DE2350161B2 - Supraleitfähiges Bauelement und Verfahren zu seiner Herstellung - Google Patents
Supraleitfähiges Bauelement und Verfahren zu seiner HerstellungInfo
- Publication number
- DE2350161B2 DE2350161B2 DE2350161A DE2350161A DE2350161B2 DE 2350161 B2 DE2350161 B2 DE 2350161B2 DE 2350161 A DE2350161 A DE 2350161A DE 2350161 A DE2350161 A DE 2350161A DE 2350161 B2 DE2350161 B2 DE 2350161B2
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- temperature
- film
- vacuum
- critical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000000034 method Methods 0.000 title claims description 13
- 239000000758 substrate Substances 0.000 claims description 109
- 239000010955 niobium Substances 0.000 claims description 59
- 238000007740 vapor deposition Methods 0.000 claims description 18
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 16
- 229910052758 niobium Inorganic materials 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 150000002822 niobium compounds Chemical class 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 claims 1
- 229910000601 superalloy Inorganic materials 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 description 25
- 238000001704 evaporation Methods 0.000 description 24
- 238000007738 vacuum evaporation Methods 0.000 description 23
- 238000001771 vacuum deposition Methods 0.000 description 22
- 230000008020 evaporation Effects 0.000 description 21
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 11
- 239000010453 quartz Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 230000007704 transition Effects 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 8
- 239000000203 mixture Substances 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 229910052733 gallium Inorganic materials 0.000 description 6
- 229910018459 Al—Ge Inorganic materials 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910052726 zirconium Inorganic materials 0.000 description 3
- 229910001257 Nb alloy Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000002447 crystallographic data Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- 238000010671 solid-state reaction Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0184—Manufacture or treatment of devices comprising intermetallic compounds of type A-15, e.g. Nb3Sn
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/80—Constructional details
- H10N60/85—Superconducting active materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/80—Material per se process of making same
- Y10S505/812—Stock
- Y10S505/813—Wire, tape, or film
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/80—Material per se process of making same
- Y10S505/815—Process of making per se
- Y10S505/818—Coating
- Y10S505/819—Vapor deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/825—Apparatus per se, device per se, or process of making or operating same
- Y10S505/856—Electrical transmission or interconnection system
- Y10S505/857—Nonlinear solid-state device system or circuit
- Y10S505/86—Gating, i.e. switching circuit
- Y10S505/862—Gating, i.e. switching circuit with thin film device
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/825—Apparatus per se, device per se, or process of making or operating same
- Y10S505/882—Circuit maker or breaker
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47099801A JPS529517B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-10-06 | 1972-10-06 | |
| JP521773A JPS533636B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-01-10 | 1973-01-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2350161A1 DE2350161A1 (de) | 1974-05-22 |
| DE2350161B2 true DE2350161B2 (de) | 1981-10-01 |
Family
ID=26339120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2350161A Ceased DE2350161B2 (de) | 1972-10-06 | 1973-10-05 | Supraleitfähiges Bauelement und Verfahren zu seiner Herstellung |
Country Status (4)
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5474834A (en) * | 1992-03-09 | 1995-12-12 | Kyocera Corporation | Superconducting circuit sub-assembly having an oxygen shielding barrier layer |
| DE19852325C1 (de) * | 1998-11-12 | 2000-05-11 | Siemens Ag | Verfahren zum Erzeugen eines kontinuierlichen Dampfstromes enthaltend eine Verbindung, in der Gallium in einwertiger Form vorliegt, Verdampfungstiegel zum Verdampfen einer Substanz sowie Verwendung des Verdampfungstiegels in einer Vakuumbeschichtungsvorrichtung |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3472694A (en) * | 1961-05-26 | 1969-10-14 | Rca Corp | Deposition of crystalline niobium stannide |
| US3328200A (en) * | 1963-09-23 | 1967-06-27 | Gen Electric | Method of forming superconducting metallic films |
| CH431672A (de) * | 1964-08-28 | 1967-03-15 | Siemens Ag | Verfahren zur Herstellung von supraleitenden Bändern |
| DE1256507B (de) * | 1964-12-12 | 1967-12-14 | Siemens Ag | Verfahren zur Herstellung von supraleitenden Schichten |
| US3549416A (en) * | 1965-06-01 | 1970-12-22 | Gulf Energy & Environ Systems | Process for forming superconductive materials |
| US3620833A (en) * | 1966-12-23 | 1971-11-16 | Texas Instruments Inc | Integrated circuit fabrication |
| US3506940A (en) * | 1967-05-02 | 1970-04-14 | Bell Telephone Labor Inc | High transition temperature superconductor and devices utilizing same |
| US3552352A (en) * | 1968-02-13 | 1971-01-05 | Du Pont | Electron beam vaporization coating apparatus |
| US3615881A (en) * | 1968-10-15 | 1971-10-26 | Air Reduction | Method of forming flux pinning sites in a superconducting material by bombardment with an ion beam and the products thereof |
| CA952739A (en) * | 1971-04-26 | 1974-08-13 | Eugene G. Szklarz | High-transition-temperature superconductors in the nb-al-ge system |
-
1973
- 1973-10-02 GB GB4599773A patent/GB1393350A/en not_active Expired
- 1973-10-05 FR FR7335640A patent/FR2202386B1/fr not_active Expired
- 1973-10-05 DE DE2350161A patent/DE2350161B2/de not_active Ceased
- 1973-10-05 US US05/403,883 patent/US4001481A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| USB403883I5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-03-23 |
| FR2202386A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-05-03 |
| FR2202386B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1978-11-03 |
| DE2350161A1 (de) | 1974-05-22 |
| GB1393350A (en) | 1975-05-07 |
| US4001481A (en) | 1977-01-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8225 | Change of the main classification |
Ipc: H01L 39/12 |
|
| 8226 | Change of the secondary classification |
Ipc: H01B 12/00 |
|
| 8263 | Opposition against grant of a patent | ||
| 8228 | New agent |
Free format text: STREHL, P., DIPL.-ING. DIPL.-WIRTSCH.-ING. SCHUEBEL-HOPF, U., DIPL.-CHEM. DR.RER.NAT., PAT.-ANW., 8000 MUENCHEN |
|
| 8235 | Patent refused |