DE2206493B2 - - Google Patents

Info

Publication number
DE2206493B2
DE2206493B2 DE2206493A DE2206493A DE2206493B2 DE 2206493 B2 DE2206493 B2 DE 2206493B2 DE 2206493 A DE2206493 A DE 2206493A DE 2206493 A DE2206493 A DE 2206493A DE 2206493 B2 DE2206493 B2 DE 2206493B2
Authority
DE
Germany
Prior art keywords
quartz glass
inner layer
layer
ions
body according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE2206493A
Other languages
German (de)
English (en)
Other versions
DE2206493C3 (de
DE2206493A1 (de
Inventor
Karlheinz Dipl.-Phys.Dr. Rau
Karl Prof. Seiler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Schott Quarzschmelze GmbH
Original Assignee
Heraeus Schott Quarzschmelze GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Schott Quarzschmelze GmbH filed Critical Heraeus Schott Quarzschmelze GmbH
Priority to DE2206493A priority Critical patent/DE2206493C3/de
Priority to JP1035773A priority patent/JPS545404B2/ja
Priority to CH143473A priority patent/CH584661A5/xx
Priority to US330136A priority patent/US3925583A/en
Priority to FR7304758A priority patent/FR2171404B1/fr
Priority to GB684573A priority patent/GB1382396A/en
Publication of DE2206493A1 publication Critical patent/DE2206493A1/de
Publication of DE2206493B2 publication Critical patent/DE2206493B2/de
Application granted granted Critical
Publication of DE2206493C3 publication Critical patent/DE2206493C3/de
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/02Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/40Coatings comprising at least one inhomogeneous layer
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/13Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/131Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
    • Y10T428/1317Multilayer [continuous layer]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495Thickness [relative or absolute]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Glass Compositions (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Surface Treatment Of Glass (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
DE2206493A 1972-02-11 1972-02-11 Mehrschichtiger Quarzglaskörper für die Verwendung in der Festkörpertechnologie Expired DE2206493C3 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE2206493A DE2206493C3 (de) 1972-02-11 1972-02-11 Mehrschichtiger Quarzglaskörper für die Verwendung in der Festkörpertechnologie
JP1035773A JPS545404B2 (US08124317-20120228-C00026.png) 1972-02-11 1973-01-26
CH143473A CH584661A5 (US08124317-20120228-C00026.png) 1972-02-11 1973-02-01
US330136A US3925583A (en) 1972-02-11 1973-02-06 Composite quartz glass body
FR7304758A FR2171404B1 (US08124317-20120228-C00026.png) 1972-02-11 1973-02-09
GB684573A GB1382396A (en) 1972-02-11 1973-02-12 Multi-layer article made of transparent fused silica

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2206493A DE2206493C3 (de) 1972-02-11 1972-02-11 Mehrschichtiger Quarzglaskörper für die Verwendung in der Festkörpertechnologie

Publications (3)

Publication Number Publication Date
DE2206493A1 DE2206493A1 (de) 1973-08-23
DE2206493B2 true DE2206493B2 (US08124317-20120228-C00026.png) 1974-06-12
DE2206493C3 DE2206493C3 (de) 1975-01-30

Family

ID=5835730

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2206493A Expired DE2206493C3 (de) 1972-02-11 1972-02-11 Mehrschichtiger Quarzglaskörper für die Verwendung in der Festkörpertechnologie

Country Status (6)

Country Link
US (1) US3925583A (US08124317-20120228-C00026.png)
JP (1) JPS545404B2 (US08124317-20120228-C00026.png)
CH (1) CH584661A5 (US08124317-20120228-C00026.png)
DE (1) DE2206493C3 (US08124317-20120228-C00026.png)
FR (1) FR2171404B1 (US08124317-20120228-C00026.png)
GB (1) GB1382396A (US08124317-20120228-C00026.png)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2043040B (en) * 1978-12-07 1982-12-15 Tokyo Ohka Kogyo Co Ltd Method for preventing leaching of contaminants from solid surfaces
JPS59184736A (ja) * 1983-04-06 1984-10-20 Furukawa Electric Co Ltd:The 光学系多孔質ガラスの透明ガラス化法
JPH0657612B2 (ja) * 1987-05-14 1994-08-03 信越石英株式会社 合成石英ガラス管およびその製造方法
US4935046A (en) * 1987-12-03 1990-06-19 Shin-Etsu Handotai Company, Limited Manufacture of a quartz glass vessel for the growth of single crystal semiconductor
US5011566A (en) * 1989-03-15 1991-04-30 The United States Of America As Represented By The Secretary Of The Air Force Method of manufacturing microscopic tube material
JPH0611705A (ja) * 1992-01-31 1994-01-21 Sony Corp 能動素子基板
DE19719133C2 (de) * 1997-05-07 1999-09-02 Heraeus Quarzglas Glocke aus Quarzglas und Verfahren für ihre Herstellung
US6110284A (en) * 1998-01-09 2000-08-29 Applied Materials, Inc. Apparatus and a method for shielding light emanating from a light source heating a semicondutor processing chamber
US8824140B2 (en) * 2010-09-17 2014-09-02 Apple Inc. Glass enclosure

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2188121A (en) * 1936-12-11 1940-01-23 Corning Glass Works Making articles of fused silica
US2829981A (en) * 1954-01-29 1958-04-08 Shapiro Isadore Surface modified silica gels
US3414465A (en) * 1965-06-21 1968-12-03 Owens Illinois Inc Sealed glass article of manufacture
DE1621011A1 (de) * 1967-04-13 1971-04-29 Telefunken Patent Verfahren zum Oberflaechenvergueten von Bauteilen
US3776809A (en) * 1968-02-22 1973-12-04 Heraeus Schott Quarzschmelze Quartz glass elements
US3576932A (en) * 1969-02-17 1971-04-27 Texas Instruments Inc Sintering vapor deposited silica on a mandrel designed to reduce shrinkage
BE757500A (fr) * 1969-10-14 1971-03-16 Ncr Co Four tubulaire destine au traitement de dispositifs semi-conducteurs
DE2038564C3 (de) * 1970-08-04 1973-09-13 Heraeus Schott Quarzschmelze Gmbh, 6450 Hanau Quarzglasgeräteteil, insbesondere Quarzglasrohr, mit in seiner Außenoberflächenschicht enthaltenen, Kristallbildung fördernden Keimen zur Verwendung bei hohen Temperaturen, insbesondere für die Durchführung halbleitertechnologischer Verfahren
US3779856A (en) * 1971-07-23 1973-12-18 Owens Illinois Inc Glass-ceramic and method for making same

Also Published As

Publication number Publication date
JPS4892410A (US08124317-20120228-C00026.png) 1973-11-30
DE2206493C3 (de) 1975-01-30
DE2206493A1 (de) 1973-08-23
CH584661A5 (US08124317-20120228-C00026.png) 1977-02-15
GB1382396A (en) 1975-01-29
FR2171404B1 (US08124317-20120228-C00026.png) 1977-01-07
US3925583A (en) 1975-12-09
JPS545404B2 (US08124317-20120228-C00026.png) 1979-03-16
FR2171404A1 (US08124317-20120228-C00026.png) 1973-09-21

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977
8339 Ceased/non-payment of the annual fee