DE2507148A1 - Inverser planartransistor - Google Patents

Inverser planartransistor

Info

Publication number
DE2507148A1
DE2507148A1 DE19752507148 DE2507148A DE2507148A1 DE 2507148 A1 DE2507148 A1 DE 2507148A1 DE 19752507148 DE19752507148 DE 19752507148 DE 2507148 A DE2507148 A DE 2507148A DE 2507148 A1 DE2507148 A1 DE 2507148A1
Authority
DE
Germany
Prior art keywords
base zone
planar transistor
zone
schottky contact
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19752507148
Other languages
German (de)
English (en)
Inventor
Juergen Dipl Ing Dr Graul
Helmuth Dipl Phys Dr Murrmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19752507148 priority Critical patent/DE2507148A1/de
Priority to GB51227/75A priority patent/GB1495864A/en
Priority to FR7603632A priority patent/FR2301924A1/fr
Priority to IT20063/76A priority patent/IT1055195B/it
Priority to JP51016881A priority patent/JPS51107778A/ja
Publication of DE2507148A1 publication Critical patent/DE2507148A1/de
Priority to US05/749,438 priority patent/US4107719A/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
    • H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/47—Schottky barrier electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/73—Bipolar junction transistors
    • H01L29/732—Vertical transistors
    • H01L29/7327—Inverse vertical transistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Manufacturing & Machinery (AREA)
  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
DE19752507148 1975-02-19 1975-02-19 Inverser planartransistor Ceased DE2507148A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE19752507148 DE2507148A1 (de) 1975-02-19 1975-02-19 Inverser planartransistor
GB51227/75A GB1495864A (en) 1975-02-19 1975-12-15 Inverse planar transistors
FR7603632A FR2301924A1 (fr) 1975-02-19 1976-02-10 Transistor planar inverse
IT20063/76A IT1055195B (it) 1975-02-19 1976-02-11 Transistore planare inverso
JP51016881A JPS51107778A (ja) 1975-02-19 1976-02-18
US05/749,438 US4107719A (en) 1975-02-19 1976-12-10 Inverse planar transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752507148 DE2507148A1 (de) 1975-02-19 1975-02-19 Inverser planartransistor

Publications (1)

Publication Number Publication Date
DE2507148A1 true DE2507148A1 (de) 1976-09-02

Family

ID=5939287

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19752507148 Ceased DE2507148A1 (de) 1975-02-19 1975-02-19 Inverser planartransistor

Country Status (5)

Country Link
JP (1) JPS51107778A (ja)
DE (1) DE2507148A1 (ja)
FR (1) FR2301924A1 (ja)
GB (1) GB1495864A (ja)
IT (1) IT1055195B (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5276887A (en) * 1975-12-22 1977-06-28 Fujitsu Ltd Semiconductor device
JPS5267275A (en) * 1976-10-08 1977-06-03 Sony Corp Semiconductor unit
EP2180517A1 (en) * 2008-10-24 2010-04-28 Epcos Ag Pnp bipolar transistor with lateral collector and method of production

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2032201A1 (de) * 1969-06-30 1971-01-21 International Business Machines Corp , Armonk, NY (V St A ) Integnerbare Planarstruktur eines Transistors, insbesondere fur integrier te Schaltungen verwendbarer Schottky Sperr schicht Transistor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911659U (ja) * 1972-05-09 1974-01-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2032201A1 (de) * 1969-06-30 1971-01-21 International Business Machines Corp , Armonk, NY (V St A ) Integnerbare Planarstruktur eines Transistors, insbesondere fur integrier te Schaltungen verwendbarer Schottky Sperr schicht Transistor

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
DE-Z.: Neues an der Technik, Nr. 4, Juli 1969, S. 3 *
US-Z.: Electronics, Bd. 42, Nr. 15, 1969, S. 74-80 *
US-Z.: IEEE Transactions on Electron Devices, Bd. 21, 1974, Nr. 4, S. 273-278 *
US-Z.: Solid State Electronics, Bd. 11, 1968, Nr. 6, S. 613-619 *

Also Published As

Publication number Publication date
FR2301924B1 (ja) 1982-04-23
IT1055195B (it) 1981-12-21
JPS51107778A (ja) 1976-09-24
FR2301924A1 (fr) 1976-09-17
GB1495864A (en) 1977-12-21

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Legal Events

Date Code Title Description
8131 Rejection