DE2325104C3 - Verfahren zum Ziehen eines langgestreckten, kristallinen Körpers - Google Patents
Verfahren zum Ziehen eines langgestreckten, kristallinen KörpersInfo
- Publication number
- DE2325104C3 DE2325104C3 DE2325104A DE2325104A DE2325104C3 DE 2325104 C3 DE2325104 C3 DE 2325104C3 DE 2325104 A DE2325104 A DE 2325104A DE 2325104 A DE2325104 A DE 2325104A DE 2325104 C3 DE2325104 C3 DE 2325104C3
- Authority
- DE
- Germany
- Prior art keywords
- melt
- meniscus
- height
- temperature
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title claims description 71
- 230000008569 process Effects 0.000 title claims description 43
- 230000005499 meniscus Effects 0.000 claims description 66
- 239000000155 melt Substances 0.000 claims description 49
- 238000007493 shaping process Methods 0.000 claims description 41
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 239000013078 crystal Substances 0.000 description 66
- 230000008859 change Effects 0.000 description 22
- 238000005231 Edge Defined Film Fed Growth Methods 0.000 description 15
- 239000000463 material Substances 0.000 description 15
- 238000012544 monitoring process Methods 0.000 description 14
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000002425 crystallisation Methods 0.000 description 7
- 230000008025 crystallization Effects 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 230000009471 action Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000033228 biological regulation Effects 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 241001465754 Metazoa Species 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 3
- 238000005755 formation reaction Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 210000003608 fece Anatomy 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000012768 molten material Substances 0.000 description 2
- 230000002028 premature Effects 0.000 description 2
- 230000000284 resting effect Effects 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 241000168133 Euides Species 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 235000000434 Melocanna baccifera Nutrition 0.000 description 1
- 241001497770 Melocanna baccifera Species 0.000 description 1
- 240000007313 Tilia cordata Species 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000000289 melt material Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007142 ring opening reaction Methods 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/34—Edge-defined film-fed crystal-growth using dies or slits
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1004—Apparatus with means for measuring, testing, or sensing
- Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1036—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die]
- Y10T117/104—Means for forming a hollow structure [e.g., tube, polygon]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US269985A US3870477A (en) | 1972-07-10 | 1972-07-10 | Optical control of crystal growth |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2325104A1 DE2325104A1 (de) | 1974-01-24 |
| DE2325104B2 DE2325104B2 (de) | 1980-02-21 |
| DE2325104C3 true DE2325104C3 (de) | 1980-10-09 |
Family
ID=23029412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2325104A Expired DE2325104C3 (de) | 1972-07-10 | 1973-05-17 | Verfahren zum Ziehen eines langgestreckten, kristallinen Körpers |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US3870477A (enExample) |
| JP (1) | JPS5147432B2 (enExample) |
| BE (1) | BE799237A (enExample) |
| BR (1) | BR7303955D0 (enExample) |
| CA (1) | CA998922A (enExample) |
| CH (1) | CH575777A5 (enExample) |
| DE (1) | DE2325104C3 (enExample) |
| FR (1) | FR2191943B1 (enExample) |
| GB (1) | GB1374065A (enExample) |
| IT (1) | IT979997B (enExample) |
| NL (1) | NL7305454A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1988003967A1 (fr) * | 1986-11-26 | 1988-06-02 | Vsesojuzny Nauchno-Issledovatelsky, Proektno-Konst | Procede pour la croissance de monocristaux profiles |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4032390A (en) * | 1974-02-25 | 1977-06-28 | Corning Glass Works | Plural crystal pulling from a melt in an annular crucible heated on both inner and outer walls |
| US3953174A (en) * | 1975-03-17 | 1976-04-27 | Tyco Laboratories, Inc. | Apparatus for growing crystalline bodies from the melt |
| US4116641A (en) * | 1976-04-16 | 1978-09-26 | International Business Machines Corporation | Apparatus for pulling crystal ribbons from a truncated wedge shaped die |
| DE2632614A1 (de) * | 1976-07-20 | 1978-01-26 | Siemens Ag | Vorrichtung zum ziehen eines einkristallinen koerpers aus einem schmelzfilm |
| JPS609000B2 (ja) * | 1977-05-25 | 1985-03-07 | 工業技術院長 | 帯状シリコン結晶の成長装置 |
| JPS5453927U (enExample) * | 1977-09-22 | 1979-04-14 | ||
| JPS5488884A (en) * | 1977-12-26 | 1979-07-14 | Nippon Telegr & Teleph Corp <Ntt> | Plate crystal producing equipment |
| US4217165A (en) * | 1978-04-28 | 1980-08-12 | Ciszek Theodore F | Method of growing a ribbon crystal particularly suited for facilitating automated control of ribbon width |
| US4242589A (en) * | 1979-01-15 | 1980-12-30 | Mobil Tyco Solar Energy Corporation | Apparatus for monitoring crystal growth |
| US4318769A (en) * | 1979-01-15 | 1982-03-09 | Mobil Tyco Solar Energy Corporation | Method of monitoring crystal growth |
| US4334948A (en) * | 1981-02-23 | 1982-06-15 | Rca Corporation | Method of and apparatus for growing crystal ribbon |
| US4440728A (en) * | 1981-08-03 | 1984-04-03 | Mobil Solar Energy Corporation | Apparatus for growing tubular crystalline bodies |
| USH520H (en) | 1985-12-06 | 1988-09-06 | Technique for increasing oxygen incorporation during silicon czochralski crystal growth | |
| DE69208146T2 (de) * | 1991-05-30 | 1996-06-20 | Chichibu Cement Kk | Rutil-Einkristalle sowie Verfahren zu deren Zuchtung |
| US5458083A (en) * | 1992-05-29 | 1995-10-17 | Chichibu Cement Co., Ltd. | Growth method for a rod form of single oxide crystal |
| US5360599A (en) * | 1993-06-21 | 1994-11-01 | General Electric Company | Crucible support heater for the control of melt flow pattern in a crystal growth process |
| DE102006041736A1 (de) * | 2006-09-04 | 2008-03-20 | Schott Solar Gmbh | Verfahren und Anordnung zur Herstellung eines Rohres |
| CN101519797B (zh) * | 2009-01-20 | 2012-05-02 | 洛阳金诺机械工程有限公司 | 晶体碎料拉制硅芯的方法及实施该方法的一种装置 |
| CN104088011B (zh) * | 2014-07-15 | 2017-01-18 | 牛玥 | 一种蓝宝石微毛细管的制备方法及其使用的模具 |
| CN113280906B (zh) * | 2021-06-18 | 2022-05-10 | 太原理工大学 | 基于计算机视觉的泡生法籽晶最佳接种时机振动感知方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL238924A (enExample) * | 1959-05-05 | |||
| US3428436A (en) * | 1963-12-16 | 1969-02-18 | Monsanto Co | Methods and apparatus for zone melting |
| US3291574A (en) * | 1963-12-23 | 1966-12-13 | Gen Motors Corp | Semiconductor crystal growth from a domical projection |
| US3291650A (en) * | 1963-12-23 | 1966-12-13 | Gen Motors Corp | Control of crystal size |
| NL6512921A (enExample) * | 1965-10-06 | 1967-04-07 | ||
| US3650703A (en) * | 1967-09-08 | 1972-03-21 | Tyco Laboratories Inc | Method and apparatus for growing inorganic filaments, ribbon from the melt |
| US3591348A (en) * | 1968-01-24 | 1971-07-06 | Tyco Laboratories Inc | Method of growing crystalline materials |
| US3621213A (en) * | 1969-11-26 | 1971-11-16 | Ibm | Programmed digital-computer-controlled system for automatic growth of semiconductor crystals |
| US3692499A (en) * | 1970-08-31 | 1972-09-19 | Texas Instruments Inc | Crystal pulling system |
-
1972
- 1972-07-10 US US269985A patent/US3870477A/en not_active Expired - Lifetime
-
1973
- 1973-03-13 CA CA165,978A patent/CA998922A/en not_active Expired
- 1973-03-20 GB GB1333073A patent/GB1374065A/en not_active Expired
- 1973-03-23 IT IT49012/73A patent/IT979997B/it active
- 1973-04-18 NL NL7305454A patent/NL7305454A/xx unknown
- 1973-05-08 BE BE130864A patent/BE799237A/xx not_active IP Right Cessation
- 1973-05-09 FR FR7316790A patent/FR2191943B1/fr not_active Expired
- 1973-05-10 CH CH665273A patent/CH575777A5/xx not_active IP Right Cessation
- 1973-05-17 JP JP48054173A patent/JPS5147432B2/ja not_active Expired
- 1973-05-17 DE DE2325104A patent/DE2325104C3/de not_active Expired
- 1973-05-28 BR BR3955/73A patent/BR7303955D0/pt unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1988003967A1 (fr) * | 1986-11-26 | 1988-06-02 | Vsesojuzny Nauchno-Issledovatelsky, Proektno-Konst | Procede pour la croissance de monocristaux profiles |
| WO1988003968A1 (fr) * | 1986-11-26 | 1988-06-02 | Vsesojuzny Nauchno-Issledovatelsky, Proektno-Konst | Dispositif pour la croissance de monocristaux proifles |
Also Published As
| Publication number | Publication date |
|---|---|
| BE799237A (fr) | 1973-11-08 |
| CA998922A (en) | 1976-10-26 |
| BR7303955D0 (pt) | 1974-02-12 |
| IT979997B (it) | 1974-09-30 |
| US3870477A (en) | 1975-03-11 |
| JPS5147432B2 (enExample) | 1976-12-15 |
| NL7305454A (enExample) | 1974-01-14 |
| FR2191943B1 (enExample) | 1978-06-30 |
| CH575777A5 (enExample) | 1976-05-31 |
| DE2325104A1 (de) | 1974-01-24 |
| JPS4953176A (enExample) | 1974-05-23 |
| DE2325104B2 (de) | 1980-02-21 |
| FR2191943A1 (enExample) | 1974-02-08 |
| GB1374065A (en) | 1974-11-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: SAPHIKON, INC., MILFORD, N.H., US |
|
| 8328 | Change in the person/name/address of the agent |
Free format text: WALLACH, C., DIPL.-ING. KOCH, G., DIPL.-ING. HAIBACH, T., DIPL.-PHYS. DR.RER.NAT. FELDKAMP, R., DIPL.-ING., PAT.-ANW., 8000 MUENCHEN |