2512468C2 - "Elektronenmikroskop mit einem Wien-Filter als Energieanalysator" - Google Patents
"Elektronenmikroskop mit einem Wien-Filter als Energieanalysator"Info
- Publication number
- DE2512468C2 DE2512468C2 DE2512468A DE2512468A DE2512468C2 DE 2512468 C2 DE2512468 C2 DE 2512468C2 DE 2512468 A DE2512468 A DE 2512468A DE 2512468 A DE2512468 A DE 2512468A DE 2512468 C2 DE2512468 C2 DE 2512468C2
- Authority
- DE
- Germany
- Prior art keywords
- wien filter
- electron
- electron microscope
- section
- dispersion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000006185 dispersion Substances 0.000 claims description 13
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 4
- 210000001747 pupil Anatomy 0.000 claims 1
- 238000001228 spectrum Methods 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000012937 correction Methods 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 238000013507 mapping Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7404363A NL7404363A (nl) | 1974-04-01 | 1974-04-01 | Elektronenmikroskoop met energieanalysator. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2512468A1 DE2512468A1 (de) | 1975-10-09 |
| DE2512468C2 true DE2512468C2 (de) | 1981-09-24 |
Family
ID=19821088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2512468A Expired DE2512468C2 (de) | 1974-04-01 | 1975-03-21 | "Elektronenmikroskop mit einem Wien-Filter als Energieanalysator" |
Country Status (7)
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4210806A (en) * | 1979-01-18 | 1980-07-01 | International Business Machines Corporation | High brightness electron probe beam and method |
| DE3423149A1 (de) * | 1984-06-22 | 1986-01-02 | Fa. Carl Zeiss, 7920 Heidenheim | Verfahren und anordnung zur elektronenenergiegefilterten abbildung eines objektes oder eines objektbeugungsdiagrammes mit einem transmissions-elektronenmikroskop |
| US4687936A (en) * | 1985-07-11 | 1987-08-18 | Varian Associates, Inc. | In-line beam scanning system |
| US4789787A (en) * | 1987-05-27 | 1988-12-06 | Microbeam Inc. | Wien filter design |
| US4851670A (en) * | 1987-08-28 | 1989-07-25 | Gatan Inc. | Energy-selected electron imaging filter |
| DE69322890T2 (de) * | 1992-02-12 | 1999-07-29 | Koninkl Philips Electronics Nv | Verfahren zur Verringerung einer räumlichen energiedispersiven Streuung eines Elektronenstrahlenbündels und eine für den Einsatz eines solchen Verfahrens geeignete Elektronenstrahlvorrichtung |
| US5444243A (en) * | 1993-09-01 | 1995-08-22 | Hitachi, Ltd. | Wien filter apparatus with hyperbolic surfaces |
| WO1997013268A1 (en) * | 1995-10-03 | 1997-04-10 | Philips Electronics N.V. | Particle-optical apparatus comprising a fixed diaphragm for the monochromator filter |
| JP4527289B2 (ja) * | 1998-12-17 | 2010-08-18 | エフ イー アイ カンパニ | オージェ電子の検出を含む粒子光学装置 |
| JP3757371B2 (ja) * | 1999-07-05 | 2006-03-22 | 日本電子株式会社 | エネルギーフィルタ及びそれを用いた電子顕微鏡 |
| US6717141B1 (en) * | 2001-11-27 | 2004-04-06 | Schlumberger Technologies, Inc. | Reduction of aberrations produced by Wien filter in a scanning electron microscope and the like |
| GB0320187D0 (en) * | 2003-08-28 | 2003-10-01 | Shimadzu Res Lab Europe Ltd | Particle optical apparatus |
| EP1610358B1 (en) * | 2004-06-21 | 2008-08-27 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Aberration correction device and method for operating same |
| EP1783811A3 (en) * | 2005-11-02 | 2008-02-27 | FEI Company | Corrector for the correction of chromatic aberrations in a particle-optical apparatus |
| KR100773657B1 (ko) | 2006-01-18 | 2007-11-05 | 광주과학기술원 | 공간필터링 수단 및 이를 구비한 공초점 주사 현미경 |
| EP2166557A1 (en) * | 2008-09-22 | 2010-03-24 | FEI Company | Method for correcting distortions in a particle-optical apparatus |
| DE102009028013B9 (de) * | 2009-07-24 | 2014-04-17 | Carl Zeiss Microscopy Gmbh | Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät |
| EP2325862A1 (en) * | 2009-11-18 | 2011-05-25 | Fei Company | Corrector for axial aberrations of a particle-optical lens |
| EP2511936B1 (en) | 2011-04-13 | 2013-10-02 | Fei Company | Distortion free stigmation of a TEM |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB962086A (en) * | 1962-03-27 | 1964-06-24 | Hitachi Ltd | Energy-selecting electron microscopes |
| NL7012388A (US20030204162A1-20031030-M00001.png) * | 1970-08-21 | 1972-02-23 |
-
1974
- 1974-04-01 NL NL7404363A patent/NL7404363A/xx unknown
-
1975
- 1975-03-21 DE DE2512468A patent/DE2512468C2/de not_active Expired
- 1975-03-27 GB GB12925/75A patent/GB1507366A/en not_active Expired
- 1975-03-27 CA CA223,309A patent/CA1021883A/en not_active Expired
- 1975-03-28 US US05/562,965 patent/US3979590A/en not_active Expired - Lifetime
- 1975-04-01 FR FR757510152A patent/FR2266300B1/fr not_active Expired
- 1975-04-01 JP JP50038657A patent/JPS50141966A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1507366A (en) | 1978-04-12 |
| DE2512468A1 (de) | 1975-10-09 |
| FR2266300B1 (US20030204162A1-20031030-M00001.png) | 1981-03-06 |
| FR2266300A1 (US20030204162A1-20031030-M00001.png) | 1975-10-24 |
| US3979590A (en) | 1976-09-07 |
| CA1021883A (en) | 1977-11-29 |
| NL7404363A (nl) | 1975-10-03 |
| JPS50141966A (US20030204162A1-20031030-M00001.png) | 1975-11-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| D2 | Grant after examination | ||
| 8339 | Ceased/non-payment of the annual fee |