NL7404363A - Elektronenmikroskoop met energieanalysator. - Google Patents

Elektronenmikroskoop met energieanalysator.

Info

Publication number
NL7404363A
NL7404363A NL7404363A NL7404363A NL7404363A NL 7404363 A NL7404363 A NL 7404363A NL 7404363 A NL7404363 A NL 7404363A NL 7404363 A NL7404363 A NL 7404363A NL 7404363 A NL7404363 A NL 7404363A
Authority
NL
Netherlands
Prior art keywords
microskop
electronic
energy analyzer
analyzer
energy
Prior art date
Application number
NL7404363A
Other languages
English (en)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL7404363A priority Critical patent/NL7404363A/nl
Priority to DE2512468A priority patent/DE2512468C2/de
Priority to GB12925/75A priority patent/GB1507366A/en
Priority to CA223,309A priority patent/CA1021883A/en
Priority to US05/562,965 priority patent/US3979590A/en
Priority to FR757510152A priority patent/FR2266300B1/fr
Priority to JP50038657A priority patent/JPS50141966A/ja
Publication of NL7404363A publication Critical patent/NL7404363A/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL7404363A 1974-04-01 1974-04-01 Elektronenmikroskoop met energieanalysator. NL7404363A (nl)

Priority Applications (7)

Application Number Priority Date Filing Date Title
NL7404363A NL7404363A (nl) 1974-04-01 1974-04-01 Elektronenmikroskoop met energieanalysator.
DE2512468A DE2512468C2 (de) 1974-04-01 1975-03-21 "Elektronenmikroskop mit einem Wien-Filter als Energieanalysator"
GB12925/75A GB1507366A (en) 1974-04-01 1975-03-27 Electron microscope
CA223,309A CA1021883A (en) 1974-04-01 1975-03-27 Electron microscope comprising an energy analyser
US05/562,965 US3979590A (en) 1974-04-01 1975-03-28 Electron microscope comprising an energy analyzer
FR757510152A FR2266300B1 (nl) 1974-04-01 1975-04-01
JP50038657A JPS50141966A (nl) 1974-04-01 1975-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7404363A NL7404363A (nl) 1974-04-01 1974-04-01 Elektronenmikroskoop met energieanalysator.

Publications (1)

Publication Number Publication Date
NL7404363A true NL7404363A (nl) 1975-10-03

Family

ID=19821088

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7404363A NL7404363A (nl) 1974-04-01 1974-04-01 Elektronenmikroskoop met energieanalysator.

Country Status (7)

Country Link
US (1) US3979590A (nl)
JP (1) JPS50141966A (nl)
CA (1) CA1021883A (nl)
DE (1) DE2512468C2 (nl)
FR (1) FR2266300B1 (nl)
GB (1) GB1507366A (nl)
NL (1) NL7404363A (nl)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4210806A (en) * 1979-01-18 1980-07-01 International Business Machines Corporation High brightness electron probe beam and method
DE3423149A1 (de) * 1984-06-22 1986-01-02 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und anordnung zur elektronenenergiegefilterten abbildung eines objektes oder eines objektbeugungsdiagrammes mit einem transmissions-elektronenmikroskop
US4687936A (en) * 1985-07-11 1987-08-18 Varian Associates, Inc. In-line beam scanning system
US4789787A (en) * 1987-05-27 1988-12-06 Microbeam Inc. Wien filter design
US4851670A (en) * 1987-08-28 1989-07-25 Gatan Inc. Energy-selected electron imaging filter
DE69322890T2 (de) * 1992-02-12 1999-07-29 Koninklijke Philips Electronics N.V., Eindhoven Verfahren zur Verringerung einer räumlichen energiedispersiven Streuung eines Elektronenstrahlenbündels und eine für den Einsatz eines solchen Verfahrens geeignete Elektronenstrahlvorrichtung
US5444243A (en) * 1993-09-01 1995-08-22 Hitachi, Ltd. Wien filter apparatus with hyperbolic surfaces
WO1997013268A1 (en) * 1995-10-03 1997-04-10 Philips Electronics N.V. Particle-optical apparatus comprising a fixed diaphragm for the monochromator filter
DE69920182T2 (de) * 1998-12-17 2005-02-17 Fei Co., Hillsboro Korpuskularstrahloptisches gerät mit auger-elektronendetektion
JP3757371B2 (ja) * 1999-07-05 2006-03-22 日本電子株式会社 エネルギーフィルタ及びそれを用いた電子顕微鏡
US6717141B1 (en) * 2001-11-27 2004-04-06 Schlumberger Technologies, Inc. Reduction of aberrations produced by Wien filter in a scanning electron microscope and the like
GB0320187D0 (en) * 2003-08-28 2003-10-01 Shimadzu Res Lab Europe Ltd Particle optical apparatus
EP1610358B1 (en) * 2004-06-21 2008-08-27 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Aberration correction device and method for operating same
EP1783811A3 (en) * 2005-11-02 2008-02-27 FEI Company Corrector for the correction of chromatic aberrations in a particle-optical apparatus
KR100773657B1 (ko) 2006-01-18 2007-11-05 광주과학기술원 공간필터링 수단 및 이를 구비한 공초점 주사 현미경
EP2166557A1 (en) * 2008-09-22 2010-03-24 FEI Company Method for correcting distortions in a particle-optical apparatus
DE102009028013B9 (de) * 2009-07-24 2014-04-17 Carl Zeiss Microscopy Gmbh Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät
EP2325862A1 (en) * 2009-11-18 2011-05-25 Fei Company Corrector for axial aberrations of a particle-optical lens
EP2511936B1 (en) 2011-04-13 2013-10-02 Fei Company Distortion free stigmation of a TEM

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB962086A (en) * 1962-03-27 1964-06-24 Hitachi Ltd Energy-selecting electron microscopes
NL7012388A (nl) * 1970-08-21 1972-02-23

Also Published As

Publication number Publication date
GB1507366A (en) 1978-04-12
DE2512468C2 (de) 1981-09-24
CA1021883A (en) 1977-11-29
DE2512468A1 (de) 1975-10-09
FR2266300A1 (nl) 1975-10-24
FR2266300B1 (nl) 1981-03-06
JPS50141966A (nl) 1975-11-15
US3979590A (en) 1976-09-07

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