JPS48103270A - - Google Patents

Info

Publication number
JPS48103270A
JPS48103270A JP48028449A JP2844973A JPS48103270A JP S48103270 A JPS48103270 A JP S48103270A JP 48028449 A JP48028449 A JP 48028449A JP 2844973 A JP2844973 A JP 2844973A JP S48103270 A JPS48103270 A JP S48103270A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48028449A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS48103270A publication Critical patent/JPS48103270A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/143—Permanent magnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP48028449A 1972-03-10 1973-03-10 Pending JPS48103270A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7203264A NL7203264A (enrdf_load_stackoverflow) 1972-03-10 1972-03-10

Publications (1)

Publication Number Publication Date
JPS48103270A true JPS48103270A (enrdf_load_stackoverflow) 1973-12-25

Family

ID=19815571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48028449A Pending JPS48103270A (enrdf_load_stackoverflow) 1972-03-10 1973-03-10

Country Status (5)

Country Link
US (1) US3812365A (enrdf_load_stackoverflow)
JP (1) JPS48103270A (enrdf_load_stackoverflow)
DE (1) DE2311578A1 (enrdf_load_stackoverflow)
GB (1) GB1426243A (enrdf_load_stackoverflow)
NL (1) NL7203264A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014194923A (ja) * 2013-02-27 2014-10-09 Param Co Ltd 電子レンズおよび電子ビーム装置

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3984687A (en) * 1975-03-17 1976-10-05 International Business Machines Corporation Shielded magnetic lens and deflection yoke structure for electron beam column
GB1594465A (en) * 1977-03-23 1981-07-30 Nat Res Dev Electron beam apparatus
JPS5953658B2 (ja) * 1980-01-30 1984-12-26 株式会社日立製作所 電子レンズ
GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system
US6201251B1 (en) * 1998-08-28 2001-03-13 Nikon Corporation Compensation of space charge in a particle beam system
CN101461026B (zh) * 2006-06-07 2012-01-18 Fei公司 与包含真空室的装置一起使用的滑动轴承
GB201000952D0 (en) * 2010-01-21 2010-03-10 Nfab Ltd A sub miniature low energy scanned beam microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014194923A (ja) * 2013-02-27 2014-10-09 Param Co Ltd 電子レンズおよび電子ビーム装置

Also Published As

Publication number Publication date
DE2311578A1 (de) 1973-09-20
GB1426243A (en) 1976-02-25
NL7203264A (enrdf_load_stackoverflow) 1973-09-12
US3812365A (en) 1974-05-21

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