DE2202360C3 - Photographisches Aufzeichnungsmaterial zur Herstellung von Zwischenoriginalen und Verfahren zur Herstellung von Zwischenoriginalen und Lichtmasken - Google Patents
Photographisches Aufzeichnungsmaterial zur Herstellung von Zwischenoriginalen und Verfahren zur Herstellung von Zwischenoriginalen und LichtmaskenInfo
- Publication number
- DE2202360C3 DE2202360C3 DE19722202360 DE2202360A DE2202360C3 DE 2202360 C3 DE2202360 C3 DE 2202360C3 DE 19722202360 DE19722202360 DE 19722202360 DE 2202360 A DE2202360 A DE 2202360A DE 2202360 C3 DE2202360 C3 DE 2202360C3
- Authority
- DE
- Germany
- Prior art keywords
- layer
- light
- photoresist
- impermeable
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
- G03F1/56—Organic absorbers, e.g. of photo-resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/005—Silver halide emulsions; Preparation thereof; Physical treatment thereof; Incorporation of additives therein
- G03C1/06—Silver halide emulsions; Preparation thereof; Physical treatment thereof; Incorporation of additives therein with non-macromolecular additives
- G03C1/08—Sensitivity-increasing substances
- G03C1/10—Organic substances
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10857771A | 1971-01-21 | 1971-01-21 | |
US20061171A | 1971-11-19 | 1971-11-19 |
Publications (3)
Publication Number | Publication Date |
---|---|
DE2202360A1 DE2202360A1 (de) | 1973-05-17 |
DE2202360B2 DE2202360B2 (de) | 1979-08-02 |
DE2202360C3 true DE2202360C3 (de) | 1980-04-10 |
Family
ID=26806041
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19722202360 Expired DE2202360C3 (de) | 1971-01-21 | 1972-01-19 | Photographisches Aufzeichnungsmaterial zur Herstellung von Zwischenoriginalen und Verfahren zur Herstellung von Zwischenoriginalen und Lichtmasken |
Country Status (6)
Country | Link |
---|---|
BE (1) | BE778333A (nl) |
CA (1) | CA993709A (nl) |
DE (1) | DE2202360C3 (nl) |
FR (1) | FR2122578B1 (nl) |
GB (1) | GB1385241A (nl) |
NL (1) | NL173790C (nl) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2660951C2 (de) * | 1975-06-03 | 1986-08-07 | E.I. Du Pont De Nemours And Co., Wilmington, Del. | Lichtempfindliches Mehrschichtmaterial |
DE2660921C3 (de) * | 1975-11-17 | 1987-07-30 | E.I. Du Pont De Nemours And Co., Wilmington, Del. | Verfahren zur Herstellung von punktgeätzten Masken |
DE2658422C2 (de) * | 1976-12-23 | 1986-05-22 | Hoechst Ag, 6230 Frankfurt | Verfahren zur Herstellung eines Negativ-Trockenresistfilms |
DE2721687C2 (de) * | 1977-05-13 | 1986-11-20 | Hoechst Ag, 6230 Frankfurt | Verfahren zum Abdecken von Kopiervorlagen mit Masken |
US4123272A (en) * | 1977-05-17 | 1978-10-31 | E. I. Du Pont De Nemours And Company | Double-negative positive-working photohardenable elements |
JPS5420719A (en) | 1977-07-15 | 1979-02-16 | Fuji Photo Film Co Ltd | Photosensitive material for image formation and image formation method |
US4311784A (en) | 1978-05-09 | 1982-01-19 | E. I. Du Pont De Nemours And Company | Multilayer photosensitive solvent-processable litho element |
DE3162554D1 (en) * | 1980-02-20 | 1984-04-19 | Agfa Gevaert Nv | Photosensitive material and a process for reproducing photo-information |
JPS5962859A (ja) * | 1982-10-04 | 1984-04-10 | Fuji Photo Film Co Ltd | 感光性平版印刷版の製版方法 |
US4515877A (en) * | 1982-11-27 | 1985-05-07 | Basf Aktiengesellschaft | Image-recording materials and image-recording carried out using these to produce an optical mask |
GB8414867D0 (en) * | 1984-06-11 | 1984-07-18 | Minnesota Mining & Mfg | Pre-press proofing system |
DE3689949T2 (de) * | 1985-12-09 | 1995-03-16 | Nippon Paint Co Ltd | Druckmaterial auf der Basis eines lichtempfindlichen Harzes. |
DE3618373A1 (de) * | 1986-05-31 | 1987-12-03 | Basf Ag | Lichtempfindliches aufzeichnungselement |
EP0266069A3 (en) * | 1986-10-01 | 1988-09-21 | Napp Systems (Usa) Inc. | Photopolymerizable composition useful for printing plates |
DE3827245A1 (de) * | 1988-08-11 | 1990-02-15 | Hoechst Ag | Photopolymerisierbares aufzeichnungsmaterial |
AU5600200A (en) | 1999-06-10 | 2001-01-02 | Allied-Signal Inc. | Spin-on-glass anti-reflective coatings for photolithography |
US6824879B2 (en) | 1999-06-10 | 2004-11-30 | Honeywell International Inc. | Spin-on-glass anti-reflective coatings for photolithography |
EP1152294B1 (en) * | 2000-04-18 | 2012-06-13 | FUJIFILM Corporation | Photosensitive image-recording material |
JP4381143B2 (ja) | 2001-11-15 | 2009-12-09 | ハネウェル・インターナショナル・インコーポレーテッド | フォトリソグラフィー用スピンオン反射防止膜 |
US8557877B2 (en) | 2009-06-10 | 2013-10-15 | Honeywell International Inc. | Anti-reflective coatings for optically transparent substrates |
US8864898B2 (en) | 2011-05-31 | 2014-10-21 | Honeywell International Inc. | Coating formulations for optical elements |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3353955A (en) * | 1964-06-16 | 1967-11-21 | Du Pont | Stratum transfer process based on adhesive properties of photopolymerizable layer |
US3469982A (en) * | 1968-09-11 | 1969-09-30 | Jack Richard Celeste | Process for making photoresists |
-
1972
- 1972-01-10 CA CA132,089A patent/CA993709A/en not_active Expired
- 1972-01-19 DE DE19722202360 patent/DE2202360C3/de not_active Expired
- 1972-01-21 NL NL7200858A patent/NL173790C/nl not_active IP Right Cessation
- 1972-01-21 GB GB308472A patent/GB1385241A/en not_active Expired
- 1972-01-21 FR FR7202044A patent/FR2122578B1/fr not_active Expired
- 1972-01-21 BE BE778333A patent/BE778333A/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
NL173790B (nl) | 1983-10-03 |
BE778333A (fr) | 1972-07-24 |
DE2202360B2 (de) | 1979-08-02 |
NL7200858A (nl) | 1972-07-25 |
FR2122578B1 (nl) | 1977-09-02 |
GB1385241A (en) | 1975-02-26 |
FR2122578A1 (nl) | 1972-09-01 |
CA993709A (en) | 1976-07-27 |
DE2202360A1 (de) | 1973-05-17 |
NL173790C (nl) | 1984-03-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C3 | Grant after two publication steps (3rd publication) |