DE2311578A1 - Permanentmagnet-linsensystem - Google Patents
Permanentmagnet-linsensystemInfo
- Publication number
- DE2311578A1 DE2311578A1 DE2311578A DE2311578A DE2311578A1 DE 2311578 A1 DE2311578 A1 DE 2311578A1 DE 2311578 A DE2311578 A DE 2311578A DE 2311578 A DE2311578 A DE 2311578A DE 2311578 A1 DE2311578 A1 DE 2311578A1
- Authority
- DE
- Germany
- Prior art keywords
- lens system
- magnetic
- lens
- small
- magnets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 18
- 229910052742 iron Inorganic materials 0.000 claims description 9
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
- 229910000531 Co alloy Inorganic materials 0.000 claims description 2
- 239000002800 charge carrier Substances 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 230000006698 induction Effects 0.000 description 10
- 230000004907 flux Effects 0.000 description 9
- 230000007547 defect Effects 0.000 description 6
- 230000004075 alteration Effects 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
- 238000012634 optical imaging Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910001177 Ticonal Inorganic materials 0.000 description 1
- 229910000828 alnico Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 description 1
- LYKJEJVAXSGWAJ-UHFFFAOYSA-N compactone Natural products CC1(C)CCCC2(C)C1CC(=O)C3(O)CC(C)(CCC23)C=C LYKJEJVAXSGWAJ-UHFFFAOYSA-N 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/143—Permanent magnetic lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7203264A NL7203264A (enrdf_load_stackoverflow) | 1972-03-10 | 1972-03-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2311578A1 true DE2311578A1 (de) | 1973-09-20 |
Family
ID=19815571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2311578A Pending DE2311578A1 (de) | 1972-03-10 | 1973-03-08 | Permanentmagnet-linsensystem |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3812365A (enrdf_load_stackoverflow) |
| JP (1) | JPS48103270A (enrdf_load_stackoverflow) |
| DE (1) | DE2311578A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1426243A (enrdf_load_stackoverflow) |
| NL (1) | NL7203264A (enrdf_load_stackoverflow) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3984687A (en) * | 1975-03-17 | 1976-10-05 | International Business Machines Corporation | Shielded magnetic lens and deflection yoke structure for electron beam column |
| GB1594465A (en) * | 1977-03-23 | 1981-07-30 | Nat Res Dev | Electron beam apparatus |
| JPS5953658B2 (ja) * | 1980-01-30 | 1984-12-26 | 株式会社日立製作所 | 電子レンズ |
| GB2192092A (en) * | 1986-06-25 | 1987-12-31 | Philips Electronic Associated | Magnetic lens system |
| US6201251B1 (en) * | 1998-08-28 | 2001-03-13 | Nikon Corporation | Compensation of space charge in a particle beam system |
| CN101461026B (zh) | 2006-06-07 | 2012-01-18 | Fei公司 | 与包含真空室的装置一起使用的滑动轴承 |
| GB201000952D0 (en) * | 2010-01-21 | 2010-03-10 | Nfab Ltd | A sub miniature low energy scanned beam microscope |
| JP6323943B2 (ja) * | 2013-02-27 | 2018-05-16 | 株式会社Ｐａｒａｍ | 電子レンズおよび電子ビーム装置 |
-
1972
- 1972-03-10 NL NL7203264A patent/NL7203264A/xx unknown
-
1973
- 1973-03-08 DE DE2311578A patent/DE2311578A1/de active Pending
- 1973-03-08 GB GB1133073A patent/GB1426243A/en not_active Expired
- 1973-03-09 US US00339881A patent/US3812365A/en not_active Expired - Lifetime
- 1973-03-10 JP JP48028449A patent/JPS48103270A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1426243A (en) | 1976-02-25 |
| JPS48103270A (enrdf_load_stackoverflow) | 1973-12-25 |
| NL7203264A (enrdf_load_stackoverflow) | 1973-09-12 |
| US3812365A (en) | 1974-05-21 |
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